Ulvac UTM1600 Series, Instruction Manual

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Introduction
Thank you for choosing the ULVAC Turbo Molecular Pump.
This instruction manual has been described for the customer who uses this product and the
technician who are trained by ULVAC.
Please read the instruction manual carefully before using turbo molecular pump, and save the
instruction manual for future reference.
Copyrights and Disclaimers
This document is copyrighted by ULVAC, Inc. Please refrain from reproducing or copying part or all
of this document without permission from ULVAC.
An original language of this manual is English. The manuals of the same model described in other
languages are the translations of the English manual.
In an effort to improve the product, this document may be revised in the future without notice.
Every effort has been made to prepare an accurate and complete manual, but if an error or omission
should be discovered, revisions might not be possible immediately.
ULVAC does not take responsibility for any effects that may result from the use of this manual.
Copyright 2017 ULVAC, Inc.All rights reserved.
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