Ulvac UTM1600 Series, Instruction Manual

Page: 58 / 108

SECTION 6 OPERATION
44
6
6.2
Startup Preparation
NOTICE
When turning the POWER switch on or off, a "clunk" sound may be heard from inside the
pump. This sound is from the rotor inside the pump being levitated or de-levitated. This is normal.
When the power is switched ON, the unit starts up in the REMOTE mode. It also starts up in
the REMOTE mode when restoring power after a power interruption.
6.2.1 Start-up Preparation Sequence in LOCAL Mode
(1) Feed the cooling water into the cooling line.
(2) Turn on the POWER switch (Fig. 2-2 (2)) and check if the POWER lamp (Fig. 2-3 (3)) lights.
And the rotor of the turbo molecular pump is levitated by the magnetic bearing. Maintained
push the RESET button (Fig. 2-3 (2)) to change from REMOTE mode to LOCAL mode. The
POWER lamp blinks when becoming a LOCAL mode.
(3) Evacuate the turbo molecular pump by using a backing vacuum pump.
(4) Start-up preparation is complete if the pressure in the turbo molecular pump reduces below
200 Pa.
6.2.2 Start-up Preparation Sequence in REMOTE-control Connector
(1) Feed the cooling water into the cooling line.
(2) Turn on the POWER switch and check that the POWER lamp are illuminated and, in
addition, the "REMOTE" signal (Refer to Table 6-4) of the remote-control connector is ON
in this product of a standard spec. Under this condition, the rotor of the turbo molecular
pump is levitated by the magnetic bearing.
(3) Evacuate the turbo molecular pump by using a backing vacuum pump.
(4) Start-up preparation is complete if the pressure in the turbo molecular pump reduces below
200 Pa.