YO99-0874-DI-002-18
Contents-2
4. Operation ..................................................................................................................................... 28
4.1 Test run ...................................................................................................................................... 28
4.2 Operation ................................................................................................................................... 30
4.2.1 Exhaust start ........................................................................................................................ 30
4.2.2 Exhaust stop ........................................................................................................................ 30
5. Option .............................................................................................................................................. 32
5.1
Special motors .......................................................................................................................... 32
5.2
Inlet and outlet flange ............................................................................................................. 32
5.3 Oil type .................................................................................................................................... 32
5.4 Motor control equipment ......................................................................................................... 32
5.4.1 Setting of Motor Controller (Atmospheric Pressure Actuating Type) .................................. 33
5.5 Separate Evacuation of Lubricating Chamber .......................................................................... 37
5.5.1 Preparation .......................................................................................................................... 38
5.5.2 Water Piping, Electrical Connection and Lubrication. ......................................................... 38
5.5.3 Checking lubricating oil level ............................................................................................... 38
5.5.4 Pumping .............................................................................................................................. 38
5.5.5 Checking rotational direction ............................................................................................... 38
5.5.6 Operation ............................................................................................................................. 39
5.5.7 Pumping start operation ...................................................................................................... 39
5.5.8 Shutdown operation ............................................................................................................ 39
5.6 Optional attachment figure ........................................................................................................ 40
6. Maintenance and Check.................................................................................................................. 44
6.1 Maintenance .............................................................................................................................. 44
6.2 Inspection Items ......................................................................................................................... 45
6.3 Checkup after storage for a long period .................................................................................... 47
6.4 Overhaul .................................................................................................................................... 47
6.5Troubleshooting .......................................................................................................................... 48
7. Removal / transport ......................................................................................................................... 50
7.1 Operation procedure .................................................................................................................. 50
8. Disposal ........................................................................................................................................... 51
9. Warranty Clauses ............................................................................................................................ 52
9.1 Warrantable Items ...................................................................................................................... 52
9.2 Duration of guarantee ................................................................................................................ 52
9.3 Warrantee scope........................................................................................................................ 52
9.4 Response procedure ................................................................................................................. 52
9.5 Disclaimer .................................................................................................................................. 53
9.6 Others ........................................................................................................................................ 53
10. Main Displacement Parts .............................................................................................................. 54
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
Summary of Contents for PRC-003A
Page 10: ...YO99 0874 DI 002 18 ix Fig 1 Warning Label PRC 003A PRC 006A PRC 012A PRC 018A...
Page 24: ...YO99 0874 DI 002 18 8 2 4 Dimensional drawing Fig 3 PRC 003A Dimensional drawing...
Page 25: ...YO99 0874 DI 002 18 9 Fig 4 PRC 006A Dimensional drawing...
Page 26: ...YO99 0874 DI 002 18 10 Fig 5 PRC 012A Dimensional drawing...
Page 27: ...YO99 0874 DI 002 18 11 Fig 6 PRC 018A Dimensional drawing...
Page 57: ...YO99 0874 DI 002 18 41 Fig 15 PRC 006A Optional attachment figure...
Page 58: ...YO99 0874 DI 002 18 42 Fig 16 PRC 012A Optional attachment figure...
Page 59: ...YO99 0874 DI 002 18 43 Fig 17 PRC 018A Optional attachment figure...
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