Ulvac PRC-003A, Instruction Manual

Page: 16 / 76

YO99-0874-DI-002-18
Contents-3
Table of Contents
Fig. 1 Warning Label ...................................................................................................................... ix
Fig. 2 Location of vacuum pump in host device ............................................................................. 7
Fig. 3 PRC-003A Dimensional drawing .......................................................................................... 8
Fig. 4 PRC-006A Dimensional drawing .......................................................................................... 9
Fig. 5 PRC-012A Dimensional drawing ........................................................................................ 10
Fig. 6 PRC-018A Dimensional drawing ......................................................................................... 11
Fig. 7 Pumping Speed
（
PRC-003A/006A
）
................................................................................ 13
Fig. 8 Pumping Speed
（
PRC-012A/018A
）
................................................................................ 13
Fig. 9 Evacuation by mechanical booster pump (example) ......................................................... 15
Fig. 10 Oil level gauge .................................................................................................................. 19
Fig. 11 Gear rotation direction ...................................................................................................... 29
Fig. 12 Separate evacuation of lubricating chamber ................................................................... 37
Fig. 13 Separate evacuation of lubricating chamber (example) .................................................. 37
Fig. 14 PRC-003A
Optional attachment figure ........................................................................ 40
Fig. 15 PRC-006A Optional attachment figure ........................................................................ 41
Fig. 16 PRC-012A Optional attachment figure ........................................................................ 42
Fig. 17 PRC-018A Optional attachment figure ........................................................................ 43
Table. 1 standard accessories .........................................................................................................x
Table. 2 Details model list ............................................................................................................... 5
Table. 3 Performance specifications .............................................................................................. 6
Table. 4 Oil level gauge ................................................................................................................ 19
Table. 5 Electrical connection ....................................................................................................... 26
Table. 6 Rated current value of the PRC series standard motor ................................................. 26
Table. 7 Parameter setting: Mitsubishi FR-E520 series ............................................................... 34
Table. 8 Parameter setting: Mitsubishi FR-F520J series ............................................................. 35
Table. 9 Parameter setting: Mitsubishi FR-D720 series ............................................................... 36
Table. 10 Optional parts................................................................................................................ 37
Table. 11 Maintenance list ............................................................................................................ 45
Table. 12 Troubleshooting ............................................................................................................ 48
Table. 13 PRC-003A Main displacement parts list ....................................................................... 54
Table. 14 PRC-006A Main displacement parts list ....................................................................... 55
Table. 15 PRC-012A Main displacement parts list ....................................................................... 56
Table. 16 PRC-018A Main displacement parts list ....................................................................... 57