YO99-0874-DI-002-18
iii
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be restricted on
the use of the product.
Use of this product and this Instruction Manual.
Please read this Instruction Manual before starting installation, operation
check or maintenance of this product to use it in long term. You are requested
to fully understand the safety precautions, specifications and operation
methods of the product.
DANGER
Use of the toxic, combustible or combustion susceptible gas and substance
other than inactive gas is not allowed as there is a risk of causing fire or
explosion inside the Pump unit if it was exhausted by the vacuum pump.
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas was
sucked in the vacuum pump. Pay attention to execute maintenance work.
DANGER
We would be obliged to refrain from handling and/or executing maintenance of
the product if the detail of used hazardous substance was not disclosed or the
product has exhausted such substance that the detoxification process is
hardly conducted.
WARNING
You are kindly requested to acknowledge that specifications and/or price of
the product and description of the Instruction Manual are subject to change
without prior notice for improvement.
Any change shall update the version number at the top right of the Instruction
Manual cover and issue the revised version.
WARNING
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from the
Pump unit if it was exhausted by the vacuum pump.
DANGER
Summary of Contents for PRC-003A
Page 10: ...YO99 0874 DI 002 18 ix Fig 1 Warning Label PRC 003A PRC 006A PRC 012A PRC 018A...
Page 24: ...YO99 0874 DI 002 18 8 2 4 Dimensional drawing Fig 3 PRC 003A Dimensional drawing...
Page 25: ...YO99 0874 DI 002 18 9 Fig 4 PRC 006A Dimensional drawing...
Page 26: ...YO99 0874 DI 002 18 10 Fig 5 PRC 012A Dimensional drawing...
Page 27: ...YO99 0874 DI 002 18 11 Fig 6 PRC 018A Dimensional drawing...
Page 57: ...YO99 0874 DI 002 18 41 Fig 15 PRC 006A Optional attachment figure...
Page 58: ...YO99 0874 DI 002 18 42 Fig 16 PRC 012A Optional attachment figure...
Page 59: ...YO99 0874 DI 002 18 43 Fig 17 PRC 018A Optional attachment figure...
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