Ulvac PRC-003A, Instruction Manual

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YO99-0874-DI-002-18
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Use the flange for connection between the pump Inlet and the piping.
Provide a vacuum valve, vacuum gauge and vent valve between the vacuum chamber and pump,
as shown in Fig. 9.
MODEL Flange at the pipe
PRC-003A VF80
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
PRC-006A VF80
PRC-012A VF100
PRC-018A VF150
3.4.2 Outlet port Piping
Use the flange for connection between the pump Outlet and the piping.
MODEL Flange at the pipe
PRC-003A VG80
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
PRC-006A VG80
PRC-012A VG80
PRC-018A VG100
(1) Put a pipe having bellows between the Supplementary pump and outlet of
the PRC-003A/PRC-006A/PRC-012A/PRC-018A.
(2) Do not connect directly the Supplementary pump inlet with the outlet of
the PRC-003A/ PRC-006A/ PRC-012A/PRC-018A.
DANGER
① Use of the toxic, combustible or combustion susceptible gas other
than inactive gas is not allowed as there is a risk of leakage of the
gas from the Pump unit if it was exhausted by the vacuum pump.
②
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by
the vacuum pump.
③
It is not allowed to use any corrosive gas other than inactive gas as it
might cause corrosion and/or give damage on pump parts when
discharged through vacuum pump.
④ Be sure to use pipes made of metal (electricity-conducting material).
Ensure also to take a grounding
⑤
If to exhaust any combustible, combustion susceptible or corrosive
gas, be sure to use pipes made of high pressure withstanding and
corrosion resistant metal. Ensure also to take a grounding.