Ulvac PRC-003A, Instruction Manual

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YO99-0874-DI-002-18
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2.2 Performance Specifications
Table. 3 Performance specifications
Item Model PRC-003A PRC-006A PRC-012A PRC-018A
Maximum pumping speed 50/60 Hz (m 3 /h) 280/330 ※ 2 500/600 ※ 2 1000/1200 ※ 2
1500/1800 ※ 2
Ultimate pressure (Pa) 0.4 ※ 1 0.67 ※ 1
Max. intake pressure (Pa)
50Hz 1.2 x 10
3
1.3 x 10
3
1.3 x 10
3
1.2
×
10
3
60Hz 9.3 x 10
2
1.1 x 10
3
1.1 x 10
3
9.3
×
10
2
Max. allowable pressure difference
(exhaust pressure -intakepressure) (Pa)
50Hz 4.0 x 10 3 7.3 x 10 3 7.3 x 10 3
4.3
×
10
3
60Hz 3.3 x 10 3 6.0 x 10 3 6.0 x 10 3 3.2
×
10 3
Allowable drive pressure (Pa) to 1.0
×
10 5 (Atmospheric pressure operation type) ※ 4
Standard fore pump VD601 VD901 VS1501 VS2401
Motor output (number of poles) (kW) 0.75(2) 2.2(2) 3.7(2) 5.5(2)
Intake port (JIS B 2290)
VG80 or
equivalent
VG100 or
equivalent
VG150 or
equivalent
Exhaust port (JIS B 2290) VF80 or equivalent
VG100 or
equivalent
Lubricating oil
Genuine oil ULVOIL R-42 (Mineral oil)
Oil requirement ( ) 0.7 1.5 1.9 1.9
Weight (kg) 51 86 118 150
Utilities
Model PRC-003A PRC-006A PRC-012A PRC-018A
Power requirements three phase, 200VAC, 50/60 Hz, 220VAC 60 Hz
Cooling water
Primary side pressure (MPa) 0.3
Inlet/outlet differential
pressure (MPa)
0.01 or more
Volume ( /min) 2.0 or more 3.0 or more
Water temperature (°C) 5 to 30
CAUTION: If cooling water temperature is low, use the pump in an environment where dew does
not condense.
*1 This value is measured by using a Pirani vacuum gauge.
*2 This value changes depending on the performance of the fore pump. The above data is obtained
when the pump is used in combination with a standard fore pump.
*3 Please use it in the environment of no be dewy when the temperature of cooling water is low.
*4 PRC-018A is only atmospheric pressure operation type.
Pressure/explosion proof and increased safety explosion motors are not available for the PRC-A
series.