YO99-0874-DI-002-18
16
2.7 Automatic Operation
This pump has a certain operating pressure range. When starting it, therefore, it is necessary to
monitor the vacuum gauge.
In automatic operation, it is necessary to install a vacuum switch for pressure detection. When
the pressure on the intake side becomes lower than the maximum intake pressure, the vacuum
switch is actuated to start the mechanical booster pump. In the method
②
in Fig. 9, a
pneumatically controlled roughing valve is used which can be interlocked with a vacuum switch.
The vacuum switch is available in two types: mechanical and electrical. It is installed on the
vacuum chamber or near the intake port of the mechanical booster pump.
CAUTION
When using the vacuum pump other than the standard backing pump as
the backing pump, since the maximum intake pressure becomes
different from the described value, be careful for it.
CAUTION
When the difference is not available in between the pressure in the
vacuum chamber and the pressure of inlet port of the mechanical
booster pump, it is okayed to mount the vacuum switch on the vacuum
chamber.
Summary of Contents for PRC-003A
Page 10: ...YO99 0874 DI 002 18 ix Fig 1 Warning Label PRC 003A PRC 006A PRC 012A PRC 018A...
Page 24: ...YO99 0874 DI 002 18 8 2 4 Dimensional drawing Fig 3 PRC 003A Dimensional drawing...
Page 25: ...YO99 0874 DI 002 18 9 Fig 4 PRC 006A Dimensional drawing...
Page 26: ...YO99 0874 DI 002 18 10 Fig 5 PRC 012A Dimensional drawing...
Page 27: ...YO99 0874 DI 002 18 11 Fig 6 PRC 018A Dimensional drawing...
Page 57: ...YO99 0874 DI 002 18 41 Fig 15 PRC 006A Optional attachment figure...
Page 58: ...YO99 0874 DI 002 18 42 Fig 16 PRC 012A Optional attachment figure...
Page 59: ...YO99 0874 DI 002 18 43 Fig 17 PRC 018A Optional attachment figure...
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