Ulvac PRC-003A, Instruction Manual

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YO99-0874-DI-002-18
49
Trouble
symptom
Check item Criteria Corrective action
Pressure
does not
lower.
1
Is motor rotating
direction normal?
Reverse rotation.
Check power cable and
connecting terminals.
2
Is the ultimate pressure
of fore pump normal?
Pressure is above
the prescribed
value.
Change the fore pump oil.
3
Is there any leak in
system and piping?
In normal operation. Leak test of piping.
4 Is the oil clean?
Oil color is opaque
and whitish (turbid).
Change oil.
5
Casing inside and/or the
Rotor surface is dirty /
wet.
There are attached
substances, or wet.
Overhaul
（
Cleaning, clearance
adjustment
）
Abnormal
sound
1
Is the oil level within the
level lines?
Oil level is below
the level line.
Replenish oil.
2
Any sound (clattering)
synchronized with
rotating speed?
Clattering is heard.
Disassemble and repair
the pump.
(Re-adjust timing.)
3
Is roaring machine noise
always heard?
Roaring noise is
heard.
Disassemble and repair
the pump.
(Replace bearing and
gear.
Abnormal
heating
1 Is cooling water flowing?
Flow rate is below
the prescribed
value.
Check cooling water
piping.
2
Is the operating pressure
normal?
Pressure is above
the maximum
pumping pressure.
Check pressure on intake
and exhaust sides.
Check the fore pump.
3
Is discharge pressure
normal?
Discharge pressure
is above the
specified value.
Check the fore pump.
4 Is rotor rotation resisted?
Rotors do not rotate
by inertia.
Overhaul.