YO99-0874-DI-002-18
5
2. Pump Outline
2.1 Total configuration
The Mechanical booster pump is used combined with the Supplementary pump to enhance the
exhaust speed around the pressure range 1.3×10
3
- 1.3×10
-1
Pa where the Supplementary pump
exhaust speed is likely to lower.
The mechanical booster pump includes two rotors having a cocoon-shaped cross section and a
casing that encloses them. These rotors are designed to rotate in the opposite directions without
contacting each other while maintaining a very small clearance between them by a timing gear. The
rotors and the casing are constructed in such a manner that the rotors can rotate while maintaining a
small clearance between the rotor and the casing.
The pump can be actuated from atmospheric pressure using an optional motor controller. The
pumping speed is normally stepwise when changed over from the fore pump, but this pump
automatically detects the load applied to the pump and runs at the maximum capacity in that condition,
resulting in a smooth throughput characteristic curve. Especially in an application where pumping and
venting are repeated, the pumping speed can be shortened as compared with startup using a pressure
switch or timer.
Table. 2 Details model list
Surface treatment
Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent
scratch and corrosion inside the pump.
Because of moisture adhering inside the pumps with Surface treatment, their ultimate pressure
may not drop to the specified value immediately after the startup.
Fluorinated oil
Extremely chemically stable and inert fluorine oil is used, as a countermeasure against oil det
erioration caused by corrosive, combustible, and oxidizing gases.
Fluorinated oil cannot be replaced with mineral oil (ULVOIL R-42).
At the factory, assembly inspection is performed using fluorinated oil, but we do not ship prod
ucts with fluorinated oil. Please order separately if necessary.
Inverter
The pump can be actuated from atmospheric pressure using an optional motor controller.
In an application where pumping and venting are repeated, the pumping speed can be shorte
ned as compared with startup using a pressure switch or timer.
Summary of Contents for PRC-003A
Page 10: ...YO99 0874 DI 002 18 ix Fig 1 Warning Label PRC 003A PRC 006A PRC 012A PRC 018A...
Page 24: ...YO99 0874 DI 002 18 8 2 4 Dimensional drawing Fig 3 PRC 003A Dimensional drawing...
Page 25: ...YO99 0874 DI 002 18 9 Fig 4 PRC 006A Dimensional drawing...
Page 26: ...YO99 0874 DI 002 18 10 Fig 5 PRC 012A Dimensional drawing...
Page 27: ...YO99 0874 DI 002 18 11 Fig 6 PRC 018A Dimensional drawing...
Page 57: ...YO99 0874 DI 002 18 41 Fig 15 PRC 006A Optional attachment figure...
Page 58: ...YO99 0874 DI 002 18 42 Fig 16 PRC 012A Optional attachment figure...
Page 59: ...YO99 0874 DI 002 18 43 Fig 17 PRC 018A Optional attachment figure...
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