Ulvac PRC-003A, Instruction Manual

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YO99-0874-DI-002-18
vii
The water included little impurities (ex. Industrial Water) is recommended for
cooling water.
Depending on the water quality, the inside wall of cooling water tube is covered
with water scale (CaCO
3
etc.) and cooling water flow rate may be decreased.
Cooling water tube is corroded by Chlorine ion (Cl
-
) and cooling water leak may
be caused. In case of using pure water, cooling water leak may be caused by
metal component dissolution, too.
In these cases, the repair service may be for a fee.
［Reference］Standard Water Quality of Industrial Water
Establishment: Japan Industrial Water Association
Power Supply wiring <Dismantling>
Coolant piping <Dismantling>
Inlet piping <Dismantling>
● Be sure to cut off the electricity before starting install or dismantling
operation.
WARNING
● Should you remove the Coolant joint immediately after having stopped the
Pump, there is a risk that the coolant remained inside the Pump comes to a
boil and jets out. Keep flowing the Coolant as far as the Pump temperature
cools down.
● The Pump is and remains very hot during and while after having stopped
operation. You have a risk of getting burned if a part of the body touched it.
Keep flowing the Coolant as far as the Pump temperature cools down.
● Use a flow meter (HWFM: for example Flow sight) applicable to visually
check the Coolant supply source that no water is flowing.
WARNING
● Take off the piping following the Install Manual of the system.
● The Inlet piping remains very hot wile after having stopped the Pump. Be
sure to take it off after the Pump has sufficiently cooled down.
● Make airtight completely the Pump exhaust outlet with a blank flange.
WARNING
CAUTION