D/N.MA06X10E, 2019MY15
ULVAC CRYOGENICS INCORPORATED
CRYOPUMP
CRYO-U
®
SERIES
Instruction Manual
CRYO - U
®
6H
CRYO - U
®
8H
CRYO - U
®
8HSP
CRYO - U
®
8H
–
U
CRYO - U
®
8HL
CRYO - U
®
10H
CRYO - U
®
10HL
CRYO - U
®
10PU
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or
more fall under row 2(35) of appended table 1 of Japan’s Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan’s
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
Summary of Contents for CRYO-U Series
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Page 36: ...Cryopump Description 1 10 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
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Page 90: ...Troubleshooting A 8 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...
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