Pfeiffer Vacuum A 1204H Operating Instructions Manual Download Page 2

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Table of contents

Table of contents

About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1.1

Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2

Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.1

Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.2

Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.2.3

Instructions/Abbreviations used . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.2.4

Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.2.5

User target group . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.1

Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.2

Safety for flammable/pyrophoric materials . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.3

Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

2.4

Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

2.5

Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

3.1

Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

3.2

Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.1

Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.1.1

Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.1.2

Differences between the pump versions . . . . . . . . . . . . . . . . . . . . 14

4.2

Man/machine interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

4.3

Hand-held remote module (HHR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
4.3.1

Description of the keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

4.3.2

Display description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.1

Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.1.1

Seismic bracket installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.2

Oil filling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.2.1

Oil filling caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.2.2

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.3

Connection to the water circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.3.1

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.4

Connection to the nitrogen circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.4.1

Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

5.4.2

Nitrogen flow rate adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

5.5

Connection to the pumping line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
5.5.1

Connection at pump inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.5.2

Connection at pump exhaust . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.6

Exhaust ventilation of the cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

5.7

Leak test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

5.8

Electrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
5.8.1

Customer electrical installation protection. . . . . . . . . . . . . . . . . . . 27

5.8.2

Connection to the mains power supply . . . . . . . . . . . . . . . . . . . . . 27

5.8.3

Emergency button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

5.9

Operating for the first time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
5.9.1

Switch on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

5.9.2

Check of the rotation’s direction at initial start-up . . . . . . . . . . . . . 28

5.9.3

Default setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

5.9.4

Access code modification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

5.9.5

Reset the clock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

5.9.6

Navigation in the menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.1

Prerequisites to use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.2

Pump start-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Summary of Contents for A 1204H

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the original instructions A4 SERIES Multi stage Roots pump for harsh applications...

Page 2: ...8 5 Installation 19 5 1 Set up 19 5 1 1 Seismic bracket installation 19 5 2 Oil filling 20 5 2 1 Oil filling caution 21 5 2 2 Procedure 21 5 3 Connection to the water circuit 21 5 3 1 Procedure 21 5 4...

Page 3: ...tion valve 41 7 7 1 Management modes 41 7 8 Motor power monitoring 42 7 9 Management and monitoring of the motor rotation frequencies 43 7 10 IDLE mode 43 7 11 Analog input management 44 7 12 Logic in...

Page 4: ...2 HHR display is not lighting up 67 11 3 The pump is running and HHR is showing a fault message 67 11 4 The pump is running but the performance is not correct 72 12 Service 73 13 Accessories 74 14 Tec...

Page 5: ...azard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S2 ISO 3864 and DIN 4844 In this document the following hazard levels and information a...

Page 6: ...uency converter I Start O Stop Power Indicator light pump powered Running Indicator light pump started Warning Indicator light warning presence Alarm Indicator light alarm presence HHR Hand held Remot...

Page 7: ...could cause elec trical shocks in case of contact It advises to disconnect the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pum...

Page 8: ...ds Do no carry out any alterations or modifications to the product on your own initiative Check that the pump is correctly connected to the emergency stop system for the equipment or pumping installat...

Page 9: ...cess gases are toxic flammable corrosive ex plosive and or otherwise reactive It is the user and or the integrator s responsibility to follow the necessary safety requirements Toxic gases can cause se...

Page 10: ...se applications install on the pump the labels to identify the hazards flamma bility explosion toxicity corrosion etc and meet the requirements of SEMI S1 This information must be added in the equipme...

Page 11: ...d to carry people or loads and is not for use as a seat step ladder or any other similar purpose kg WARNING Risk of injury due to falling objects When transporting parts components and during maintena...

Page 12: ...Adjust the leveling pads of the frame and low er the pump on the castors to move it over short distances WARNING Risk of injury associated with heavy loads Given the weight of the product it should b...

Page 13: ...located on the inlet blanking flange Pressurize the pump with dry nitrogen to a relative pressure of 200 hPa When the nitrogen flows out of the exhaust seal it up with the provided accessories Disconn...

Page 14: ...h applica tions A 204X A 804X A 1504X A 1804X A 2404X A 2504X A 3004X These pumps are characterised by their resistance to corrosion their robustness theirhigh inlet flows capability and an optimized...

Page 15: ...t panel Inlet Emergency stop button Power White indicator light pump powered Running Green indicator light pump started Warning Yellow indicator light alert Fault Red indicator light alarm HHR Hand he...

Page 16: ...connector R1 Pressure regulator J1 REMOTE control connector J5 Roots 2 connector J2 RS 232 SERIAL LINK connector J6 RS 232 485 SERIAL LINK connector J3 USER connector J7 RS 485 SERIAL LINK connector...

Page 17: ...ts est en marche Acc der au mode param trage Sortir des diff rents menus sans valider les fonctions Permet de d marrer arr ter la purge en mode local quand DEFINITION CMD PURGE est VALIDE see 8 2 Le f...

Page 18: ...ng on Running 1 Running time machine 4 Date and hour 2 Control mode 5 Operating parameters 3 Pump status fault messages 6 Active option s on the pump Roots control active R Purge control active P Stan...

Page 19: ...5 1 1 Seismic bracket installation To install the pump in a seismic environment it is necessary to anchor it to the floor with seismic brackets see 13 When the pump is at the right location see 5 1 I...

Page 20: ...Motor side A 124H 0 25 0 25 A 204H A 204X 0 28 0 28 A 604H 0 25 0 45 0 18 0 88 A 804H A 804X 0 28 0 45 0 18 0 91 A 1204H 0 25 1 00 0 55 1 80 A 1504H A 1504X 0 28 1 00 0 55 1 83 A 1804H A 1804X 0 28 1...

Page 21: ...5 3 Connection to the water circuit In order to limit corrosion and motor cooling circuit clogging it is recommended to use water with the required characteristics see 14 2 2 If the solid particle siz...

Page 22: ...oling cir cuit to be locked WATER IN WATER OUT DANGER Risk of explosion If pyrophoric materials above the LEL lower explosive limit are sent to the pump the nitrogen supply must make it possible to di...

Page 23: ...ble for the equipment and must apply the specific safety guidelines in accordance with local legislation WARNING Pressurised circuit To work safely on the product the operator must Install a manual va...

Page 24: ...at pump inlet To improve pumping speed the pumping line must be as short as possible and its inter nal diameter must not be less than the pump inlet flange To control the isolation valve see 8 5 5 5 2...

Page 25: ...e of 0 33 hPa see 7 13 1 Pipe end diameter 50 mm 2 Differential pressure sensor It is necessary to connect the exhaust box to the customer s installation to warranty a complete inside ventilation of t...

Page 26: ...trained in the relevant health and safety aspects EMC electrical hazards chemical pollution etc may carry out maintenance work Isolate and lock out power line to the product by positioning the main sw...

Page 27: ...plug delivered with the product Connect the mains cable to the power supply connector according following diagram using wires with characteristics defined in see 14 2 4 Connect the plug on and lock it...

Page 28: ...trol via the CONT key HHR flashes on the display 5 9 2 Check of the rotation s direction at initial start up Start up the pump by pressing STARTand valid with ENTER the pump starts PUMPING is displaye...

Page 29: ...mized see 8 2 5 9 5 Reset the clock To ensure correct fault monitoring and customized parameters it is necessary to initialize time and date of the product see 5 9 6 5 9 6 Navigation in the menus Fast...

Page 30: ...ith the ENTER key Some parameters can only be modified when the pump is stopped Adjust the value with the or keys Validate with the ENTER key Return to the main menu by pressing the SET key DATE AND T...

Page 31: ...icator lights on the HHR displays the status of the pump see 4 3 2 Take the pump control via the CONT key HHR flashes on the display WARNING Risk associated with process gases The user and or integrat...

Page 32: ...the pump and valide with ENTER 6 2 5 Option Roots command To start or stop the Roots while the FB is running set the CMD ROOTS on ENABLED when the pump is stopped The Roots will start or stop by pres...

Page 33: ...gency stop Push emergency stop button in front panel of the pump The emergency stop can be activated by the equipment via the emergency connector see 8 7 6 3 4 Prolonged stop If the pump has to be sto...

Page 34: ...ing When a problem occurs the user is informed through the relevant fault indicator light yellow lit in case of warning red lit in case of alarm the audible buzzer warning if preselected the fault con...

Page 35: ...perated automatically The stand by 4 and purge 3 valves open close when the pump is started stopped When the pump stops purging is extended by a time T see 7 1 3 ENABLED The stand by 4 and purge 3 val...

Page 36: ...ump stops normal stop or stop due to defect if the system is set to maintain the purge gas But it is not purged if the pumps stops in case of an alarm of exhaust pressure D01 or emergency stop D34 Pro...

Page 37: ...50 hPa not adjustable value a warning is triggered pres sure sensor non operational after the expiry of a 10 s time delay not adjustable value warning threshold 550 hPa low threshold 7 2 1 Silencer ex...

Page 38: ...124H A 204H A 204X water circuit Fig 11 Water circuit for other models 7 LP water valve Temperature of the HP LP stages regulation 8 HP water valve 9 Water Flowmeter Water flow measurement 10 Manual...

Page 39: ...lock temperature The measure of the FB temperature is available by setting the menu SETTING TEM PERATURE LP FB T HP FB T on MEASUREMENT 2 monitoring thresholds warning and alarm and associated delay c...

Page 40: ...wer than the setpoint the heating is switched on If the temperature exceeds the setpoint the heating is switched off 7 6 2 Indicating a temperature defect The setpoint temperature is set from HHR or b...

Page 41: ...the pump stops after a delay of 3 seconds MANU INLET The isolation valve is controlled by the selected control mode set in menu DEFINITION CONTROL MODE from HHR with AUX button see 4 3 from J1 remote...

Page 42: ...l connector see 8 3 in this case the contact J1 S1 is opened J1 S7 is closed Open the contact J1 S6 to open the valve and close it to close the valve from serial link see Serial link Operating instruc...

Page 43: ...e product is fitted with the frequency converter and or the nitrogen consumption by closing the stand by valve 4 see 7 1 independently of the purge valve when the equipment is not on a process When th...

Page 44: ...IC INPUT ANA1 USER ANA DISABLED is set there is no threshold to configure and the fault is not managed 7 12 Logic input management Three logic inputs are available on the LI1 LI2 and LI3 plugs see 15...

Page 45: ...in stall under the pump a retention tank with a volume at least 10 higher than the volume of oil in the pump with dimensions of which makes it possible to collect a possible water leak at the WA TER I...

Page 46: ...the commands transmitted via the serial link see Se rial link Operating instructions USER The pump is remote controlled through the opening or closing of different dry contacts wired on remote contro...

Page 47: ...rted stopped using ROOTS command PURGE CMD 1 DISABLED ENABLED Activate the purge control separate from the FB start up instead of simultaneous start up the purge is started stopped using PURGE command...

Page 48: ...0 600 s PRE WARNING DISABLED ENABLED Threshold 500 3000W Delay 0 600 s R2 POWER 2 ALARM DISABLED ENABLED Threshold 3000 20000 W Delay 0 600 s WARNING DISABLED ENABLED Threshold 500 4000W Delay 0 600...

Page 49: ...10 C Delay 0 600 s PRE ALARM DISABLED ENABLED Threshold 55 110 C Delay 0 600 s WARNING DISABLED ENABLED Threshold 55 110 C Delay 0 600 s VALVE STATUS OPEN VALVE CLOSE VALVE TEMPERATURE ROOTS 2 T 2 DIS...

Page 50: ...eshold 160 265 V Delay 0 600 s SOFT PUMPING VALVE 4 Delay 0 600 s LOGIC INPUT LOG1 DISABLED ENABLED Sensor type NO NC DEFAULTS ALARM DISABLED ENABLED Delay 0 600 s WARNING DISABLED ENABLED Delay 0 600...

Page 51: ...e WATER DRAINING DISABLED Allows to drain the water cooling circuit access with password ENABLED MANAGEMENT 1 Selection Choice Setting range PASSWORD 0 65535 VERSIONS AND S N HHR SOFT REV HHR S N ELEC...

Page 52: ...y external contacts of the customer equipment wiring is customer s respon sibility Fig 14 J1 connector control with dry contacts NOTICE Extra low voltage circuit The remote control circuits are equipp...

Page 53: ...ting instructions Contact open N2 stand by purge stops This function is valid when REMOTE mode is validated with S1 contact open DEFINITION IDLE MODE is DISABLED DEFINITION PURGE CMD is ENABLED S6 28...

Page 54: ...ect these outputs in accordance with the rules and protection of safety extra low voltage SELV circuits Supply these contacts with voltage of less than 30 V and current of less than 1 A Contact Functi...

Page 55: ...r the intermediate frequency the voltage applied is between 3 and 7 V for the minimum frequency the voltage applied is between 7 and 10 V A2 15 13 IN_ANA_USER Setpoint between 0 and 10 V Used to monit...

Page 56: ...f travel not reached warning triggered S6 6 14 IN_SOFT_VALVE_OPEN Contact open in end of travel not reached warning triggered S7 7 15 IN_SOFT_VALVE_CLOSE Contact open in end of travel not reached warn...

Page 57: ...or it setting warning and alarm thresholds and a triggering timer see parameter setting SETTINGS TEMPERATURE ROOT 2 T see 8 2 A2 12 13 Roots 2 power Setpoint between 0 and 10 V Used to monitor Roots 2...

Page 58: ...nked 8 7 3 Wiring of the digital outputs The output contact connected by the customer allows to control the equipment emergen cy stop from the pump emergency stop button NOTICE Extra low voltage circu...

Page 59: ...d with toxic corrosive reactive or radioactive materials depending on the process Wear appropriate safety equipment when pump is disconnected for maintenance or reinstalled and also for oil filling an...

Page 60: ...fore maintenance has expired the screen display alternates between operating parameters and the corresponding warning message The indicator light Warning is lit on front panel see 4 2 This information...

Page 61: ...cover 1 Remove the protective cover 2 and the O ring 3 by removing the three M4 x 10 CHc screws Using a 21 mm female elbow wrench move the driving shaft in both directions of ro tation until free rot...

Page 62: ...the main plug see 5 8 2 Disconnect all electrical connectors Do not forget to connect the cover plug on con nector delivered with the pump Disconnect the nitrogen purge connection Disconnect the WATER...

Page 63: ...ransport flange except for A 124H A 204H A 204X A 2404H A 2404X models see 15 1 Remove the top cover Attach the yellow transport flange using the screws 1 screw or 2 on the pump flange and 2 on the fr...

Page 64: ...estriction of Hazardous substances the manufacturer provides a paid recycling service for the end of life of the equipment Any obligation of the manufacturer to take back such equipment shall apply on...

Page 65: ...on brass aluminum nickel copper fluoroelastomers perfluorinated synthetic oil Take particular precautions for fluoroelastomers which may breakdown if they are subjected to high temperatures components...

Page 66: ...not powered Lit The pump is powered Green Running Off The pump is not running Pump shut down Lit The pump is running Yellow Warning Off No warning Blinking Pre warning Read the fault message on HHR R...

Page 67: ...Exhaust pressure 1990 hPa or The pump does not start and the exhaust pressure 1500 hPa Check the nitrogen flow rate setting value see 5 4 2 Check the exhaust pipe is not clogged Pressure sensor faulty...

Page 68: ...Check the valve connection on the J4 connector see 8 5 3 Malfunction Check the proper operation opening closing of the valve Other problem Contact your service center PW13 W13 PD13 D13 PURGE FLOW No p...

Page 69: ...the 24 V PCboard D34 EMO Pump emergency stop is engaged Rotate to unlock the emergency stop on the front panel display Emergency cover plug is missing Check that the cover plug is fitted on the emerge...

Page 70: ...t monitoring configuration Check that the SETTING TEMPERATURE Roots 1 T CON TROL or MEASUREMENT menu has set thresholds Incorrect threshold setting Check the warning or fault thresholds Cooling proble...

Page 71: ...configuration Check that DEFINITION FREQUENCY IN VERTER FB INVERTER is set on V1000 or DISABLED Probable mechanical problem on FB Check the rotation of the FB shafts and if there is no mechanical con...

Page 72: ...Check the cable or sensor on Li4 see 15 4 W102 D102 R1 OIL T W102 T Roots 1 setpoint T 5 C Cooling problem Check the water cooling supply on the pump Check that the cooling pipes are not clogged Senso...

Page 73: ...metallic airtight blank flanges for contaminated devices If possible send the pump or unit in its original packaging Sending contaminated pumps or devices No devices will be accepted if they are cont...

Page 74: ...107222 3 8 NPT female connector Water input 115509 1 4 NPT female connector Water input 076721 3 8 NPT male connector Water output 115510 1 4 NPT male connector Water output 076720 1 8 NPT female conn...

Page 75: ...7 10 1 2 10 1 2 10 2 9 10 3 2 10 2 9 10 3 2 10 2 9 10 3 9 10 3 Maximum pumped volume 3 m3 1 1 1 1 1 Maximum continuous inlet flow 5 slm 150 100 100 70 30 Supply voltage 1 V 200 230 V 380 480 V 3 phase...

Page 76: ...z hPa 4 10 3 4 10 3 Maximum ultimate pressure with N2 purge 50 slm 7 60 Hz hPa 9 10 3 9 10 3 Maximum pumped volume 3 m3 2 2 Maximum continuous inlet flow 5 50Hz 60Hz 5 EHT version DSB 3000 hot ELT ver...

Page 77: ...upply voltage 1 V 200 230 V 380 480 V 3 phases 50 60 Hz Power consumption at ultimate pressure 50 60 Hz non exhaust heater kW 1 3 1 5 1 8 2 0 2 1 2 3 Power consumption at max inlet flow kW Full load c...

Page 78: ...Transient overvoltage up to the levels of overvoltage cat egory II Temporay overvoltage occuring on the mains sup ply category II 50 40 20 100 0 5 6 7 8 9 10 pH Chloride ppm pH 5 5 to 9 Chlorine 3 10...

Page 79: ...V 50 60 Hz 10 A 1 5 mm2 AWG 14 A 204H A 204X 200 230V 50 60 Hz 25 A 6 mm2 AWG 10 380 480V 50 60 Hz 15 A 2 5 mm2 AWG 14 A 604H 200 230V 50 60 Hz 25 A 6 mm2 AWG 10 380 480V 50 60 Hz 15 A 2 5 mm2 AWG 14...

Page 80: ...6 668 695 578 108 539 723 189 658 596 171 169 167 173 260 A 274 B 284 C 294 D 90 133 317 388 108 775 788 50 65 536 668 695 140 845 907 638 274 171 388 317 167 274 B 284 C 294 D 169 90 133 173 260 A 87...

Page 81: ...1504H A 1504X A 1804H A 1804X Dimensions mm Fig 26 A 2404H A 2404X Dimensions mm 536 668 695 140 65 50 983 1045 542 369 133 926 388 274 B 284 C 294 D 911 194 90 133 192 198 260 A 217 317 991 E 542 37...

Page 82: ...and dimensions Fig 27 A 2504H A 2504X A 3004H A 3004X Dimensions 430 B 370 542 216 695 1036 536 668 50 65 140 260 A 951 inlet 133 1151 1093 544 236 239 43 192 430 B 431 440 D 450 C 194 F 198 204 247 2...

Page 83: ...F4 A 124H 206 395 324 A 124H 40 7 87 7 35 3 76 3 A 204H A 204X 202 435 325 A 204H A 204X 56 0 80 0 51 1 72 9 A 604H 206 380 440 A 604H 54 1 138 5 47 0 120 4 A 804H A 804X 203 406 434 A 804H A 804X 68...

Page 84: ...in the semi conductor industry The material in contact with the process gases are the followings iron stainless steel fluoroelastomer nickel and perfluorinated synthetic oil The safety data sheet of...

Page 85: ...8 Location of electrical components pump without frequency converter AL 24V power supply A 204H A 204X only A1 A2 Current sensor CA Auxiliary contact RT1 FB circuit breaker KM1 FB command RT2 Roots ci...

Page 86: ...T2 Roots circuit breaker RT3 Heating circuit breaker option VAR1 RT3 F1 RT2 RT1 CA KM1 A1 RT3 RT2 RT1 VAR1 VAR2 F1 F2 Pump Voltage RT1 RT2 RT3 A 124H LV 200 230 V 50 60 Hz 14 A 4 A HV 380 480 V 50 60...

Page 87: ...3004X LV 200 230 V 50 60 Hz 16 A 16 A 4 A HV 380 480 V 50 60 Hz 13 A 13 A 2 5 A Pump Voltage RT1 RT2 RT3 N2 VALVES RSV1 VALVES FB VALVES LI1 LI2 LI3 LI4 WH RSV1 MOTOR FB MOTOR H2O FLOW HEAT3 TEMP HEA...

Page 88: ...ETL Mark...

Page 89: ...Certificate of conformance to SEMI...

Page 90: ...Certificate of conformance to SEMI...

Page 91: ...oint stock company 98 avenue de Brogny B P 2069 74009 Annecy cedex A 124H A 204H A 604H A 804H A 1204H A 1504H A 1804H A 2404H A 2504 H A3004 H A 204X A 804X A 1504X A 1804X A 2404X A2504 X A 3004 X H...

Page 92: ...ier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We support you with your pla...

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