14
Product description
4
Product description
4.1
Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
4.1.1
Scope of delivery
● 1 vacuum pump
● 3 hoisting rings
● 4 hoisting rings (A 2404/A 3004 models)
● 1 funnel
● 1 EMO plug
● 2 water couplings
● 1 nitrogen coupling
● 1 electrical plug
● 1 hand-held remote module (HHR) + cable
● 1 operating instructions
● Oil can(s)
4.1.2
Differences between the pump versions
The pump manufacturer has developed a range of dry pumps
Series 4
adapted to the-
harshest processes used in the semiconductor industry. They are including a roughing-
pump and, depending on model, a Roots blower.
Several compact pumping systems are available in
H
version (harsh applications):
A 124H, A 204H, A 604H, A 804H, A 1204H, A 1504H, A 1804H, A 2404H, A 2504H,
A 3004H.
Other compact pumping systems are available in
X
version (extremely harsh applica-
tions):
A 204X, A 804X, A 1504X, A 1804X, A 2404X, A 2504X, A 3004X.
These pumps are characterised by their resistance to corrosion, their robustness,
theirhigh inlet flows capability and an optimized thermal management.
Please contact Pfeiffer Vacuum to obtain more detailed information according to the ap-
plications.
STD version
ST
an
D
ard version for most of the applications.
EHT version
E
xtended
H
igh
T
emperature version.
This version is recommended for all applications requiring the pump and gas tempera-
ture to be as high as possible to avoid any by-product condensation inside the pump.
ELT version
E
xtended
L
ow
T
emperature version.
This version is recommended for all applications requiring the pump and gas tempera-
ture to be as low as possible to avoid any by-product deposition inside the pump.
Options
In order to adapt the products to the specifics of the applications, the manufacturer pro-
poses different options configured to the order. The operation and use of these options
are described as necessary in the chapters of this manual. These options concern:
● SEPM option (Silencer exhaust pressure management)
● SEMI option
Summary of Contents for A 1204H
Page 88: ...ETL Mark...
Page 89: ...Certificate of conformance to SEMI...
