Safety
9
The potential risks with a dry pumping system involve electricity, the chemical processes,
hot surfaces, the pressurized nitrogen and water devices and the lubricant.
● Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pol-
lution) may carry out the installation and maintenance described in this manual. Our
service centers can provide the necessary training.
● Do not remove the blanking plates sealing the inlet and exhaust ports if the product is
not connected to the pumping line.
● Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
● Do not expose any part of the human body to the vacuum.
● Comply with all safety and risk prevention instructions in accordance with local safety
standards.
● Regularly check compliance with all precautionary measures.
● Do not turn on the product if the covers are not in place.
● Keep the handles, the rubber caps on the covers as they protect the product against
the intrusion of solids and liquids.
2.2
Safety for flammable/pyrophoric materials
Pumping of pyrophoric or flammable gases could create hazardous situations. The user
and/or the integrator must respect safety instructions below and conduct risk assess-
ments to address all risks in a safety procedure.
WARNING
Risk associated with process gases
The user and/or integrator of the product is/are fully responsible for the operational safe-
ty conditions of the equipment. The manufacturer has no control over the types of gases
this pump is exposed to. Frequently process gases are toxic, flammable, corrosive, ex-
plosive and/or otherwise reactive. It is the user and/or the integrator's responsibility to
follow the necessary safety requirements. Toxic gases can cause serious injury or
death. Operators and users must:
Take the appropriate safety recommendations to prevent injury. Consult the respon-
sible department for instructions and safety information.
Hazardous gases from the pump can cause serious injury or death. Regula-
tions require to connect the pump’s exhaust to a facility hazardous gas ex-
haust system
which incorporates appropriate filters, scrubbers, etc. This system
must meet all air and water regulations.
Check that the pump is correctly connected to the equipment (see
Installation
).
Contact the service center for further information.
DANGER
Pyrophoric/flammable gas related risks
Semiconductor, photovoltaic panels, flat panel display or industrial processes may use
pyrophoric or flammable gases. When mixed with oxidant species, these gases could
react spontaneously (pyrophoric) or after ignition (flammable) in an uncontrolled chem-
ical reaction. In the worst case, it could generate fire or explosion leading to metallic part
projection and/or seriously injuring people working nearby. Ignition source could be in-
side pump : compression, heat, particle friction, flame due to pyro oxidant mix-
ture. Responsibility for safe operation of the pump(s), the process tool, and the abate-
ment device, always belongs to the user and/or the integrator. The user and/or the
integrator is/are responsible for the application for which the Pfeiffer Vacuum product
will be used.
Always conduct a full risk assessment when planning the installation of the pump(s).
Install safety devices in accordance with EN 50495.
Summary of Contents for A 1204H
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