Pfeiffer Vacuum A 1204H, Operating Instructions Manual

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7.13 SEMI pump configuration (Option)
The SEMI option pump (factory configuration) is equipped with a cover that allows com-
pliance with the requirements of SEMI S2-0712 and SEMI S6-070:
– a cover equipped with a sensor for ventilation and an exhaust box for connection to
the customer’s installation (see 5.6) ,
– dry contact safety sensors which immediately stop the pump on alarm when they
detect one of the following faults:
– failure of the exhaust pressure,
– lack of nitrogen pressure,
– pressure inside the pump cover.
Installed in the factory, these sensors require no adjustment. They are positioned as fol-
lows:
To meet the requirements of the Semi Standards, it is the customer's responsibility to in-
stall under the pump a retention tank:
– with a volume at least 10% higher than the volume of oil in the pump.,
– with dimensions of which makes it possible to collect a possible water leak at the WA-
TER IN and WATER OUT connectors.
The retention tank must be equipped with a fluid presence sensor that alerts the equip-
ment and stops the pump and the water circuit in case of leakage..
Sensor Function Threshold Pump status
1 Exhaust pressure Detect an overpressure at the pump
exhaust P ≥ 2000 hPa When the pressure is upper than the thresh-
old, the alarm stops the pump.
2 Nitrogen pressure Detect a defect of purge P < 1200 hPa When the pressure is lower than the thresh-
old, the alarm stops the pump.
3 Exhaust ventilation pres-
sure
Detect a defect of exhaust ventila-
tion ∆P < 0.33 hPa When the pressure difference between in-
side and outside cover is lower than the
threshold, the alarm stops the pump.
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