Maintenance
59
9
Maintenance
9.1
Safety and maintenance information
Duty to inform
Every person who is involved in maintenance and servicing work on the pump must read
and follow the safety-relevant parts of all associated documents.
NOTICE
Exclusion of liability
Pfeiffer Vacuum accepts no responsibility concerning equipment damage, disrupted
service or physical injury resulting from maintenance carried out by technicians who
have not been trained in safety rules (EMC, electrical hazards, chemical pollution). Lia-
bility and warranty claims shall be inadmissible in this case.
DANGER
Risk due to pumping conditions
Remaining process gases in the pump may cause severe injury or death. Before remov-
ing the pump from the installation:
Continue nitrogen flow from the process tool for 30 min. Nitrogen pressure and flow
rate should be identical to the programmed values during process.
DANGER
Risk to the health in the event of contact with toxic substances
The vacuum pump, pumping line components, and operating media may be contami-
nated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance, or
reinstalled, and also for oil filling and draining.
Ventilate the premises well.
Do not eliminate maintenance waste via standard disposal channels. Have it de-
stroyed by a qualified company if necessary.
Install the inlet and exhaust blanking plates, accessories delivered with the pump or
available as accessories (see chapter
Accessories
).
WARNING
Electric shock hazard in case of contact
Voltage and current can cause electric shock.
Isolate and lock out power line to the product by positioning the main switch on
O
.
Only skilled, authorized people may carry out maintenance work. Take care! Items
located between the mains connection and the isolator are still under mains voltage.
Disconnect the mains cable from all power sources.
WARNING
Tightness after maintenance
Insufficient tightness after servicing could result in chemical hazards.
Always perform a leak test after maintenance.
WARNING
Risk of injury due to hot surfaces
The exhaust temperature remains high even after the pump has stopped.
Wait for the product to cool completely before carrying out any operations on it.
Summary of Contents for A 1204H
Page 88: ...ETL Mark...
Page 89: ...Certificate of conformance to SEMI...
