10
Safety
The risk assessment must take into account the pumped gases, by-products and all
components from the installation.
The following situations are hazardous and must be avoided:
● Flammable or pyrophoric gas concentration in the flammable range.
● Flammable or pyrophoric gas concentration over the flammable range (concentration
could decrease somewhere in case of leak until crossing flammable range).
● Lack of dilution.
● Accumulation of reactive solids in exhaust.
● Exposure of chemically reduced species or reducing agents to oxidants.
General safety recommendations are as follows:
● Ensure leak-tightness throughout system, not only dry pump.
● Do not allow oxidant (air, otherH) to mix with flammable/pyrophoric gases.
● Use dilution with inert gas to reduce pyrophoric/flammable gas to 0.25x lower explo-
sive limit (LEL)
1)
.
● If dilution cannot guarantee safe conditions to reach 25% of the LIE, you must guar-
antee oxidant concentration is not over 0.6x maximum oxidant concentration (MOC)
2)
.
● Perform nitrogen gas purge prior to any maintenance on vacuum or exhaust lines.
● Clean exhaust lines from reactive by-products such as Silicon dust to prevent from
clogging and possible explosion.
● Interlock ‘gas purge fault ‘and ‘pump fault’ signals with tool in order to stop process
gases in case of insufficient dilution.
For all these applications, install on the pump, the labels to identify the hazards (flamma-
bility, explosion, toxicity, corrosion, .... etc.) and meet the requirements of SEMI S1. This
information must be added in the equipment manual dedicated to the end user.
For more details regarding safety instructions related to flammable and pyrophoric gas-
es, contact Pfeiffer Vacuum Service.
2.3
Protective equipment
In some situations, personal protective equipment must be worn when handling the vac-
uum pump and its components. The owner must provide operators with the necessary
equipment. This equipment must be checked regularly and used in accordance with the
supplier's recommendations.
1)
Refer to NFPA 69-2002, chap 6.3.1 Combustible concentration limit.
2)
Idem 1)
DANGER
Health risk due to contact with toxic materials
The vacuum pump, pumping line components, and operating media may be contami-
nated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance,
while it is being re-installed, and during filling and draining of operating media.
WARNING
Risk of injury due to hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. However, spe-
cific operating conditions may exist that require extra caution from users due to the high
temperatures (external surfaces > 70°C on the exhaust pipe).
Let the part cool before working on the product.
If necessary wear protective gloves according to directive EN 420.
Summary of Contents for A 1204H
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