Keithley 6514 User Manual Download

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Model 6514

System Electrometer

Instruction Manual

A G R E A T E R

M E A S U R E O F C O N F I D E N C E

Summary of Contents for 6514

Page 1: ...Model 6514 System Electrometer Instruction Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E...

Page 2: ...SIVE REMEDIES NEITHER KEITHLEY INSTRUMENTS INC NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AN...

Page 4: ...ated all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual Each new Revision includes a revised copy of this print history page Revision...

Page 5: ...onnected to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections require protection for high transient over voltages often associated with local AC...

Page 6: ...these voltages The symbol indicates a connection terminal to the equipment frame The WARNING heading in a manual explains dangers that might result in personal injury or death Always read the associat...

Page 7: ...1 12 Status and error messages 1 12 Default settings 1 12 SCPI programming 1 15 2 Measurement Concepts Measurement overview 2 2 Performance considerations 2 2 Warm up period 2 2 Autozero 2 2 Connectio...

Page 8: ...iew 4 2 Amps measurement procedure 4 2 Damping 4 4 High impedance measurement techniques 4 5 SCPI programming 4 8 Programming example 4 9 Amps measurement considerations 4 9 Input bias current 4 9 Vol...

Page 9: ...2 SCPI programming relative 7 3 mX b and percent 7 4 mX b 7 4 Percent 7 5 SCPI programming mX b and percent 7 6 8 Buffer Buffer operations 8 2 Store 8 2 Recall 8 2 Buffer statistics 8 3 SCPI programmi...

Page 10: ...External feedback 11 11 Electrometer input circuitry 11 11 Shielded fixture construction 11 12 Non standard coulombs ranges 11 13 External feedback procedure 11 13 Logarithmic currents 11 15 Non deca...

Page 11: ...enable registers 13 17 Queues 13 18 Output queue 13 18 Error queue 13 19 14 Common Commands 15 SCPI Signal Oriented Measurement Commands 16 DISPlay FORMat and SYSTem DISPlay subsystem 16 2 FORMat sub...

Page 12: ...rature and relative humidity 19 2 Warm up period 19 2 Line power 19 2 Calibration considerations 19 3 Calibration cycle 19 3 Recommended calibration equipment 19 3 Calibration errors 19 5 Calibration...

Page 13: ...C 3 Piezoelectric and stored charge effects C 3 Electrochemical effects C 4 Humidity C 4 Light C 4 Electrostatic interference C 4 Magnetic fields C 5 Electromagnetic Interference EMI C 5 D DDC Emulat...

Page 14: ...9 Unaddress commands F 9 Common commands F 10 SCPI commands F 10 Command codes F 10 Typical command sequences F 11 IEEE command groups F 12 Interface function codes F 13 G IEEE 488 and SCPI Conformanc...

Page 15: ...ents Figure 3 1 High impedance voltage measurements 3 3 Figure 3 2 Connections for unguarded volts and ohms 3 5 Figure 3 3 Connections for guarded volts and ohms 3 6 Figure 3 4 Meter loading 3 9 Figur...

Page 16: ...for triggering example 9 14 10 Limit Tests Figure 10 1 Limit tests 10 2 Figure 10 2 Limit tests example 10 2 Figure 10 3 Operation model for limit test 10 3 Figure 10 4 Binning system 10 4 Figure 10 5...

Page 17: ...3 Key press codes 16 10 18 Performance Verification Figure 18 1 Connections for volts verification 18 10 Figure 18 2 Connections for 20 A 20mA range verification 18 12 Figure 18 3 Connections for 20pA...

Page 18: ...ground loops C 2 Figure C 2 Eliminating ground loops C 3 F IEEE 488 Bus Overview Figure F 1 IEEE 488 bus configuration F 4 Figure F 2 IEEE 488 handshake sequence F 6 Figure F 3 Command codes F 8 H Ca...

Page 19: ...19 3 Volts and Ohms Measurements Table 3 1 SCPI commands volts and ohms function 3 7 4 Amps Measurements Table 4 1 SCPI commands amps function 4 8 Table 4 2 Minimum recommended source resistance value...

Page 20: ...ure Table 13 1 Common and SCPI commands reset registers and clear queues 13 4 Table 13 2 SCPI command data formats for reading status registers 13 6 Table 13 3 Common commands status byte and service...

Page 21: ...ge current measurement accuracy reading limits 18 14 Table 18 5 2k 20M range resistance measurement accuracy limits 18 16 Table 18 6 200M 200G resistance measurement accuracy limits 18 17 Table 18 7 C...

Page 22: ...bus sequence F 11 Table F 4 Typical addressed command sequence F 11 Table F 5 IEEE command groups F 12 Table F 6 Model 6514 interface function codes F 13 G IEEE 488 and SCPI Conformance Information T...

Page 23: ...panel familiarization Summarizes the controls and connectors of the instrument Power up Covers line power connection line voltage setting fuse replacement power line frequency and the power up sequenc...

Page 24: ...d personal contact with these voltages The WARNING heading used in this manual explains dangers that might result in personal injury or death Always read the associated information very carefully befo...

Page 25: ...x cables terminated at both ends with 3 slot male triax connectors The 3 model is 3 ft 0 9m in length the 10 model is 10 ft 3m in length and the 20 model is 20 ft 6m in length CS 751 barrel adapter Th...

Page 26: ...14 System Electrometer include Setup storage Five instrument setups three user GPIB defaults and factory defaults can be saved and recalled mX b and percent These calculations provide mathematical man...

Page 27: ...t position turns it off O 2 Function and operation keys Top Row Unshifted V Selects voltage measurement function I Selects current measurement function Selects resistance measurement function Q Select...

Page 28: ...ottom Row Unshifted STORE Sets the number of readings to store and enables the buffer RCLL Displays stored readings including maximum minimum peak to peak average and standard deviation The and range...

Page 29: ...isten over GPIB MATH mX b or Percent calculation enabled MED Medium 1 PLC reading rate selected REL Relative enabled for present measurement function REM Instrument in GPIB remote mode SHIFT Accessing...

Page 30: ...olts function the output is non inverting 4 COMMON Use as input low or the common for the 2V Analog Output and Preamp Out 5 CHASSIS This terminal is connected to the chassis of Model 6514 and to power...

Page 31: ...or sending and receiving trigger pulses among connected instru ments Use a trigger link cable or adapter such as Models 8501 1 8501 2 8502 and 8503 9 RS 232 Female DB 9 connector for RS 232 operation...

Page 32: ...ceptacle on the rear panel Connect the other end of the power cord to a grounded AC outlet WARNING The power cord supplied with Model 6514 contains a separate ground wire for use with grounded outlets...

Page 33: ...strument is under warranty return it to Keithley Instruments Inc for repair 2 If the instrument passes the self tests the firmware revision levels are displayed For example 6514 REV A01 3 The detected...

Page 34: ...SR2 As shipped from the factory Model 6514 pow ers up to the factory default settings Factory default settings provide a general purpose setup for front panel operation while the GPIB default settings...

Page 35: ...setup to return to on power up The SYSTem POSetup command is documented in Section 16 SYSTem Subsystem Table 1 2 Default settings Setting Factory GPIB Arm Layer CONF ARM Arm In Source Event IMM IMM Ar...

Page 36: ...0 0 0 Units MXB MXB Percent Disabled Disabled Reference 1 0 1 0 Range 20V Auto Rate Slow Slow NPLC 6 0 60Hz or 5 0 50Hz 6 0 60Hz or 5 0 50Hz Rel Off Off Rel Value VAL 0 0 0 0 RS 232 No effect Off at f...

Page 37: ...onal command words and query commands are summarized as follows Optional command words In order to be in conformance with the IEEE 488 2 standard Model 6514 accepts optional command words Any command...

Page 38: ...ffect overall performance warm up and autozero Connection fundamentals Covers fundamental information about connecting test circuits to the electrometer Zero check and zero correct Provides operation...

Page 39: ...nding to offsets zero and amplifier gains These measurements are used in the algorithm to calculate the reading of the input signal This process is known as autozeroing When autozero is disabled the o...

Page 40: ...ndamental information on input connections to Model 6514 Typical connection drawings are included with the various measurement procedures pro vided in subsequent sections of this manual Input connecto...

Page 41: ...t low is accessed via the COMMON terminal through an internal 0 1 fuse This configuration is used for guarded Volts and guarded Ohms measurements only The GRD key toggles guard on and off NOTE The sta...

Page 42: ...Model 237 ALG 2 This 2 meter low noise triax cable mates directly to the input con nector of Model 6514 The other end is terminated with three alligator clips The clip with the red boot is input high...

Page 43: ...ance or charge to be measured Circuit high is connected to the center conductor of the input connector and circuit low is connected to the inner shell of the connector For unguarded volts and ohms mea...

Page 44: ...ted to chassis ground by installing the ground link between the COMMON and CHASSIS binding posts A safety shield is required whenever a hazardous voltage 30V is present on the noise shield or when the...

Page 45: ...e 2 5 for guarded voltage measurements above 30Vrms 42V peak The metal safety shield must be connected to safety earth ground using 18 AWG or larger wire WARNING With an open input up to 250V peak may...

Page 46: ...on to safety earth ground WARNING To provide protection from shock hazards the test fixture chassis must be properly connected to safety earth ground A grounding wire 18 AWG or larger must be attached...

Page 47: ...ux and other contaminants on connector and terminal insulators can significantly decrease the leakage resistance resulting in excessive leakage currents Contami nants on DUT and test circuit component...

Page 48: ...ovide considerable extra protection The resistor must be large enough to limit the current through the diodes to 10mA or less and be large enough to withstand the supply voltage The protection circuit...

Page 49: ...ield WARNING The maximum voltage common mode between electrometer LO and chas sis ground is 500V Exceeding this value may create a shock hazard WARNING When floating input LO above 30V from earth chas...

Page 50: ...s selected NOTE Zero check will always enable whenever the ohms function is selected Zero check is enabled by pressing the ZCHK key Pressing ZCHK a second time disables zero check NOTE To ensure prope...

Page 51: ...If zero correct is enabled ZZ or CZ message displayed press ZCOR to disable it 1 Select the volts V or amps I function 2 Enable zero check ZC message displayed 3 Select the range that will be used fo...

Page 52: ...nal temperature of Model 6514 when it was last calibrated SCPI programming zero check and zero correct A SYSTem ZCORrect STATe b This method to perform zero correction is consistent with the way it is...

Page 53: ...quire method to zero correct the 2V range SYST ZCH ON Enable zero check FUNC VOLT Select Volts function VOLT RANG 2 Select 2V range INIT Trigger one reading SYST ZCOR ACQ Acquire zero correct value SY...

Page 54: ...s follows INPUT CAP 4 Connect a triax shielding cap to the rear panel INPUT jack Use a Keithley CAP 31 or equivalent 5 Press ENTER to complete input bias current calibration 6 If you wish to perform f...

Page 55: ...te the calibration process SCPI command offset voltage calibration 1 Connect a triax short to the rear panel INPUT jack Use the supplied Model 237 ALG 2 triax cable or equivalent with red and black al...

Page 56: ...able capacitance can slow down measurement response time Guarding input cable Eliminates the effects of leakage resistance for high impedance measurements and input capacitance when using a long input...

Page 57: ...ochemical effects Currents generated by the formation of chemical batteries on a circuit board caused by ionic contamination Humidity Reduces insulation resistance on PC boards and test connection ins...

Page 58: ...ance volts and ohms measurements Volts and ohms measurement procedure Provides the procedure to measure volts and ohms SCPI programming Covers the basic SCPI command used for the volts and ohms functi...

Page 59: ...DUT device under test In Figure 3 1 the test circuit consists of a current source in series with the DUT The objective is to make an accurate voltage measurement of the DUT In Figure 3 1A a resistanc...

Page 60: ...minimize the effects of cable leakage and input capacitance keep the input cable as short as possible and use guard With guard enabled the same potential is applied to both the center conductor and i...

Page 61: ...d The GRD key toggles the driven guard on and off If performing unguarded measurements press GRD until the GUARD OFF message is displayed If performing guarded measure ments press GRD until the GUARD...

Page 62: ...ltage or resistance to be measured If a hazardous voltage 30V is present on the noise shield or the test circuit is floating above earth ground at a hazardous voltage level a safety shield must be use...

Page 63: ...y Earth Ground Green Chassis DUT Guarded connections Connections for guarded volts and ohms measurements are shown in Figure 3 3 The driven guard GRD must be enabled for these measurements WARNING Wit...

Page 64: ...prevent electric shock always enable zero check to disable the test signal before making or break ing connections to DUT SCPI programming A SENSe FUNCtion name Parameters VOLTage Volts function RESis...

Page 65: ...he reading string is returned in is set by commands in the FORMat Subsystem see Section 16 If there is no reading available when DATA is sent an error 230 will occur The READ command can be used to re...

Page 66: ...the meter The percent error due to loading can be calculated using the formula in the illustration To keep the error under 0 1 the input resistance RIN must be about 1000 times the value of the sourc...

Page 67: ...time constant RC and the familiar exponential curve of Figure 3 6 results Therefore it becomes necessary to wait four or five time constants to achieve an accurate reading For example if R 100G and th...

Page 68: ...R E C VM Measured Source RC 6514 Voltmeter LO HI A High Impedance Volts Measurement Unguarded R C VM Measured Resistance 6514 Ohmmeter LO HI IS RC B High Impedance Ohms Measurement Unguarded Figure 3...

Page 69: ...of the triax input cable The equivalent circuit shows the divider that is formed If RS is large enough the divider will significantly atten uate the voltage seen at the input of Model 6514 see Cable...

Page 70: ...nner shield Guard of the cable are at virtually the same potential the potential across RL is zero so no cur rent flows Also with a zero potential across CL there is no capacitor charging process to s...

Page 71: ...er than one minute Acceptable capacitors have current levels below a required maximum limit Dielectric absorption can also be expressed as a percentage of residual voltage with respect to a charging v...

Page 72: ...ts and Ohms Measurements 3 15 Soak Recovery Discharge A Connections Time V t1 t2 t3 S2 R2 C H1 L0 VM 6514 VOLTMETER 230 VOLTAGE SOURCE _ S1 R1 B Voltage Waveform Figure 3 9 Measuringdielectric absorpt...

Page 73: ...driven guarding tech niques to eliminate leakage currents in high impedance test circuits SCPI programming Covers the basic SCPI commands used for the amps function Amps measurement considerations Co...

Page 74: ...recision for low level current measurements input bias current and voltage burden can be minimized by performing the offset correction procedures in Section 19 Information about these offsets are prov...

Page 75: ...measured to the electrometer Basic connections for amps measurements are shown in Figure 4 1 NOTE Fundamental information on making connections to the electrometer input is pro vided in Section 2 Conn...

Page 76: ...of noise for current measurements However damping will also slow down the response of the measurement Perform the following steps to enable or disable damping 1 Press DAMP to display the present state...

Page 77: ...suring the leakage current IL The current measured by the ammeter is IR IL By connecting ammeter input LO to the metal mounting guard plate as shown in Figure 4 2B the leakage current IL is shunted to...

Page 78: ...0V approx imately 10V is dropped by RL The current through RL will be approximately 10nA 10V 1G 10nA Therefore the current that is measured by Model 6514 is the sum of the two currents I IR 10nA Obvi...

Page 79: ...urements 4 7 I IR 10nA R 10V 1G IL IR HI 6514 LO A RL 10nA 10V 1G 10V A Unguarded I IR 2pA R 10V 1G IL IR HI LO A RL 2pA 2mV 1G 10V 1G RG IG 10nA 10V 1G B Guarded 6514 Figure 4 3 Floating current meas...

Page 80: ...t calculation The reading reflects what is applied to the input To return a fresh new reading you can send the INITiate command to trigger one or more readings before sending DATA Details on INITiate...

Page 81: ...infor mation on precision measurements refer to the Low Level Measurements handbook which is available from Keithley Instruments Input bias current An ideal ammeter would read 0A with an open input In...

Page 82: ...resistance is reduced the noise gain of the ammeter will increase as we will now discuss Figure 4 5 shows a simplified model of the feedback ammeter RS and CS represents the source resistance and sou...

Page 83: ...surement range because the RF value also depends on the measurement range Table 4 2 Minimum recommended source resistance values Range Minimum Recommended Source Resistance pA 1G to 100G nA 1M to 100M...

Page 84: ...nd CS Furthermore and Note that as CS increases in value ZS decreases in value thereby increasing the noise gain Again at the point where ZS ZF the input noise is amplified by a factor of two The maxi...

Page 85: ...e voltage you will forward bias the diode Resistor R is used to limit current in the event that the diode shorts out or it becomes forward biased Select a value of R that will limit current to 20mA or...

Page 86: ...d to determine resistance Once a current measurement is performed resistance can be calculated Figure 4 8 shows how to measure the insulation resistance of a cable The resistance of the insulator betw...

Page 87: ...is is a typical test pattern for SIR tests A bias voltage typically 50V is applied to the test pattern for a specified time typically one second to polarize the test pattern The test voltage typically...

Page 88: ...to discharge feature of Model 6514 Coulombs measurement procedure Provides the procedure to measure coulombs SCPI programming Covers the basic SCPI commands used for the coulombs function Amps measure...

Page 89: ...in Appendix A Auto discharge Model 6514 has an auto discharge feature for the coulombs function When enabled auto dis charge resets the charge reading to zero when the specified charge level is reache...

Page 90: ...ZCHK key toggles zero check on and off When on the ZC or ZZ message is displayed See Section 2 for details on zero check The coulombs function is selected by pressing the Q key Step 2 Select a manual...

Page 91: ...twice The first press disables Rel and the second press re enables it to zero the display See Auto Discharge Hop in Coulombs Measurement Considerations in this section Black LO Red HI 237 ALG 2 Cable...

Page 92: ...plied to the input To return a fresh new reading you can send the INITiate command to trigger one or more readings before sending DATA Details on INITiate are provided in Section 9 While Model 6514 is...

Page 93: ...s are covered in Appendix C For comprehensive information on precision measurements refer to the Low Level Measurements handbook which is available from Keithley Instruments Input bias current A prima...

Page 94: ...auto discharge resets the charge reading This action nulls out the charge reading caused by the hop Application Capacitance measurements Figure 5 2 shows a general test circuit to measure a capacitor...

Page 95: ...nits and display resolution selection Includes the SCPI commands for remote operation Rate Provides details on reading rate selection Includes the SCPI commands for remote operation Filters Explains h...

Page 96: ...ge possible without causing an overflow to ensure best accuracy and resolution Autoranging When using autorange the instrument automatically goes to the most sensitive available range to measure the a...

Page 97: ...resent LOWER range limit 3 Use the RANGE and keys to display the desired limit 4 Press ENTER NOTE If you attempt to select an incompatible range limit it will be ignored and TOO LARGE or TOO SMALL wil...

Page 98: ...isplay resolution can be set from 3 to 6 digits This single global setting affects display resolution for all measurement functions To set display resolution press and release the DIGIT key until the...

Page 99: ...ce RANGe Range selection UPPer n Specify expected reading 0 to 2 1e11 200k AUTO b Enable or disable autorange see Note ULIMit n Specify upper range limit for autorange 0 to 2 1e11 200G LLIMit n Specif...

Page 100: ...you set rate There are two ways to set rate You can select slow medium or fast by using the RATE key or you can set the number of power cycles from the NPLC menu that is accessed by pressing SHIFT an...

Page 101: ...rogramming rate As shown in Table 6 3 there are four commands to set rate However since the rate setting is global and affects all measurement functions it doesn t matter which command you use to set...

Page 102: ...ending order as follows 1V 3V 20V From the above readings it is apparent that 3V is the median middle most reading The number of sample readings used for the median calculation is determined by the se...

Page 103: ...arts over Response time The various filter parameters have the following effects on the time needed to display store or output a filtered reading Filter type The time to the first reading is the same...

Page 104: ...ment the value 1 Press theAVG key to display the present number of reading conversions to average filter count 2 Key in desired filter count value 1 to 100 and press ENTER The present filter type repe...

Page 105: ...ample The following command sequence configures and enables both filters Median Filter MED RANK 5 Set rank to 5 MED ON Enable median filter Digital Filter AVER COUN 20 Set filter count to 20 AVER TCON...

Page 106: ...Relative Explains how to null an offset or establish a baseline value Includes the SCPI commands for remote operation mX b and percent Covers these two basic math operations and includes the SCPI comm...

Page 107: ...1V input NOTE Rel can be used on the result of the percent or mX b calculations However Rel will disable whenever a math function is enabled or disabled Setting and controlling relative From the front...

Page 108: ...esired Rel value displayed press ENTER to enable Rel SCPI programming relative Table 7 1 Range symbols for rel values Symbol Prefix Exponent P pico 10 12 N nano 10 9 micro 10 6 m milli 10 3 none 100 K...

Page 109: ...eturn the last Rel ed reading after abort ing the measurement process After sending the INITiate command to start the measurement process use the ABORt command to abort the measurement process then us...

Page 110: ...Percent is the displayed result To configure and control the percent calculation perform the following steps 1 Press SHIFT and then to display the present reference value REF 1 000000 factory default...

Page 111: ...e DATA LATest to return the last CALC1 reading Programming example mX b This command sequence performs a single mX b calculation and displays the result on the computer CRT RST Restores RST defaults C...

Page 112: ...8 Buffer Buffer operations Explains how to store and recall readings including buffer statistics SCPI programming Covers the SCPI commands used to control buffer operations...

Page 113: ...Perform the following steps to store readings 1 Set up the instrument for the desired configuration 2 Press the STORE key 3 Use the cursor keys and and the RANGE keys and to set the number of reading...

Page 114: ...readings Standard devi ation is calculated as follows Where Xi is a stored reading n is the number of stored readings RDG NO 10 Reading Value Timestamp RDG NO 9 Reading Value Timestamp RDG NO 8 Readin...

Page 115: ...ffer Commands Description Default Ref TRACe TRACe Subsystem See Note CLEar Clear readings from buffer FREE Query bytes available and bytes in use A POINts n Specify number of readings to store 1 to 25...

Page 116: ...amp data element can be included with each buffer reading see Ref F E TRACe DATA 1 The response message will include one to three data elements for each stored reading Use the FORMat ELEMents command...

Page 117: ...in an error 230 2 If there is a lot of data in the buffer some statistic operations may take too long and cause a bus time out error To avoid this send calc3 data and then wait for the MAV message av...

Page 118: ...t Also explains how to configure the trig ger model from the front panel SCPI programming Includes the commands used to configure the trigger model and the commands to control the measurement process...

Page 119: ...st BSTest Arm Event Detector Trigger Event Detector Trigger Delay MEASURE Action No Yes Idle Another Arm Another Trigger Yes No Arm Layer Trigger Layer Trigger In Source INF 1 Yes Halt No Once Bypass...

Page 120: ...r Yes No Arm Layer Trigger Layer GPIB Default Output Trigger Trigger In Source 0 0 sec No See Note INITiate Yes SOURce ARM DIRection ACCeptor ARM SOURce IMMediate ARM SOURce BUS ARM SOURce TIMer ARM S...

Page 121: ...in idle most commands will not be executed until the instrument completes all of its programmed operations and returns to the idle state The IFC SDC and DCL commands can be executed under any circums...

Page 122: ...t goes into idle STest ARM SOURce NSTest Event detection for the arm layer is satisfied when a negative going pulse via the SOT line of the Digital I O is received from a component handle see Limit Te...

Page 123: ...ar panel TRIGGER LINK connector right after the measure action and or when operation leaves the trigger layer An output trigger can be used to trigger another instrument to perform an operation e g se...

Page 124: ...s Bullets denote the main items of the menu To access the menu press SHIFT and then CONF ARM ARM IN Select the Arm in control source IMM Immediate GPIB TIMER 1 MAN Manual TLINK 2 STEST TEST or BSTEST...

Page 125: ...cording to function range see Table 9 1 COUNT Set a finite FIN trigger count 1 to 2500 or select infinite INF trigger count NOTE Input trigger and output trigger cannot share the same trigger link lin...

Page 126: ...Configure input output triggers ILINe NRf Select input trigger line 1 2 3 4 5 or 6 1 E OLINe NRf Select output trigger line 1 2 3 4 5 or 6 2 E OUTPut name Output trigger TRIGger or not at all NONE NO...

Page 127: ...interval D DIRection name The source bypass can only be used if the TLINk control source is selected E ILINe name and OLINe name Input trigger and output trigger cannot share the same trigger link lin...

Page 128: ...trigger requirements An input trigger is used to satisfy event detection for a trigger model layer that is using the TLINK control source The input requires a falling edge TTL compatible pulse with t...

Page 129: ...Such a test system is shown in Figure 9 7 which uses a Model 6514 to measure 10 DUTs switched by a Model 7011 multiplexer card in a Model 7001 or 7002 switch system Meter Complete TTL High 3 4V Typica...

Page 130: ...e to the switching mainframe to close the next channel This process continues until all 10 channels are scanned measured and stored Details of this testing process are explained in the following parag...

Page 131: ...the output trigger pulse from Model 7001 2 triggers a mea surement of DUT 1 point E After the measurement is complete Model 6514 outputs a trigger pulse and then loops back to point A where it waits...

Page 132: ...and Limit 2 testing operations Binning Explains how to use a component handler to perform binning operations Front panel operation Explains how to configure and run tests from the front panel SCPI pro...

Page 133: ...rocess is shown in Figure 10 3 If limit 1fails the L1 message is displayed and the test is finished Limit 2 is not tested because the pass band relationship between the two stages implies that if limi...

Page 134: ...10 3 operation simply proceeds through a disabled test Table 10 1 Test limit display messages Display Message Limit 1 Test Result Limit 2 Test Result OK Pass Pass L1 Fail Not Performed L2 Pass Fail P...

Page 135: ...limits for limit 1 would be the 5 tolerances and the limits for limit 2 would be the 1 tolerances If a resistor passes both tests it belongs in the 1 group If it passes limit 1 but fails limit 2 it be...

Page 136: ...andler for each DUT that is tested Pass Start Measure DUT Yes Limit 1 Test No Display L1 Limit 1 Test Pass Display L2 Display OK and Output Pass Pattern Yes No End Which Limit Failed Output Fail Patte...

Page 137: ...arm in event for the arm layer of the trigger model the testing pro cess will start when the SOT line is pulled low When test is the selected arm in event the test will start when the SOT line is pul...

Page 138: ...handler a maximum of four component handler bins are sup ported If the handler requires low going pulses then the four digital output lines of Model 6514 must be initially set to high This initial HI...

Page 139: ...Busy mode In the Busy mode the idle state for line 4 is LO When the test starts SOT line pulsed line 4 goes HI busy state After the test is finished it goes back to LO For the Busy mode the idle stat...

Page 140: ...t the delay specifies the pulse width of line 4 The pulse width of lines 1 2 and 3 is actually 20 sec longer Line 4 is skewed because it is used as the end of test EOT strobe by category register comp...

Page 141: ...n to 0101 lines 3 and 1 HI set the output value to 5 4 1 Limits configuration menu The configuration menu for limits is structured as follows Bullets denote the main items of the menu To access the me...

Page 142: ...seldom used with component handlers but are available Perform limit tests Step 1 Configure test system As previously explained testing the system could be as simple as connecting a DUT to Model 6514 o...

Page 143: ...t DATA n Set limit 9 99999e20 to 9 99999e20 1 0 SOURce2 NDN or NRf Specify 4 bit output fail pattern 15 B LOWer Configure lower limit DATA n Set limit 9 99999e20 to 9 99999e20 1 0 SOURce2 NDN or NRf S...

Page 144: ...al hexadecimal or octal format For example if you wish to set lines 4 2 and 1 HI the binary parameter value would Command Description Default Ref SOURce2 SOURce2 Subsystem TTL NDN or NRf Specify 4 bit...

Page 145: ...determine which limit upper or lower failed See Section 13 to program and read the measurement event register D DATA The INITiate command must be sent to perform the programmed number of measurements...

Page 146: ...er limit for Limit 1 2V CALC2 LIM LOW 2 Set lower limit for Limit 1 2V CALC2 LIM STAT ON Enable Limit 1 test CALC2 LIM2 UPP 1 Set upper limit for Limit 2 1V CALC2 LIM2 LOW 1 Set lower limit for Limit...

Page 147: ...ital I O port Explains how to use the digital I O port to control external circuitry Analog outputs Covers the 2V analog output and preamp out External feedback Explains how to use the external feedba...

Page 148: ...6514 when it is ready for the test Via the digital out put lines Model 6514 sends digital output patterns to the component handler and tells it when the test is finished A digital output pattern dete...

Page 149: ...ge range from 5V to 33V applied through the external device being driven The high current sink capacity of the output driver allows direct control of relays solenoids and lamps no additional circuitry...

Page 150: ...by replacing the relay with the device When the output line is set LO 0V the output transistor sinks current through the exter nal device In the HI state the output transistor is off transistor switch...

Page 151: ...the transistor turns on transistor switch closed to route current to digital ground As a result a low logic output 0V is provided at the output If the second input B of the NAND gate is connected to...

Page 152: ...OUR2 TTL Request output pattern value Table 11 1 SCPI commands digital outputs Command Description Default SOURce2 SOURce2 Subsystem TTL NRf or NDN Specify 4 bit digital output pattern see Parameter V...

Page 153: ...output that is non inverting in the volts mode Connections for using this output are shown in Figure 11 5 For a full range input i e 2V on the 2V range the output will be 2V Example analog outputs ar...

Page 154: ...anges are listed in Table 11 3 Model 1683 Test Lead kit RS232 DIGITAL I O PREAMP 250V PK 2V OUTPUT COMMON CHASSIS 120 FUSE LINE 630mA LINE RATING 50 60Hz 60 VA MAX T SB 100 VAC 120 VAC 315mAT SB 220 V...

Page 155: ...recorder A Connections LO HI 0 1 0 1 Common RL HI LO S S RF 0 1 VREF Ohms Preamp Out VOut IOut RL Model 1683 Test Lead kit RS232 DIGITAL I O PREAMP 250V PK 2V OUTPUT COMMON CHASSIS 120 FUSE LINE 630mA...

Page 156: ...output resistance is 1 The output resistance appears between input low and analog output low to keep the resistor out of the loop when using external feedback ele ments To keep loading errors under 0...

Page 157: ...ections When using external feedback the following factors must be taken into account 1 The maximum current value that can be supplied by the preamp output is 20mA in amps and ohms 1mA in volts The ma...

Page 158: ...n dard BNC connectors replaced with triaxial female connectors For convenience a banana jack can be mounted on the box to make the necessary preamp out connection Alternately a wire could be run throu...

Page 159: ...bsorption Polystyrene polypropylene and Teflon dielectric capacitors are examples of capacitor types with these desirable characteristics The capacitor should be mounted in a shielded fixture like the...

Page 160: ...rom Signal GND HI LO S 7078 TRX 3 Cable HI LO 2 To Ranging Amp and A D 5 3 2 4 1 A Construction HI LO Shielded Fixture 237 ALG 2 Cable Feedback Element Parts List Item Description MFR Part Number 1 Sh...

Page 161: ...s of the junction diode at low and high currents respectively The factor m introduces non linearity s between those two extremes Because of these limita tions most diodes have a limited range of logar...

Page 162: ...wever the nom inal voltage burden of 1mV must be considered as an error signal that must be taken into account Further processing of the current response can be achieved by using the suppress feature...

Page 163: ...zero check VOLT XFE ON Enable external feedback FUNC VOLT Select Volts function SYST ZCH OFF Disable zero check READ Trigger measurement s and request reading s Table 11 4 SCPI commands external feed...

Page 164: ...eration and reference Covers the following GPIB topics GPIB Bus Standards GPIB Bus Connections Primary Address Selection General Bus Commands Front Panel GPIB Operation Programming Syntax RS 232 inter...

Page 165: ...t baud rate data bits par ity terminator and flow control For the RS 232 interface you can only use the SCPI language to program the instrument Languages For the GPIB interface there are two programmi...

Page 166: ...IB to access the GPIB menu and perform the following steps 1 Use the or key to display the present address ADDR and language LANG set tings If these settings are correct press EXIT to exit the menu Ot...

Page 167: ...he baud rate value b Use the or key to display the desired baud rate 300 to 57 6k c Press ENTER The data bits setting is then displayed 3 To retain the displayed data bits setting BITS press ENTER To...

Page 168: ...ble Instruments This standard defines a command language protocol It goes one step further than IEEE 488 2 1992 and defines a standard set of commands to control every programmable aspect of an instru...

Page 169: ...mechanical damage stack no more than three connectors on any one unit NOTE To minimize interference caused by electromagnetic radiation use only shielded IEEE 488 cables Available shielded cables from...

Page 170: ...including the controller The maximum cable length is either 20 meters or two meters times the number of devices whichever is less Not observing these limits may cause erratic bus operation Primary ad...

Page 171: ...fore you attempt to program it over the bus Simply setting REN true does not actually place the instru ment in the remote state You must address the instrument to listen after setting REN true before...

Page 172: ...so all instruments equipped to implement DCL will do so simultaneously When Model 6514 receives a DCL command it clears the input buffer and output queue cancels deferred commands and clears any comm...

Page 173: ...active state Place the unit in the talk state by addressing it to talk with the correct MTA My Talk Address command TALK is off when the unit is in the talker idle state Place the unit in the talker...

Page 174: ...be included in the pro gram message For example INITiate IMMediate These brackets indicate that IMMediate is implied optional and does not have to be used Thus the above command can be sent in one of...

Page 175: ...MINimum Sets timer to 1 msec ARM TIMer MAXimum Sets timer to 999999 999 sec Angle brackets Used to denote a parameter type Do not include the brackets in the program message DISPlay ENABle b The b ind...

Page 176: ...STe PRESe is illegal and will generate an error The command will not be executed Short form rules Use the following rules to determine the short form version of any SCPI command If the length of the c...

Page 177: ...le command messages in the same program message as long as they are separated by semicolons The following is an example showing two commands in one pro gram message stat oper stat oper enab NRf When t...

Page 178: ...e separated by semicolons A common command can be executed at any command level and will not affect the path pointer stat oper enab NRf ESE NRf Program Message Terminator PMT Each program message must...

Page 179: ...nds were sent and are separated by semicolons Items within the same query are separated by commas The following example shows the response message for a program message that contains four single item...

Page 180: ...e The baud rate is the rate at which Model 6514 and the programming terminal communicate You can choose from one of the following rates 57 6k 38 4k 19 2k 9600 4800 2400 1200 600 or 300 Make sure that...

Page 181: ...the controller If NONE is the selected flow control then there will be no signal handshaking between the controller and Model 6514 Data will be lost if transmitted before the receiving device is ready...

Page 182: ...al ground 6 DSR data set ready 7 RTS ready to send 8 CTS clear to send 9 No connections RTS and CTS are tied together DCD DTR and DSR are tied together Table 12 3 PC serial port pinout Signal DB 9 pin...

Page 183: ...in the status structure Status byte and service request SRQ Explains how to program the status byte to generate service requests SRQs Shows how to use the serial poll sequence to detect SRQs Status r...

Page 184: ...r the RQS MSS bit will set to indicate that an SRQ has occurred Status register sets A typical status register set is made up of a condition register an event register and an event enable register A c...

Page 185: ...Logical OR Always Zero Operation Complete Query Error Device Specific Error Execution Error Command Error User Request Power On OPC QYE DDE EXE CME URQ PON ESR ESE NRf ESE MSB MSB 12 13 12 13 Event R...

Page 186: ...rs to 0 Note 1 Standard event register Operation event register Measurement event register Questionable event register STATus STATus subsystem PRESet Reset all bits of the following enable registers t...

Page 187: ...1 and all other bits are 0 When you use one of the other formats convert the binary number to its decimal hexadecimal or octal equivalent Binary 11010 Decimal 26 Hexadecimal 1A Octal 32 Note that Figu...

Page 188: ...3 2 For non decimal formats one of the following headers will accompany the returned value to indicate which format is selected B Header for binary values H Header for hexadecimal values Q Header for...

Page 189: ...the standard event register is read its register will clear As a result its summary message will reset to 0 which in turn will reset the ESB bit in the status byte register Status Summary Messages 6 O...

Page 190: ...6514 to obtain the status byte a k a serial poll byte B6 is the RQS bit See serial polling and SRQ for details on using the serial poll sequence When using the STB command see Table 13 3 to read the s...

Page 191: ...t SRQ has not been cleared The serial poll does not clear MSS The MSS bit stays set until all status byte summary bits are reset SPE SPD serial polling The SPE SPD general bus command is used to seria...

Page 192: ...register using the binary format which directly indicates which bits are set The command to select format FORMat SREGister is documented inTable 13 2 To determine the exact nature of the error you wil...

Page 193: ...ueue Bit B3 device dependent error DDE Set bit indicates that an instrument operation did not execute properly due to some internal condition Bit B4 execution error EXE Set bit indicates that Model 65...

Page 194: ...ME Command Error EXE Execution Error DDE Device Dependent Error QYE Query Error OPC Operation Complete Logical AND OR Logical OR OPC B0 128 27 32 25 16 24 8 23 4 22 1 20 Decimal Weights URQ B6 B15 B8...

Page 195: ...he arm layer waiting for an arm event to occur Bit B10 idle state Idle Set bit indicates Model 6514 is in the idle state OR Operation Event Enable Register Idle In Idle Trig Waiting for trigger event...

Page 196: ...exceeds the selected measurement range of Model 6514 Bit B8 buffer available BAV Set bit indicates that there are at least two readings in the buffer Bit B9 buffer full BFL Set bit indicates that the...

Page 197: ...ister set has a condition register A condition register is a real time read only register that constantly updates to reflect the present operating conditions of the instrument For example while Model...

Page 198: ...13 5 For details on reading reg isters see Reading registers Table 13 4 Common and SCPI commands condition registers Command Description STATus STATus subsystem OPERation CONDition Read operation cond...

Page 199: ...ropriate enable command i e STATus OPERation ENABle 0 Table 13 6 Common and SCPI commands event enable registers Command Description ESE NDN or NRf Program standard event enable register see Parameter...

Page 200: ...to hold reading and response messages Error queue Used to hold error and status messages Model 6514 status model Figure 13 1 shows how the two queues are structured with the other registers Output qu...

Page 201: ...ceded by a code number Negative numbers are used for SCPI defined messages and positive numbers are used for Keithley defined messages The messages are listed inAppendix B As shown in Table 13 7 there...

Page 202: ...be placed in queue Note 2 DISable Read the disabled messages CLEar Clear messages from error queue SYSTem SYSTem subsystem ERRor Read error queue Note 1 NEXT Read and clear oldest error status code a...

Page 203: ...14 CommonCommands...

Page 204: ...d clear it Sec 13 IDN Identification query Returns the manufacturer model number serial number and firmware revision levels of the unit A OPC Operation complete command Set the operation complete bit...

Page 205: ...n the output queue RST Return 6514 to RST defaults idle TRIG DEL 1 Set trigger delay for 1 second ARM COUN 10 Program for 5 measurements and stop INIT Start measurements OPC Send OPC C SAV NRf save Sa...

Page 206: ...test query Run self test and read result Use this query command to perform a checksum test on ROM The command places the coded result 0 or 1 in the output queue When Model 6514 is addressed to talk t...

Page 207: ...15 SCPISignalOriented MeasurementCommands...

Page 208: ...be configured as follows The specified function is selected All controls related to the selected function are defaulted to the RST values The event control sources of the trigger model are set to imme...

Page 209: ...FETCh If the instrument is in the idle state INITiate takes the instrument out of idle to perform the programmed number measurements If the instrument is not in the idle state execution of this comman...

Page 210: ...ill then be performed In general an INITiate is executed to perform the measurement and a FETch is executed to acquire the reading See READ for details NOTE If you send MEASure no measurement function...

Page 211: ...Play subsystem Covers the SCPI commands that are used to control the display FORMat subsystem Covers the SCPI commands to configure the format that read ings are sent over the bus SYSTem subsystem Cov...

Page 212: ...cter Excess message characters result in an error Note that for the string type the message must be enclosed by single or double quotes An indefinite block message must be the only command in the prog...

Page 213: ...GPIB operation A user defined message remains displayed only as long as the instrument is in remote Taking the instrument out of remote by pressing LOCAL or sending the GTL go to local command or cycl...

Page 214: ...hich data format for output strings is selected the instrument will only respond to input commands using the ASCII format ASCII data format The ASCII data format is in a direct readable form for the o...

Page 215: ...binary transfers never un talk Model 6514 until after the data is read input to the computer Also to avoid erratic operation the readings of the data string and terminator should be acquired in one p...

Page 216: ...Tem TIME RESet After 99 999 99 seconds the timer resets back to zero and starts over For buffer readings timestamp can be referenced to the first reading stored in the buffer absolute format which is...

Page 217: ...yte order for IEEE 754 binary format SWAPped Reverse byte order for IEEE 754 binary format For normal byte order the data format for each element is sent as follows Byte 1 Byte 2 Byte 3 Byte 4 For rev...

Page 218: ...SAVx where x 0 to 4 C VERSion Query SCPI revision level D ERRor Read messages in error queue see Note Sec 13 NEXT Return and clear oldest error code and message ALL Return and clear all errors code an...

Page 219: ...r up to setup stored in memory x memory location 0 1 2 3 or 4 The RST and SYSTem DEFaults are listed in the SCPI tables in the Section 17 A setup is saved in memory using the SAV command See Section 1...

Page 220: ...d one key press When KEY is sent and Model 6514 is addressed to talk the key press code number for the last key pressed either physically or with KEY is sent to the computer RANGE AUTO SHIFT LOCAL POW...

Page 221: ...17 2 DISPlay command summary Table 17 3 FORMat command summary Table 17 4 SENSe command summary Table 17 5 SOURce command summary Table 17 6 STATus command summary Table 17 7 SYSTem command summary Ta...

Page 222: ...s parameters are SCPI con firmed An unmarked command indicates that it is a SCPI command but does not con form to the SCPI standard set of commands It is not a recognized command by the SCPI consortiu...

Page 223: ...NDN or NRf Specify 4 bit output fail pattern 15 SOURce2 Query output pattern value LOWer Configure lower limit DATA n Set limit 9 99999e20 to 9 99999e20 1 0 DATA Query lower limit SOURce2 NDN or NRf...

Page 224: ...Query pass output pattern NULL Configure and control Rel ACQuire Use input signal as Rel value OFFSet NRf Specify Rel value 9 999999e20 to 9 999999e20 0 0 OFFSet Query Rel value STATe b Enable or dis...

Page 225: ...ng power cancels all user defined messages 3 RST and SYSTem PRESet have no effect on the state of the message mode Pressing LOCAL or cycling power disables OFF the message mode Table 17 3 FORMat comma...

Page 226: ...range value AUTO b Enable or disable autorange see Note ULIMit NRf Select autorange upper limit 210 to 210 volts 210 ULIMit Query upper limit for autorange LLIMit NRf Select autorange lower limit 210...

Page 227: ...UPPer NRf Select range 0 to 2 1e11 ohms 2 1e5 UPPer Query range value AUTO b Enable or disable autorange see Note ULIMit NRf Select autorange upper limit 2 1e11 to 2 1e11 ohms 2 1e11 ULIMit Query uppe...

Page 228: ...ate of auto discharge AVERage Path to control the Digital Filter Sec 6 TCONtrol name Select filter control MOVing or REPeat REP TCONtrol Query filter control COUNt n Specify filter count 2 to 100 10 C...

Page 229: ...configuration MODE name Select output line 4 mode EOTest or BUSY EOT MODE Query line 4 mode BSTate ttl Select active TTL level for busy 1 HI or 0 LO 0 BSTate Query busy level NDN and NRf parameters ND...

Page 230: ...aced in queue Note 5 DISable Read the disabled messages CLEar Clear messages from error queue Parameters NDN Bxx x Binary format each x 1 or 0 Hx Hexadecimal format x 0 to FFFF Qx Octal format x 0 to...

Page 231: ...o Sec 2 STATe b Enable or disable autozero ON STATe Query state of autozero TIME Timestamp RESet Reset timestamp to 0 seconds POSetup name Select power on setup RST PRESet or SAVx where x 0 to 4 POSet...

Page 232: ...TA Read the contents of the buffer data store CLEar Clear readings from buffer FREE Query bytes available and bytes in use POINts n Specify size of buffer 1 to 2500 100 ACTual Query number of readings...

Page 233: ...al TCONfigure DIRection name Enable SOURce or disable ACCeptor bypass ACCeptor DIRection Query arm source bypass ASYNchronous Configure input output triggers ILINe NRf Select input trigger line 1 2 3...

Page 234: ...Rection Query trigger source bypass ASYNchronous Configure input output triggers ILINe NRf Select input trigger line 1 2 3 4 5 or 6 1 ILINe Query input trigger line OLINe NRf Select output trigger lin...

Page 235: ...18 PerformanceVerification...

Page 236: ...is required Following calibration make sure it was performed properly WARNING The information in this section is intended only for qualified service person nel Do not attempt these procedures unless y...

Page 237: ...70 unless otherwise noted Warm up period Allow Model 6514 to warm up for at least one hour before conducting the verification proce dures If the instrument has been subjected to temperature extremes...

Page 238: ...ipment Description Manufacturer model Specifications Calibrator Fluke 5700A DC voltage 1 2V 7ppm 20V 5ppm 200V 7ppm DC current 1 20 A 550ppm 200 A 100ppm 2mA 55ppm 20mA 55ppm Resistance calibrator Flu...

Page 239: ...clip cable3 Keithley 237 ALG 2 Triax to BNC adapter Keithley 7078 TRX BNC Triax shielding cap Keithley CAP 31 BNC to double banana plug adapter Pomona 1269 Notes 1 90 day 23 5 C full range accuracy sp...

Page 240: ...ts the calculated reading limits are Reading limits 20V 20V 0 025 300 V 20V 0 005 0 0003 20V 0 0053V 19 9947V to 20 0053V Recalculating resistance reading limits When verifying resistance measurement...

Page 241: ...ows V IR Where V required calibrator voltage I verification current R actual standard resistor value For example assume you are calibrating the 20pA range using an actual 100 5G standard resistor valu...

Page 242: ...e offset calibration as outlined below Make sure that the test equipment is properly warmed up and properly connected to Model 6514 INPUT jack Be sure test equipment is set up for the proper function...

Page 243: ...that these offsets will be lost if power is cycled unless you save them first Offset voltage calibration 1 From the calibration menu use the down RANGE key to display the following CAL VOFFSET 2 Press...

Page 244: ...m up period Restore factory defaults and perform offset calibration as outlined above 3 Select the DC volts function on Model 6514 by pressing theV key and set the calibrator to output DC volts 4 Sele...

Page 245: ...lue Verify that Model 6514 voltage reading is within the limits given in the table 9 Repeat the procedure for negative source voltages with the same magnitudes as those listed in Table 18 2 Table 18 2...

Page 246: ...rrent to 0 0000 A and make sure the output is turned on 6 Enable Model 6514 REL mode Leave REL enabled for the remainder of the test 7 Verify current measurement accuracy for each of the currents list...

Page 247: ...current measurement accuracy reading limits Model 6514 range Calibrator current Model 6514 amps reading limits 1 Year 18 C 28 C 20 A 20 0000 A 19 9795 to 20 0205 A 200 A 200 000 A 199 795 to 200 205...

Page 248: ...itudes as those listed in Table 18 4 Table 18 4 20pA 2 A range current measurement accuracy reading limits Model 6514 range Nominal calibrator voltage Calibration standard resistor1 Applied current Ac...

Page 249: ...514 ohms function by pressing the key and set the calibrator to the resistance function 3 With zero check enabled zero correct the instrument then disable zero check 4 Output 0 from the calibrator and...

Page 250: ...ing limits Table 18 5 2k 20M range resistance measurement accuracy limits Model 6514 range Calibrator resistance1 Model 6514 ohms reading limits 1 Year 18 C 28 C 2 2k 1 9k 1 89610 to 1 90390k 20k 19k...

Page 251: ...ce measurement accuracy limits Model 6514 range Standard resistance1 Model 6514 ohms reading limits 1 Year 18 C 28 C 2 200M 100M 99 697 to 100 303M 2G 1G 0 98496 to 1 01504G 20G 10G 9 8497 to 10 1503G...

Page 252: ...he DC volts function 4 With zero check enabled zero correct the instrument then disable zero check 5 Set the calibrator voltage to 0 0000V and turn on its output 6 Enable the REL mode and leave REL en...

Page 253: ...6514 charge reading is within the required limits Enable zero check to discharge the capacitor Table 18 7 Coulombs measurement accuracy reading limits Model 6514 range Nominal calibrator voltage Stan...

Page 254: ...19 Calibration...

Page 255: ...temperature of 18 28 C 65 82 F with rel ative humidity of less than 70 unless otherwise noted Warm up period Allow Model 6514 to warm up for at least one hour before performing calibration If the ins...

Page 256: ...ground is 500V peak DC to 60Hz sine wave Exceeding this value may cause a breakdown in insulation creating a shock hazard CAUTION The maximum input voltage is 250V peak DC to 60Hz sine wave Exceed ing...

Page 257: ...ndard Keithley Model 5156 Nominal resistance 2 100M 200ppm 1G 300ppm 10G 400ppm 100G 500ppm Nominal capacitance 2 1nF 1 000ppm 100nF 1 000ppm Triax cable Keithley 7024 3 Low noise coax cable Keithley...

Page 258: ...s selections are summarized in Table 19 2 Use the up or down RANGE key to scroll through these selections Aborting calibration You can abort the calibration procedure at any time by pressing the EXIT...

Page 259: ...u are calibrating the 20pA range using a 2V calibrator voltage with an actual 100 5G standard resistor value The actual calibration current is 2V 100 5G 19 9004pA Charge calculations Calibration charg...

Page 260: ...ollowing CAL RUN 3 Use the up or down RANGE key to display the following CAL UNLOCK 4 Press ENTER The instrument will prompt for the calibration code CODE 5 Enter the current calibration code on the d...

Page 261: ...tor to output DC volts 3 Select Model 6514 2V range and make sure the calibrator output is turned on 4 Press SHIFT then CAL to access the calibration menu The unit will display the following CAL RUN 5...

Page 262: ...NTER The unit will prompt for the negative full scale calibration point 2V CAL 11 Press ENTER The Model 6514 will prompt for the negative full scale calibration volt age 2 000000 VDC 12 Set the calibr...

Page 263: ...conds for settling 10 Press ENTER The unit will prompt for the negative full scale calibration point 20 A CAL 11 Press ENTER Model 6514 will prompt for the negative full scale calibration current 20 0...

Page 264: ...n signal to settle for indicated time before calibrating each point RS232 DIGITAL I O PREAMP 250V PK 2V OUTPUT COMMON CHASSIS 120 FUSE LINE 630mA LINE RATING 50 60Hz 60 VA MAX T SB 100 VAC 120 VAC 315...

Page 265: ...bration current from the calibrator voltage and the actual standard resistor value I V R Adjust Model 6514 display to agree with the calculated current Allow the settling time listed in Table 19 5 the...

Page 266: ...nA 15 sec 20nA 1G 0nA 15 sec 20 00000V 1G 20nA 15 sec 20 00000V 1G 20nA 15 sec 200nA 100M 0nA 15 sec 20 00000V 100M 200nA 15 sec 20 00000V 100M 200nA 15 sec 2 A 100M 0 A 15 sec 200 0000V 100M 2 A 15 s...

Page 267: ...nd actual capacitance value Q CV Adjust Model 6514 display to agree with that charge value then press ENTER 8 Model 6514 will prompt for the zero calibration point 2nC ZERO 9 Press ENTER to complete z...

Page 268: ...display 13 Repeat steps 4 through 12 for the 200nC through 20 C ranges using Table 19 6 as a guide Table 19 6 Coulombs calibration summary Model 6514 range Calibrator voltage Standard capacitance1 Ca...

Page 269: ...calibrator to the Model 6514 INPUT jack as shown in Figure 19 5 8 Select the 1 9k calibrator resistance 9 Adjust Model 6514 display to agree with the actual calibration resistance then press ENTER to...

Page 270: ...on resistance 2k 1 9k 2M 1 9M 2G 1G Nominal values Use actual values for calibration Use resistance calibrator for 2k and 2M ranges Use calibration standard resistor for 1G range Zero also calibrated...

Page 271: ...e unit will prompt as follows SAVE CAL YES 7 With theYES prompt displayed press ENTER to save and lock out calibration The unit will display CAL SAVED NOTE Calibration will also be locked out once sav...

Page 272: ...er changing the code Resetting the calibration code If you forget the calibration code you can unlock calibration by shorting together the CAL pads which are located on the display circuit board insid...

Page 273: ...calibration count at any time 1 From normal display press SHIFT then CAL The unit will display the following CAL RUN 2 Use either RANGE key to select CAL COUNT from the calibration menu then press EN...

Page 274: ...20 RoutineMaintenance...

Page 275: ...ps 1 Place the tip of a flat blade screwdriver into the power module by the fuse holder assem bly see Figure 20 1 Gently push in and to the left Release pressure on the assembly and its internal sprin...

Page 276: ...P 250V PK 2V OUTPUT COMMON CHASSIS 120 FUSE LINE 630mA LINE RATING 50 60Hz 60 VA MAX T SB 100 VAC 120 VAC 315mAT SB 220 VAC 240 VAC INPUT 250V PK IEEE 488 CHANGE IEEE WITH FRONT PANEL MENU TRIGGER LIN...

Page 277: ...are sequentially displayed The 12 digits and annunciators are sequentially displayed The annunciators located at either end of the display are sequentially displayed 4 When finished abort the display...

Page 278: ...A Specifications...

Page 279: ...2 A 10 pA 0 1 10 0 005 2 20 A 100 pA 0 1 5 0 005 1 200 A 1 nA 0 1 5 0 005 1 2mA 10 nA 0 1 10 0 008 2 20mA 100 nA 0 1 5 0 008 1 Notes 1 When properly zeroed 51 2 digit Rate Slow 100ms integration time...

Page 280: ...arge acquisition time must be 1000s derate 2 for each additional 10 000s 2 When properly zeroed 61 2 digit Rate Slow 100ms integration time INPUT BIAS CURRENT 4fA at TCAL Temperature coefficient 0 5fA...

Page 281: ...ure male pins EMC Conforms with European Union Directive 89 336 EEC EN55011 EN50082 1 EN61000 3 2 EN61000 3 3 FCC part 15 class B SAFETY Conforms with European Union Directive 73 23 EEC EN61010 1 GUAR...

Page 282: ...B StatusandErrorMessages...

Page 283: ...call memory lost Configuration memory lost Program syntax error Program currently running Illegal program name Cannot create program Expression error Hardware missing Data corrupt or stale Out of memo...

Page 284: ...character in number Numeric data error Header suffix out of range Undefined header Program mnemonic too long Header separator error Command header error Missing parameter Parameter not allowed GET not...

Page 285: ...ate of calibration not set Next date of calibration not set Calibration data invalid Measurement offset data invalid Measurement gain data invalid Not permitted with cal locked Not permitted with cal...

Page 286: ...rentheses Not a number of data handle Mismatched brackets Too many parentheses Entire expression not parsed Unknown token Error parsing mantissa Error parsing exponent Error parsing value Invalid data...

Page 287: ...are reserved by SCPI NOTE SCPI confirmed messages are described in Volume 2 Command Reference of the Standard Commands for Programmable Instruments Refer to the SYSTem ERRor command 962 963 965 966 K...

Page 288: ...C GeneralMeasurement Considerations...

Page 289: ...hley Ground loops Ground loops that occur in multiple instrument test setups can create error signals that cause erratic or erroneous measurements The configuration shown in Figure C 1 introduces erro...

Page 290: ...n the center conductor HI and its surrounding insulator resulting in triboelectric currents Triboelectric cur rents can be minimized as follows Use low noise cables These cables are specially designed...

Page 291: ...nents and connectors in the test system clean See Handling and Cleaning Test Fixtures in Section 2 for cleaning tips Light Some components such as semiconductor junctions and MOS capacitors on semicon...

Page 292: ...t circuit will generate a magnetic EMF volt age that is proportional to the strength of the field the loop area and the rate at which these factors are changing Magnetic fields can be minimized by fol...

Page 293: ...y attenuate the troublesome signal External filtering of the input signal path may be required In some cases a simple one pole filter may be sufficient In more difficult situations multiple notch or b...

Page 294: ...D DDCEmulationCommands...

Page 295: ...d to be used only over the IEEE 488 bus Using front panel controls in conjunction with this language may cause erratic operation In this case results cannot be guaranteed Table D 1 Device dependent co...

Page 296: ...ble EOI disable bus hold off on X Disable both EOI and bus hold off on X L1 store calibration command not supported Disable SRQ Reading overflow Buffer full Reading done Ready Error Suppression Rel di...

Page 297: ...V 200V 200uA 200G 20 C 200V 200V 2mA 200G 20 C 200V 200V 20mA 200G 20 C 200V Cancel Auto range for all functions Continuous triggered by talk One shot triggered by talk Continuous triggered by GET One...

Page 298: ...512 617 and 617 HIQ Also note that the YY response to the U0 command is different E For the Model 6514 the Buffer Full bit in the U2X status word does not get cleared until either the buffer is resize...

Page 299: ...E ExamplePrograms...

Page 300: ...ger before choosing the appro priate range Sending VOLTage RANGe 21 6 will set theVolts function to the 200V range The parameter 21 6 is rounded to 22 which exceeds the 20V range The following program...

Page 301: ...the TRIGger subsystem does not automatically arm the Model 6514 for triggers The following program sets up the Model 6514 to take one reading each time it receives an external trigger pulse For QuickB...

Page 302: ...es readings and waits for the Model 6514 to indicate that the buffer is full This is not a complete program The commands to configure the trigger model and the reading buffer see the next example are...

Page 303: ...following example program sets up the Model 6514 to take 20 readings as fast as it can into the buffer and then reads the data back after the buffer has filled Example program to demonstrate the readi...

Page 304: ...fault for both counters is one Therefore READ will trigger and return one reading 1 1 1 If for example you want to take 10 read ings you can set one of the counters to 10 while keeping the other count...

Page 305: ...ort parameters ComOpen COM2 19200 N 8 1 ASC CD0 CS0 DS0 LF OP0 RS TB8192 RB8192 OPEN ComOpen FOR RANDOM AS 1 Model 6514 setup commands Note Serial communications only operate with SCPI mode PRINT 1 RS...

Page 306: ...F IEEE 488BusOverview...

Page 307: ...ch listener is then referred to as an active listener Devices that do not need to listen are instructed to unlisten The reason for the unlisten instruc tion is to optimize the speed of bus information...

Page 308: ...o 15 devices including the controller Thus any number of talk ers and listeners up to that limit may be present on the bus at one time Although several devices may be commanded to listen simultaneousl...

Page 309: ...N AND CONTROL COMPUTER DEVICE 2 ABLE TO TALK AND LISTEN 2182 DEVICE 3 ONLY ABLE TO LISTEN PRINTER DEVICE 4 ONLY ABLE TO TALK DAV NRFD NDAC IFC ATN SRQ REN EOI DATA BUS DATA BYTE TRANSFER CONTROL GENER...

Page 310: ...DIO8 Data Input Output are the eight data lines used to transmit both data and multiline commands and are bi directional The data lines operate with low true logic Bus management lines The five bus ma...

Page 311: ...F 2 Once data is placed on the data lines the source checks to see that NRFD is high indicating that all active devices are ready At the same time NDAC should be low from the previous byte transfer If...

Page 312: ...re summarized in Table F 1 Table F 1 IEEE 488 bus command summary Command type Command State of ATN line Comments Uniline Multiline Universal Addressed Unaddressed Common SCPI REN Remote Enable EOI IF...

Page 313: ...rument to lock out the LOCAL key and all their front panel controls DCL Device Clear DCL is used to return instruments to some default state Instruments usually return to their power up conditions SPE...

Page 314: ...take a reading Although GET is an addressed command many devices respond to GET without addressing Address commands Addressed commands include two primary command groups and a secondary address group...

Page 315: ...e instrument model defined by the Standard Commands for Programmable Instruments SCPI Consortium s SCPI standard Generally these commands are sent as one or more ASCII characters that tell the device...

Page 316: ...sent Note that ATN is true for both the listen command and the SDC command byte itself Table F 4 gives a typical common command sequence In this instance ATN is true while the instrument is being addr...

Page 317: ...UNIVERSAL COMMAND GROUP ATN ATTENTION DCL DEVICE CLEAR IFC INTERFACE CLEAR REN REMOTE ENABLE SPD SERIAL POLL DISABLE SPE SERIAL POLL ENABLE ADDRESS COMMAND GROUP LISTEN TALK LAG LISTEN ADDRESS GROUP M...

Page 318: ...after the instrument has been addressed to talk L Listener Function The ability for the instrument to receive device dependent data over the bus from other devices is provided by the L function Liste...

Page 319: ...e Trigger Function DTI defines the ability of the Model 6514 to have readings triggered C Controller Function The instrument does not have controller capabilities C0 TE Extended Talker Function The in...

Page 320: ...G IEEE 488andSCPI ConformanceInformation...

Page 321: ...age Exchange Options Input buffer size Queries that return more than one response message unit Queries that generate a response when parsed Queries that generate a response when read Coupled commands...

Page 322: ...Operation complete messages Not applicable See Common Commands in Section 14 Not applicable Not applicable See Common Commands in Section 14 See Common Commands in Section 14 See Status Structure in S...

Page 323: ...RES NPLC n CHAR NPLC n VOLT NPLC n RES NPLC n CHAR NPLC n VOLT NPLC n CURR NPLC n CHAR NPLC n VOLT NPLC n CURR NPLC n RES NPLC n TRAC FEED CONT name TRAC FEED CONT name TRAC CLE CHAR RANG UPP n Acquir...

Page 324: ...H CalibrationOptions...

Page 325: ...t Model 5156 standard values send the following remote command to the Model 6514 CAL UNPR KI5156 The unit will return an ASCII string of floating point values in the following order 100G 10G 1G 100M 1...

Page 326: ...primary address 14 OPEN IEEE FOR OUTPUT AS 1 Open IEEE 488 output path OPEN IEEE FOR INPUT AS 2 Open IEEE 488 input path PRINT 1 INTERM CRLF Set input terminator PRINT 1 OUTTERM LF Set output terminat...

Page 327: ...he INPUT jack before sending each command cap for IOFF short for VOFF Table H 1 Calibration commands Command Description CALibration PROTected CODE code Eight character code password used to enable or...

Page 328: ...AL PROT SENS 0 CAL PROT SENS 2 CAL PROT SENS 2 NOTE Be sure the appropriate calibration signal is applied to the INPUT jack before send ing the command for each calibration point See Section 19 for de...

Page 329: ...14 Capacitor leakage current 4 14 Changing function and range E 2 Changing the calibration code 19 18 Charge calculations 18 7 Clearing registers and queues 13 4 Command F 10 Command codes F 10 Common...

Page 330: ...able 3 12 H Handshake lines F 6 High impedance measurement techniques 4 5 Humidity C 4 I Idle and initiate 9 4 IEEE command groups F 12 IEEE 488 and SCPI Conformance Information G 1 IEEE 488 Bus Overv...

Page 331: ...ptions 13 11 Relative 7 1 7 2 Relative mX b and Percent 7 1 Remote calibration H 4 Remote calibration overview H 4 Remote Operation 12 1 Resetting the calibration code 19 19 Restoring factory defaults...

Page 332: ...l configuration front panel 9 7 Trigger model operation 9 4 Trigger models 9 2 Triggering 9 1 Typical command sequences F 11 U Unaddress commands F 9 Units 6 4 V V Drop and I Source for ohms 3 6 Verif...

Page 333: ...e to zero Unstable Overload Will not read applied input Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measur...

Page 334: ...de Great Britain Theale 0118 929 7500 Fax 0118 929 7519 www keithley co uk India Bangalore 91 80 2212 8027 Fax 91 80 2212 8005 www keithley com Italy Milano 02 48 39 16 01 Fax 02 48 39 16 28 www keith...

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Keithley 6514, Instruction Manual

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