Oxford Instruments OpAL, Системное руководство

Страница: 45 / 342

Health and Safety Oxford Instruments Plasma Technology Plasmalab and Ionfab
Health and Safety
Printed:06 April 2010, 09:32
Page 1-17 of 24 Issue 18: April 2010
1.4.12.3 Take care when moving heavy components. Ensure that they remain stable to avoid any
ling
or decommissioning equipment.
risk of toppling. Use any support frames or stabilizers provided when moving, instal
WARNING
PINCH POINT - LIMBS, FINGERS ETC CAN BECOME TRAPPED RESULTING IN SEVERE
JURY.
Ensure that all personnel are kept clear of pinch points, e.g. chamber doors, hoist
mechanisms, v
ing.
IN
ariable height electrodes etc, while these components are mov
1.4.12.4 e the vicinity of the door and
its operating mechanism before it is closed to avoid trapped fingers etc.
1.4.12.5
, including eye protection, before maintaining small sprung items.
ty guards
particles can be ejected with considerable
1.4.12.8 d
.4.12.9 fitted with a safety mechanism to lock the
being performed inside the chamber.
1.4.13 General
.4.13.1 and Safety standards are studied and followed. It
a
that there are always at least two persons
sed as a
lied by manufacturers of proprietary components.
).
Close chamber doors carefully; ensure that personnel vacat
Handle sprung components under compression or tension carefully, Take suitable
precautions
1.4.12.6 Beware of machinery in motion such as robotic arms, substrate lifting mechanisms and
shutters. Remember that machinery can start suddenly. Ensure that all safe
are correctly fitted before use.
1.4.12.7 Beware of deposition layers under stress. Wear eye protection before cleaning surfaces
which are coated with layers of material, as
force.
Handle embrittled wire, e.g. filaments, carefully. They can break and become embedde
in the skin.
Some process chambers and loadlocks are 1
chamber in the open position. This mechanism may be integral to the gas spring design
or it may be a separate locking pin arrangement. Ensure that the locking mechanism is
engaged whenever the chamber is opened for any length of time, or if maintenance is
1.4.12.10 Wall mounted equipment, such as gas pods and LN
2
auto changeover boxes, should be
supported by bolts and frames that are rated to withstand four times the weight of the
item being supported.
1 Ensure that local and national Health
is the customer’s responsibility to carry out their own risk assessment and to develop
safe system of work.
1.4.13.2 Ensure that all personnel who operate this equipment are trained to use the equipment,
and are alerted to the range of hazards present.
When working with the equipment, ensure 1.4.13.3
present.
If a tool is used to access or alter any part of the equipment, this is clas 1.4.13.4
maintenance action. Persons performing maintenance tasks must be skilled and trained
to know and avoid the hazards present. Before carrying out any maintenance work, read
the relevant manuals supp
1.4.13.5 Ensure that the main electrical supply, compressed air, all other gases and the water
supply are disconnected before starting maintenance work (Also see sub-section 1.3.9
1.4.13.6 Consult Oxford Instruments Plasma Technology before making any alterations to the
system or changing the process gases.