Oxford Instruments OpAL, Системное руководство

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System Manual
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Recipes are ‘built’ using existing recipe steps, and edited as required.
Within a recipe, steps can be manipulated using the Step Commands pop-up menu
(accessed by clicking on the Recipe Steps field).
Fig 5-5: Step Commands pop-up menu
The Step Commands pop-up menu provides the following options:
Edit Step Enables the selected (highlighted) step to be edited.
Repeat Step Repeats all subsequent steps until a Loop Step is reached. This group of
steps can be repeated any number of times. (When you select this option,
you are prompted to enter the number of times the group of steps is to be
repeated.)
Loop Step Terminates a Repeat Step group.
Insert Step Creates a 'gap' above the selected step to allow another step to be dragged
into the list.
Delete Step
Deletes the selected step from the list.
Cancel
Closes the
Step Commands
pop-up menu.
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To build a recipe, use the following procedure:
1) In the Recipe panel, select the NEW button.
2) Click on a recipe step in the Step Library list, hold the left mouse button down then
drag the mouse pointer to the
Step Name
field next to the asterisk (
*
) then release
the mouse button. The step name is displayed in the Step Name field.
3) Repeat 2) as required to add further steps to the recipe. Note that once you have
filled the Step Name field, the recipe step list becomes scrollable, enabling you to
add a maximum total of 1000 steps.
4) To remove a step from the list, click on it to highlight it then select the
Delete step
button from the Step Commands pop-up menu. Any further steps will move up the
list by one place.
5) To add a step before an existing step, click on the existing step then select the Insert
step
button from
Step Commands
pop-up menu. The selected step and all those
Operating Instructions
Printed: 06 November 2007 09:42
Page 5-25 of 60 Generic (OpAL Plasma) Issue 1: Oct. 07