Oxford Instruments OpAL, Системное руководство

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System Manual
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The production mode facility is provided to make operation of the system as simple as
possible. In this mode, the user is provided with a ‘special’ Recipe page which allows the user
to load and run a recipe and then vent the system.
To carry out production mode processing, use the following steps:
1) Log on as a Manager.
2) Start the external rotary vane pump/dry pump.
3) Select the system menu, then select the Passwords option.
4) Log on using the appropriate user name and password for the production mode. The
Production mode page is displayed. See sub-section 5.10.6, page 5-45.
5) Open the process chamber and place the wafer to be processed on the table.
6) Select the
Load
button, then select the required recipe from the displayed list and
select OK .
7) Enter a batch identity.
8) Select the Run button. Note that this button only becomes active when a recipe has
been loaded and a batch identity has been entered, and the associated indicators
are coloured green. The system will automatically pump down and the recipe will
run.
9) When the ‘Process Complete’ message is displayed, select the Vent button to vent
the system. Note that a Vent Time Remaining counter indicates venting progress.
10) Open the process chamber and remove the processed wafer.
11) You can now carry out a further process by repeating steps 5) to 10). If running the
same recipe Step 5 can be skipped, otherwise load another recipe.
12) On completion of production mode processing, log on as a Manager.
Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07 Page 5-22 of 60
Printed: 06 November 2007 09:42