Oxford Instruments OpAL, Системное руководство

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System Manual
Oxford Instruments Plasma Technology OIPT Systems
2. Cooling / Warming water
There are two acceptable methods of applying cooling / warming water to an OIPT
system:
Recirculation: Water is pumped through the system by a dedicated *heater / chiller or
heat exchanger. After passing through the system, the temperature of
the water is adjusted before recirculating through the system.
*Many customers have a water recirculation facility shared by several
systems. This shared facility seldom provides water of suitable quality,
and so cannot usually be used for cooling any part of the OIPT system
without the use of a heat exchanger dedicated to the OIPT system.
Total Loss
Cooling:
Municipal (drinking quality) water is applied to the system from a mains
supply, passed through the system to cool it, then fed to a drain for
disposal.
Water failing to meet the recirculation or total loss cooling specifications must not be put
into the system without close consultation with OIPT.
In some circumstances, it may be appropriate to use a combination of recirculation
cooling and total loss cooling in one system.
It is recommended that the customer uses a dedicated heater/chiller either for the whole
system, or at least for the critical components. Note that chillers, which cool only, can
give problems with condensation on chamber components in some environments. This is
a particularly important consideration for production systems of the batch-load type. In
severe cases, they can produce sufficient condensation to damage components such as
RF power supplies, ferrofluidic seals and automatch units. Any damage so caused cannot
be covered by the system warranty.
Note that if a heater-chiller is used to provide warm water (above 30o C) for heated parts
of the system, then items such as the turbo pump will need an independent water supply.
Items such as turbomolecular pumps can be cooled with total loss cooling if they are of
stainless steel construction and if the water is suitable. If the water is not suitable, then a
heat exchanger may be necessary.
Total loss cooling cannot be used on any components that have aluminium in direct
contact with the coolant. See sub-section 2.1.
Services Specifications
Printed: 6-Jan-10, 8:53
Page 5 of 22 Issue 21: January 10