Oxford Instruments OpAL, Системное руководство

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OIPT Systems Oxford Instruments Plasma Technology
System Manual
8. Extraction
The following mandatory requirements describe the extraction systems recommended
by OIPT. While these recommendations may be regarded as “good practice”, they are not
a complete definition of the safety standards required when handling toxic, corrosive or
otherwise hazardous gases. It is the customer’s responsibility to ensure that the
installation meets all relevant local safety regulations and OIPT accepts no responsibility
in this respect.
For detailed information about the safety aspects of gas handling and pumping systems,
the customer should consult the relevant manufacturer/supplier of the gases and pumps
to be used.
8.1 Mandatory requirements for Rotary Pump extraction
The installation must provide a rotary pump exhaust extraction system which matches
the rotary pump exhaust and which conforms to local safety standards.
In particular, all fittings and pipework connected to the rotary pump exhaust must be
made from industry standard stainless steel in accordance with local safety regulations.
Specialised equipment such as scrubbers and furnaces may be needed to dispose of
hazardous gases. The routing of the pump exhaust line must be arranged so that
condensates cannot flow back into the pump.
Note that there is a risk of damage from cross-contamination if rotary pumps share one
exhaust system. This applies whether the pumps are on the same system or on different
systems. Damage caused by any cross-contamination is not covered by the system
warranty.
Care must be taken to route mutually incompatible exhaust gases through separate
exhaust ducts. In particular, oxygen enriched exhaust gases should not be mixed with
exhausts from mineral oil pumps, otherwise, an explosion may occur.
8.2 Mandatory requirements for Gas Pod extraction
The gas pod must be connected to the customer's gas extraction system via a 100 mm
diameter pipe collar to provide cabinet extraction with a minimum flow rate of 1
m
3
/hour (6-line gas pod) or 3 m
3
/hour (12-line gas pod), i.e. an extraction vacuum of
approximately 500 Pa relative to local atmospheric pressure is required. It is the
customer’s responsibility to ensure that the gas extraction system, including any
necessary gas sensors, meets local safety regulations.
Services Specifications
Issue 21: January 10 Page 18 of 22
Printed: 6-Jan-10, 8:53