Oxford Instruments OpAL, Системное руководство

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System Manual
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Recommendations for the OpAL system
Day-to-day operation
• It is strongly recommended that the tools are left switched on and pumping continuously (i.e. do
not switch off system or pumps). This ensures the maximum lifetime for system and pumps and
optimum process repeatability.
• Datalogging of each run is strongly recommended to allow the system to maintain full records of
all process runs. Items to monitor regularly via datalogs are as follows:
‰
Gas flow during process - if this is different from original/earlier data it indicates MFC and/or
pumping problems.
‰
RF reflected power during process - indicates matching or striking problems.
‰
RF Automatch capacitor positions (if available) – for checking reliability of RF matching.
Weekly checks
• Leak-up rate – gate valve closed, measure rate of pressure rise: should be <1mTorr/minute.
• Partial pressure checks - measure pressure versus flow for all MFCs individually: see relevant
calibration graph. This will identify problems with MFCs or pumping.
• Fill rates (if possible), i.e. measure rate of pressure rise with APC closed (can be performed using
leak check software, if present), for each gas at a range of flow rates, and in particular at the
flow rates of the processes in use. This may not be possible for very high flow rates and is not
recommended for flammable or pyrophoric gases. This will identify problems with MFCs or gate
valve seals.
•
Pumpdown times from vent to base pressure e.g. 10mTorr. For example, this would be typically
18 to 20 seconds for a rotary system. This will identify problems with pumping performance.
Process Information (Information contained in this document is confidential)
Printed: 08 October 2007 11:00
Page 5 of 14 Issue 1: August 07