Oxford Instruments OpAL, Системное руководство

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System Manual
Oxford Instruments Plasma Technology OpAL
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.6.3 Filters
6.6.3.1 Annually (or as necessary)
The process gas filter elements will need replacing at a frequency that depends on both
the nature and purity of the process gases, and of other materials that come into contact
with them. The filters could need changing more or less often than annually.
1) Make sure line has been thoroughly purged before removal.
2) Unscrew union nut and remove assembly.
3) Tap filter element lightly on side with a fibre mallet to loosen and remove
element.
4) Fit new element.
5) Re-assemble.
6.6.4 Precursor cabinet and delivery system
6.6.4.1 Monthly
Leak check the precursor delivery line, as described in Appendix PSP.
6.6.4.2 Annually
The ALD valves must be cleaned once a year.
1) Shut down the system for service.
2) Turn off the manual valves on all precursor pots. The manual valves are
identified in section 3 of this manual.
3) Pump out and purge the delivery line to remove all residual precursor material.
This is described in Appendix PSP.
4) Perform a risk assessment for the relevant precursor materials and wear
appropriate personal protective equipment.
5) Remove the fast ALD valve from the outlet line on each bubbler. These valves are
identified as D1, D2, D3 and D4 in Fig 6-1.
Maintenance
Printed: 14-Jul-10, 8:14
Page 6-9 of 16 Issue 4: July 10