Oxford Instruments OpAL, Системное руководство

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OIPT Systems Oxford Instruments Plasma Technology
System Manual
9. Environment
9.1 Statement of intended use
This equipment is intended to be used by skilled and trained personnel for processing
materials within a controlled access environment.
9.2 Mandatory Specifications for the system environment
Rated for use in a Pollution Degree 1 Installation Category environment (laboratory or
clean industrial environment).
•
Operating temperature: 5°C to 25°C.
•
Storage temperature: 0°C to 40°C.
•
Maximum humidity: 90% See NOTE 1.
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Minimum humidity: 10% See NOTE 2.
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Electrostatic build-up: Low static environment. See NOTE 2.
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Ambient light level: 300 lux minimum.
NOTE 1: High humidity will have a progressively significant effect on system
performance. At humidity greater than 50%, the rate of chamber pump-
down after venting the chamber will be affected significantly, and at
humidity greater than 65%, the rate of chamber pump-down may not meet
system specifications.
NOTE 2: Low humidity will introduce a risk of electrostatic build-up, with subsequent
discharge to the system producing a malfunction or damage. The systems
are tested to EN60801-2, severity level 3. We recommend the use of an
environment, which protects against electrostatic build-up, and extra
precautions will be necessary at low humidity.
Services Specifications
Issue 21: January 10 Page 20 of 22
Printed: 6-Jan-10, 8:53