Oxford Instruments OpAL, Системное руководство

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System Manual
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Recipe steps are stored in the Step Library list. The list can contain any number of steps,
depending on available hard disk space. When the displayed list is full, it becomes scrollable
to allow you to view all of the list contents.
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To create a new recipe step, use the following procedure:
1) In the Step Library panel, select the NEW button. The Step Edit page is displayed.
2) Enter the step parameters as required, then click on
OK
. The step is automatically
saved.
To create a recipe step, based on an existing recipe step, use the following procedure:
1) Select a recipe step from the
Step Library
list, i.e. click on it to highlight it.
2) Select the COPY button. Enter a new step name.
3) Edit the step parameters as required, then click on OK . The new recipe is
automatically saved.
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To edit an existing recipe, use the following procedure:
1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.
2) In the Step Library panel, click on the
Edit
button.
3) Edit the step’s process parameters as required, then click on OK . The step is
automatically saved.
NOTE: Changing an existing recipe step will not alter saved recipes which use the
old version of that step.
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To delete a recipe step, use the following procedure;
1) Select the recipe step from the Step Library list, i.e. click on it to highlight it.
2) Select the DELETE button; the selected recipe step is deleted.
Operating Instructions
Generic (OpAL Plasma) Issue 1: Oct. 07 Page 5-24 of 60
Printed: 06 November 2007 09:42