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Infinium LiHa and Infinium RoMa Operating Manual - Document # 1000000110155 v00
3 - Technical Data
System Modules
LiHa Precision
Equidistant Tip
Movement
The equidistant movement of sampling tips in Y direction is:
from 9 mm ± 0.4 mm
to 38 mm ± 1 mm
Tab. 3-8
LiHa positioning accuracy at 9 mm spacing, with all 8 tips simultaneously
Axis
Accuracy
X
±0.4 mm (0.016 in.)
Y
±0.4 mm (0.016 in.)
Z
±0.4 mm (0.016 in.)
a)
a) Worn parts may result in deterioration of accuracy
Tab. 3-9
LiHa repeatability at 9 mm spacing, with all 8 tips simultaneously
Axis
Repeatability
X
±0.15 mm (0.006 in.)
Y
±0.15 mm (0.006 in.)
Z
±0.3 mm (0.012 in.)
a)
a) Worn parts may result in deterioration of repeatability