Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 154 Issue 1-h
7
SAFETY
FUNCTIONS
Referre
d
Section
5.2.5 3.11
Coun
ter
m
ea
sures
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
Ove
rha
ul
is
neede
d.
Contac
t Serv
ic
e offic
e.
1.
Send
a
co
m
m
unication
comm
and
pe
riodically
at
int
erv
als
of
le
ss
th
an
se
tti
ng
v
al
ue
.
2.
Che
ck
the
co
mmuni
cation
cabl
e.
3.
Conta
ct
Servi
ce
office.
Contac
t Serv
ic
e offic
e.
1.
Con
ne
ct
the
electroma
gne
tic
cooli
ng
water
val
ve
corr
ectl
y.
Che
ck
the
vol
ume
of
wate
r
and
water
te
m
perature.
2.
Conta
ct
Servi
ce
office.
Probable
ca
uses
Failure
of
the
control
unit.
Failure
of
the
control
unit.
Freq
uen
cy
of
"Distu
rba
nce"
or
"Power
F
ailure"
erro
r.
1.
Ins
uffic
ient
user
appli
cation
se
tting.
2.
Disco
nne
ctio
n
or
brea
k
of
the
comm
uni
cation
cabl
e.
3.
Failure
of
the
control
unit.
Failure
of
the
control
unit.
1.
Cooli
ng
failure
of
TMS
unit.
2.
Failure
of
TMS
unit.
Occurr
enc
e
condition
Powe
r
su
ppl
y
ci
rcu
it
fa
ilu
re
in
control
unit
Failure
of
RAM
che
ck
in
MP
U
Dama
ge
poi
nt
excee
s
setting
valu
e
Comm
uni
cati
on
failure
of
the
input
operation
po
rt
durin
g
accele
ration
and
norm
al
ope
ra
tion
Abnorm
al
rot
atinal
spe
ed
dete
cti
on
TMS
tempera
ture
control
erro
r
(wh
en
the
TM
S
unit
detectio
n
temperature become
s
hig
her
than
the
setti
ng
valu
e
by
10°
C
(+1
8
ºF)
or
m
ore.
Pump
ope
ration
Dec
elerate
and
stop Dec
elerate
and
stop Dec
elerate
and
stop Dec
elerate
and
stop Dec
elerate
and
stop Dec
elerate
and
stop
(Error
mess
age)
Powe
r
Suppl
y
Fail Ram
Er
ror
Secon
d
Da
m
age
Limit Serial
Com.
Fail
Speed
Pulse
Lost
TMS
Highe
r
Temp
"FAILU
RE"
LED
St
ea
dy
r
ed
Table
50
-
Error
List
(co
ntin
ued)