
STP-iXA2205 Series Turbomolecular Pump
Nov. 10
ii
Issue 1-h
PAGE
ii
CONTENTS (CONTINUED)
Section
Title
Page
3.8
Cable connection
50
3.8.1
DC cable
50
3.8.2
Power cable
51
3.8.3
How to connect the cables
53
3.9
Precautions of vacuum piping
55
3.9.1
Vacuum piping method
55
3.10
Connecting the purge port
56
3.11
Connecting the water cooling pipe
57
3.12
Attaching a baking heater
58
3.13
Installation of the TMS unit
59
3.13.1
Configuration of the STP pump with the TMS
59
3.13.2
TMS heater
61
3.13.3
TMS valve
61
3.13.4
Installation of the TMS unit
61
3.13.5
Connecting the TMS heater cable
61
3.13.6
Connecting the pump and TMS valve
62
3.13.7
TMS unit specification
62
3.14
Connecting to semiconductor equipment
63
3.14.1
Connecting to power
63
3.14.2
Emergency off circuit (EMO circuit)
63
4
OPERATION
65
4.1
Gas pumping, cooling and baking the STP pump
65
4.1.1
Gas pumping
65
4.1.2
How to introduce a purge gas
66
4.2
Cooling the STP pump
66
4.2.1
Water-cooling method
66
4.3
Baking the STP pump
67
4.4
Before starting the STP pump
68
4.4.1
Confirmation before starting
68
4.4.2
Confirmation of vacuum system
68
4.5
Powering ON
69
4.6
Pump operation
69
4.6.1
Input operation port setting
69
4.6.2
Starting/stopping the STP pump
70
4.7
How to start/stop the STP pump
72
4.7.1
Starting the STP pump after stopping
72
4.7.2
Starting the STP pump after a safety function operates
72
4.7.3
Powering OFF
72
4.8
LED
73
4.9
Parallel port input/output signal
74
4.9.1
Input signal pins
74
4.9.2
Input operation port setting
81
4.9.3
Rotation INHIBIT signal
82
4.9.4
OUTPUT SIGNAL PINS
83
4.10
Operating the TMS unit (for use with the TMS unit)
87
4.10.1
Before starting
87
4.10.2
Starting/Stopping
87
4.10.3
Setting the TMS unit function
87
Содержание STP Series
Страница 22: ...STP iXA2205 Series Turbomolecular Pump Nov 10 12 Issue 1 h INTRODUCTION 1 This page intentionally blank ...
Страница 74: ...STP iXA2205 Series Turbomolecular Pump Nov 10 64 Issue 1 h INSTALLATION 3 This page intentionally blank ...
Страница 95: ...STP iXA2205 Series Turbomolecular Pump Nov 10 85 Issue 1 h 4 OPERATION Figure 55 X2 REMOTE output signal pins ...
Страница 98: ...STP iXA2205 Series Turbomolecular Pump Nov 10 88 Issue 1 h 4 OPERATION This page intentionally blank ...
Страница 172: ...STP iXA2205 Series Turbomolecular Pump Nov 10 162 Issue 1 h MAINTENANCE AND INSPECTION 8 This page intentionally blank ...