Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 9 Issue 1-h
INTRODUCTI
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N
1
1. Oil free
Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP
pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
2. Low vibration
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
3. High reliability
There is no periodic replacement of magnetic bearings unlike conventional turbomolecular pumps
using ball bearings because there is no friction. Taking into consideration a breakage of magnetic
bearings, touch down bearings (7) have been installed. They do not contact with the rotor during the
rated operation. The status of the rotor and magnetic bearing is continuously monitored via circuits
detecting rotor displacement, rotational speed and pump temperature. If an abnormality/error occurs,
the rotor will stop.
4. Compact size (Integrated control unit)
To save space for installation, the STP pump mounts the control unit (8) that includes the following
circuits; the magnetic bearing control circuit, the motor drive circuit which drives rotor blade, the
supervisor circuit which monitors pump operation status and operates the pump in remote operation
mode. The STP-iXA2205 series has the integrated power unit type which mounts the power unit iPS-
1200. The power unit iPS-1200 converts the alternating input to direct current output for the STP
pump operation.
Model name: STP-iXA2205CP(V), STP-iXA2205CIP
5. Temperature management system
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature using a thermistor in the base of the turbomolecular pump, and
performing the TMS valve and TMS heater ON/OFF control in order to maintain a constant
temperature of the STP pump.
Model name: STP-iXA2205CV, STP-iXA2205CPV
6. Dust and water protection (IP 54 Sealed)
The STP pump sealed to IP54 standard protected against dust and water to ensure reliable
performance in rough conditions.
Model name: STP-iXA2205CIP
IP54 IP: International Protection Code (refer to IEC60529-2001)
Protection against dust:
5: Dust penetration is not prevented altogether, but dust must not enter in sufficient
quantities to prevent the equipment from operating satisfactorily, or to impair safety.
Protection against water:
4: Water splashes on to the enclosure from any direction must not have any harmful effects.