Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 159 Issue 1-h
MAINTENANCE
AND
IN
SPECTI
ON
8
8.4 Overhaul
Deterioration or abrasion of the internal parts of the STP pump will cause a failure.
The recommended maintenance intervals for different process applications are tabulated below:
Process Period Remarks
Metal Etch Process
(deposition) 1 year Processes resulting in large amount of deposits in
the pump will require more frequent service.
Other Etch Processes 2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Etc
hing
*1
It is recommended to change the pump rotor after 5 years due to accumulated wear of the
protective plating material
Other semiconductor process 2 years Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Clean applications
(Only vacuum pumping) 5 years No gases used. (Only vacuum pumping)
Other use 2 years Dependent on application, contact Edwards.
*1
"Etching" includes semiconductor etching and LCD etching.
Note: The rotor blade and the touch down bearing inside the STP pump will be worn out and lose
their function by continual operation. When the display unit iDT-001 (optional accessory)
displays "w" or "Warning", it is essential to have the touch down bearings replaced.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at
the customers charge.
When overhaul of the STP pump is needed, contact Service office.