Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 26 Issue 1-h
INSTALLATION
3
3.1.3 Bench
A bench must be prepared by the customer to secure the STP pump. The shape and size of the
bench differ depending upon the type of STP pump.
WARNING
Obey the safety instructions given below and take note of appropriate precautions.
If you do not, you can cause injury to people and damage to equipment.
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
WARNING
Design and secure the bench for the STP pump so that it can withstand the
maximum torque generated due to the occurrence of an abnormality/error. Refer to
Section 3.4.3, "Secure the STP pump" for abnormal torque.
CAUTION
Secure the customer-prepared bench and the vacuum equipment on the floor or peripheral
equipment and other equipment in accordance with the customer application. NEVER move them
while the STP pump is in operation.
Confirm the dimensions by the external appearance of the STP pump when designing the bench.
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of
the inlet port flange.
Note: When the external appearance of the STP pump is not in the manual, contact Edwards.
3.1.4 Insulation test
CAUTION
The varistor for the power supply line protection is installed in the power unit. DO NOT perform the
insulation test with the varistor installed. Doing so may result in product damage to the power unit.
DO NOT perform an insulation test on the power unit. When performing the insulation test on your
equipment, ensure that you disconnect the power unit from the equipment that is to be insulation
tested, so that the test voltage is not applied to the power unit.