Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 24 Issue 1-h
INSTALLATION
3
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature 0 to 40 °C (32 to 104 °F)
Ambient relative humidity 30 to 95% (no dew condensing)
Environment
x
An area free of externally applied mechanical shock.
x
A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
x
A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G)
in the radial direction with respect to the rotational axis
of the STP pump).
x
A place free of a strong electric field.
x
A place free of exposure to radiation.
x
No discharge of high voltage (more than 500 V) (If more
than 500 V is discharged, contact Edwards).
x
Others: An area free of exposure to direct sunlight, high
humidity, dust, salty air, dripping water, explosive or
flammable gas, corrosive gas, excessive vibration and
sources of electric noise.
STP pump installation
equipment conditions Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
* STP-iXA2205CIP complies with Protection Classification IP54 sealed. This model has protection against dust and water
splashed from any direction. Refer to IEC60529-2001 for details.
Table 1 - Environmental requirements for installation