Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 82 Issue 1-h
4
OPERATION
4.9.3 Rotation INHIBIT signal
When using rotation INHIBIT signal, short-circuit the "INHIBIT ENABLE IN" signal. Relations between
rotation INHIBIT signal input and pump operation state are shown in Table 23.
Signal input Pump operation
After short-circuit of rotation INHIBIT input
signal (A), the START operation is
performed (B).
INHIBIT IN
Open 㩷
Close
START operation
ŏ
The pump accelerates when the START
operation is performed (B).
After the START operation (A), the rotation
INHIBIT input signal is short-circuited (B).
INHIBIT IN
Open 㩷
Close
START operation
ŏ
The pump does not accelerate when the
START operation is performed (A).
ŏ
The pump accelerates when the rotation
INHIBIT input signal is short-circuited (B).
The rotation INHIBIT input signal is opened
(A) during acceleration or normal
operation.
INHIBIT IN
Open
㩷
Close
START operation
< MANUAL/REMOTE operation mode >
ŏ
The pump decelerates and stops when the
rotation INHIBIT input signal is opened (A).
ŏ
After the operation (A), the pump continues
deceleration and stops even by
short-circuiting the rotation INHIBIT input
signal (B). However, when the START signal
is input, the pump will accelerate.
Table 23 - Rotation INHIBIT signal input
A B
A B
A B