Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 153 Issue 1-h
7
SAFETY
FUNCTIONS
Referre
d
Section
7.1.1 3.8.2 3.8.2 3.8.1 3.5
Coun
ter
m
ea
sures
Contac
t Serv
ic
e offic
e.
Contac
t Serv
ic
e offic
e.
1.
Che
ck
wh
eth
er
or
not
a
power
failu
re
has
oc
curre
d.
2.
Con
ne
ct
the
power
cable
cor
re
ct
ly
.
3.
Repl
ace
the
power
cable.
4.
Set
the
rated
voltag
e
±
10
%.
1.
Remo
ve
obst
acle
s
w
hic
h
interrupt
air
flow
aroun
d
the
power
unit.
Check
the
volum
e
of
wa
ter
and
water
temperature
with
wate
r
cooli
ng
unit.
In
orde
r
to
recover,
turn
off
the
power
(switch
"O
FF"
the
brea
ke
r
),
an
d
then
switch
"ON"
the
bre
ake
r
after
sufficie
nt
cool
ing
of
the
power
unit
(isol
ate
input
power
suppl
y
3
minutes
or
more
)
2.
Conta
ct
Servi
ce
office.
3.
Conta
ct
Servi
ce
office.
Probable
ca
uses
Disco
nne
ctio
n
of
the
motor
temperature
sen
so
r.
Failure
of
the
control
unit.
1.
Powe
r
failure.
2.
Incorre
ct
co
nnectio
n
of
the
power
cable.
3.
Failure
of
the
power
cable.
4.
Failure
of
the
power
su
pply
vlotag
e.
1.
Insufficie
nt
co
oling
of
the
power
unit.
2.
Failure
of
the
air-co
oling
fan
in
the
po
wer
unit
3.
Failure
of
the
power
unit.
Occurr
enc
e
condition
Abnorm
al
mo
tor
temperature detectio
n
Rotaio
nal
spe
ed
ex
cee
ds
ra
te
d
spe
ed
Ins
uffic
ient
power
sup
ply
Ove
rhe
at
insi
de
the
power
uni
t.
Pump
ope
ration
Dec
elerate
and
stop Dec
elerate
and
stop Dec
elerate
and
stop
(Error
mess
age)
M_Temp
Lost
Ove
rspee
d
1,
2,
3,
4
Power
Failure
"FAILU
RE"
LED
S
teady
red
Table
49
-
Error
List
(co
ntin
ued
)