Edwards STP Series, Инструкция по эксплуатации

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STP-iXA2205 Series Turbomolecular Pump
Nov. 10 v Issue 1-h
PAGE
v
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Tip over caution label 6
4 Heavy product caution label 6
5 High voltage device caution label 6
6 Water caution label 7
7 Rotation instruction label 7
8 Cross sectional view of the STP pump 8
9 External appearance of STP-iXA2205C(V):
VG250/ISO250F/ICF305
17
10 External appearance of STP-iXA2205CP(V):
VG250/ISO250F/ICF305
18
11 External appearance of STP-iXA2205CIP:
VG250/ISO250F/ICF305
19
12 External appearance of power unit iPS-1200 20
13 Label affixing positions 21
14 Space around the STP pump 25
15 Example of lifting the STP pump 27
16 Example of lifting the STP pump (horizontal positioning) 28
17 Jack-up the STP pump 29
18 Control unit bottom face 29
19 Prohibited matter 30
20 STP pump with dedicated legs 30
21 STP pump with eyebolts 31
22 Configuration of the STP pump 32
23 Control unit (Front panel) 33
24 Power unit (connector panel) 35
25 Power unit (front panel) 36
26 Installation of the STP pump to the vacuum equipment
(STP-iXA2205C[V])
37
27 Installation of the STP pump to the vacuum equipment
(STP-iXA2205CP[V]/CIP)
38
28 STP pump installation positions 40
29 Positions of the outlet port on the horizontally
or slanted installed STP pump
40
30 Shape of reduced diameter shank bolts 44
31 Methods of securing the STP pump 44
32 Shape of reduced diameter shank bolts 45
33 Screw holes for securing the base (STP-iXA2205C[V]) 46
34 Screw holes for legs (STP-iXA2205CP[V]/CIP) 46
35 Fixed screw hole potion for the power unit 47
36 DC cable 48
37 External appearance of DC cable (STP-iXA2205C[V]) 50
38 External appearance of DC cable (STP-iXA2205CP[V]/CIP) 50
39 Power cable 51
40 Connecting method of the power cable 52
41 Connecting the purge port 56
42 Positions of the cooling water port 57
43 Baking heater installation position 58
44 Configuration of the TMS (STP-iXA2205CV) 59