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STP-iXA2205 Series Turbomolecular Pump
Nov. 10
14
Issue 1-h
TECHNICAL
DATA
PAG
E
14
2
2.2
Maximum gas flow-rate
Cooling water
Gas
STP-iXA2205C
STP-iXA2205CP
STP-iXA2205CIP
STP-iXA2205CV
STP-iXA2205CPV
N
2
Pa·m
3
/s
(SCCM)
3.72
(2200)
2.70
(1600)
15 to 25 ºC
Ar
Pa·m
3
/s
(SCCM)
2.36
(1400)
1.18
(700)
N
2
Pa·m
3
/s
(SCCM)
3.38
(2000)
2.70
(1600)
26 to 35 ºC
Ar
Pa·m
3
/s
(SCCM)
1.86
(1100)
1.18
(700)
TMS (setting value)
N/A
70 ºC
Purge gas flow rate <N
2
>
Pa·m
3
/s
(SCCM)
8.4×10
-2
(50)
*1
The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the backing-pump
(pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted
intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
*2
When not using water-cooling system, a small amount of gas can be vacuumed, however, it is subject to effects of ambient
temperature and environment. Contact Edwards for details.
2.3
Water cooling use condition
Use cooling water which fulfills the following conditions.
Item
Specification
Port type
Rc 1/4 (Female)
Flow rate
L/min
3
Water temperature
°C
15 to 35
*1
Water pressure
MPa (kgf/cm
2
)
0.3 (3)
Maximum grain size
mm
2
0.03
pH
6.5 to 8.0
Water hardness
mg/L
100
Resistivity
k
ȍ
䍃
cm
4 to 1000
Turbidity
FNU
< 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)
Содержание STP Series
Страница 22: ...STP iXA2205 Series Turbomolecular Pump Nov 10 12 Issue 1 h INTRODUCTION 1 This page intentionally blank ...
Страница 74: ...STP iXA2205 Series Turbomolecular Pump Nov 10 64 Issue 1 h INSTALLATION 3 This page intentionally blank ...
Страница 95: ...STP iXA2205 Series Turbomolecular Pump Nov 10 85 Issue 1 h 4 OPERATION Figure 55 X2 REMOTE output signal pins ...
Страница 98: ...STP iXA2205 Series Turbomolecular Pump Nov 10 88 Issue 1 h 4 OPERATION This page intentionally blank ...
Страница 172: ...STP iXA2205 Series Turbomolecular Pump Nov 10 162 Issue 1 h MAINTENANCE AND INSPECTION 8 This page intentionally blank ...