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STP-iXA2205 Series Turbomolecular Pump

Nov. 10

111

Issue 1-h

SERIAL

COMMUNICATION

PROTOCOL

Error message

Value

Error message

Value

[System reservation]

Aberrant Brake

[System reservation]

Aberrant Accel

[System reservation]

Overspeed 4

Inordint Current

[System reservation]

FAN Trouble

CNT Overheat 3

Serial Com. Fail

Table 35 - Error message values (continued)

*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to

operate after one of these messages is displayed. It is recommended that an application be designed with this in

consideration.

Содержание STP Series

Страница 1: ...ed in Japan Read through the Safety Precautions and each section of this Manual carefully before using the STP pump Keep this Manual in a place where you can quickly access it at any time Nov 2010 Instruction Manual STP Series Turbomolecular Pumps STP iXA2205 Series Issue 1 h ...

Страница 2: ...7 Electromagnetic compatibility EMC Generic standards Emission standard for industrial environments EN55011 2007 A2 2007 Industrial scientific and medical ISM radio frequency equipment Electromagnetic disturbance characteristics Group1 Class A and fulfils all the relevant provisions of 2006 42 EC Machinery Directive 2006 95 EC Low Voltage Directive 2004 108 EC Electromagnetic Compatibility EMC Dir...

Страница 3: ... 5 Power unit 16 2 6 External appearance of the STP pump 17 2 7 External appearance of the power unit 20 2 8 Label affixing positions 21 3 INSTALLATION OF THE STP PUMP 23 3 1 Precautions before installation 23 3 1 1 Operating environment 23 3 1 2 Installation area 25 3 1 3 Bench 26 3 1 4 Insulation test 26 3 2 Unpacking 27 3 2 1 Unpacking the STP pump 27 3 3 Name and function of each part 32 3 3 1...

Страница 4: ...f circuit EMO circuit 63 4 OPERATION 65 4 1 Gas pumping cooling and baking the STP pump 65 4 1 1 Gas pumping 65 4 1 2 How to introduce a purge gas 66 4 2 Cooling the STP pump 66 4 2 1 Water cooling method 66 4 3 Baking the STP pump 67 4 4 Before starting the STP pump 68 4 4 1 Confirmation before starting 68 4 4 2 Confirmation of vacuum system 68 4 5 Powering ON 69 4 6 Pump operation 69 4 6 1 Input...

Страница 5: ...ol checksum 101 5 3 7 Error control 101 5 3 8 Transmission frame in the RS485 multi point connection 101 5 3 9 Control command in the RS485 multi point connection 103 5 3 10 Query command in the RS485 multi point connection 104 5 3 11 Broadcasting command in the RS485 multi point connection 105 5 4 Command specifications 106 5 4 1 Command list 106 5 4 2 ReadMeas 107 5 4 3 Command 107 5 4 4 ReadFai...

Страница 6: ...ts of WARNING function 145 7 3 1 First Damage limit 145 7 3 2 Second Damage Limit 145 7 3 3 Pump run time over 145 7 3 4 Pump Overload 146 7 3 5 Imbalance 146 7 4 WARNING function setting 147 7 5 Troubleshooting immediately after failure occurs 148 7 5 1 After power failure 148 7 5 2 After other abnormality error 148 7 6 Troubleshooting 149 7 6 1 Indication of FAILURE LED red 149 7 6 2 Indication ...

Страница 7: ...ated legs 30 21 STP pump with eyebolts 31 22 Configuration of the STP pump 32 23 Control unit Front panel 33 24 Power unit connector panel 35 25 Power unit front panel 36 26 Installation of the STP pump to the vacuum equipment STP iXA2205C V 37 27 Installation of the STP pump to the vacuum equipment STP iXA2205CP V CIP 38 28 STP pump installation positions 40 29 Positions of the outlet port on the...

Страница 8: ...peration method 1 voltage input 71 50 Pump operation method 2 voltage input 71 51 ROTATION LED Indication 73 52 X2 REMOTE connector 74 53 X2 REMOTE input signal pins contact input 77 54 X2 REMOTE input signal pins voltage input 80 55 X2 REMOTE output signal pins 85 56 Serial port 89 57 X3 X4 connector D Sub9 91 58 RS485 connections 92 59 PC to SIM communication 96 60 Display unit iDT 001 138 61 WA...

Страница 9: ...OTE input signal pins 75 19 X2 REMOTE input signal pins continued 76 20 X2 REMOTE input signal pins voltage input 78 21 X2 REMOTE input signal pins voltage input continued 79 22 Input operation port setting 81 23 Rotation INHIBIT signal input 82 24 X2 REMOTE output signal pins 84 25 Rated contacts for relays CR1 to CR8 86 26 X3 X4 pin position 90 27 Communication parameters 93 28 Input operation p...

Страница 10: ...ssue 1 h PAGE viii TABLES CONTINUED Table Title Page 47 Error List continued 151 48 Error List continued 152 49 Error List continued 153 50 Error List continued 154 51 Error List continued 155 52 Troubleshooting with no indication of the FAILURE LED 156 ...

Страница 11: ...uld result minor personal injury in damage to the equipment associated equipment and or process Note Items you must follow during operation and maintenance Throughout this manual page figure and table numbers are sequential The units used throughout this manual conform to the SI international system of units of measurement US equivalent units of measurement are also given The following IEC warning...

Страница 12: ...1 STP iXA2205CIP only x SEMI S2 0706 1 3 Limited warranty This WARRANTY applies to the customer to whom Edwards has delivered this product 1 3 1 Warranty period Edwards warrants this product against defects for a period of two 2 years from the date of delivery or during the period specified in the agreement made by and between the customer and Edwards 1 3 2 Item warranted 1 This warranty applies o...

Страница 13: ... product 7 Defect resulting from deposit 8 Water cooling system defect resulting from water quality used 9 Defect resulting from the installation of the product exclude the installation by authorized personnel 10 Deterioration in the external because of use discoloration scratches and so forth 11 Product damage occurred during transport or other factors not attributable to Edwards 12 Product break...

Страница 14: ...n from the gas supplier and keep MSDS and a safety advice of gas supplier WARNING Warn of the danger of the gas with the warning label when the use gas is hazardous WARNING chemical material WARNING Secure safety by wearing personal protective equipment when using the gas which might influence damage health In addition take appropriate measure for depending upon the properties of the gas to be use...

Страница 15: ...s of the labels before operation 1 STP pump installation warning label This label describes installation of the STP pump Install the STP pump according to the precautions Install the STP pump according to the precautions of Section 3 INSTALLATION OF THE STP PUMP Figure 1 STP pump installation warning label 2 Hot surface warning label This label instructs operators so as not to touch the hot surfac...

Страница 16: ...r caution label 4 Heavy product caution label This label is affixed to the product with a weight of 18 kg or more Follow the precautions of Section 3 2 Unpacking so as not to cause any accident during handling Figure 4 Heavy product caution label 5 High voltage device caution label The pump control unit and power unit are equipped with a high voltage device This label warns operators to pay attent...

Страница 17: ...ators so as not to expose the pump to water Failure to do so may result in an electric shock or damage to equipment Figure 6 Water caution label 7 Rotational direction instruction label This label describes the rotational direction of the STP pump The STP pump rotates in this direction Figure 7 Rotation instruction label ...

Страница 18: ...tely in the axial direction Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor The STP iXA2205 series pump is a series of a magnetically levitated turbomolecular pumps each with the following features 1 Oil free 2 Low vibration 3 High reliability 4 Compact size Integrated control unit 5 Temperature management system 6 Dust and water protection I...

Страница 19: ...ze Integrated control unit To save space for installation the STP pump mounts the control unit 8 that includes the following circuits the magnetic bearing control circuit the motor drive circuit which drives rotor blade the supervisor circuit which monitors pump operation status and operates the pump in remote operation mode The STP iXA2205 series has the integrated power unit type which mounts th...

Страница 20: ... the power unit iPS 1200 see Section 3 6 External appearance installation and unpacking method differ depending to the STP pump model Refer to the followings Specification Separate power unit type Integrated power unit type Standard corrosion resistant type TMS specification corrosion resistant type with TMS IP54 specification corrosion resistant type with IP54 STP iXA2205C iPS 1200 STP iXA2205CP ...

Страница 21: ...by monitoring the temperature with the thermistor in the base of the turbomolecular pump and performing the TMS heater ON OFF control in order to maintain a constant temperature of the STP pump 3 IP54 Sealed The STP pump complies with Protection Classification IP54 sealed This model has protection against dust and water splashed from any direction Refer to IEC60529 2001 for details The display uni...

Страница 22: ...STP iXA2205 Series Turbomolecular Pump Nov 10 12 Issue 1 h INTRODUCTION 1 This page intentionally blank ...

Страница 23: ...ng Allowable backing pressure Pa Torr 266 2 Flow rate of purge gas N2 Pa m3 s SCCM 8 4 10 2 50 Rated speed rpm 27 000 Backup rotational speed 1 rpm Approximately 5 000 Starting time min 㻡8 Stopping time min 㻡11 Noise dB 55 27 000 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling Mass 2 kg 61 75 Ambient temperature range C 0 to 40 Sto...

Страница 24: ...min is used It is changed depending on condition For example when the gas is exhausted intermittently the gas more than the maximum gas flow rate can be exhausted In this case contact Edwards 2 When not using water cooling system a small amount of gas can be vacuumed however it is subject to effects of ambient temperature and environment Contact Edwards for details 2 3 Water cooling use condition ...

Страница 25: ...age under normal operation Hz 450 maximum Panel indication LED POWER Green LED FAILURE Red Orange LED ROTATION Green Orange LED Data 䋨Green LED䋩 Off Line 䋨Orange LED䋩 Error 䋨Red LED䋩 Input Output connector DC POWER X1 9 pins REMOTE X2 37 pins COM1 X3 9 pins COM2 X4 9 pins STP LINK X5 8 pins OPTION X6 12 pins Safety function Electromagnetic bearing failure detection STP pump overheat detection Moto...

Страница 26: ...A 2 0 maximum Input phase Single phase Main breaker specification A 10 Current Ampere Interrupting Capacity AIC A 1000 240V AC 50 60Hz Mass kg 13 Pollution degree 2 Installation category 㸈 Panel indication LED POWER 2 Green LED Input Output connector AC POWER X11 3 pins DC OUTPUT X12 9 pins HEATER X13 3 2 pins STP LINK X14 2 8 pins 1 The STP iXA2205CP V CIP is equipped with the power unit iPS 1200...

Страница 27: ...3 Control unit 4 Height of the purge port 5 Outlet port flange KF40 6 Screw hole for legs 4 M20 depth 24 7 Purge port KF10 8 Cooling water port 2 Rc1 4 Figure 9 External appearance of STP iXA2205C V VG250 ISO250F ICF305 Inlet port flange VG250 ISO250F ICF305 㱢A 350 335 305 B 18 16 28 C 235 245 275 D 395 405 435 E 312 322 352 F 281 291 321 G 283 293 323 ISO250F B 15 with torque reduction mechanism ...

Страница 28: ...rt 5 Outlet port flange KF40 6 Fixed screw hole for legs 4 M10 depth 20 7 Purge port KF10 8 Cooling water port 2 Rc1 4 9 Power unit Figure 10 External appearance of STP iXA2205CP V VG250 ISO250F ICF305 Inlet port flange VG250 ISO250F ICF305 㱢A 350 335 305 B 312 322 352 C 18 16 28 D 235 245 275 E 540 550 580 F 551 561 591 G 281 291 321 H 283 293 323 ISO250F C 15 with torque reduction mechanism ...

Страница 29: ... Outlet port flange KF40 6 Fixed screw hole for legs 4 M10 depth 20 7 Purge port KF10 8 Cooling water port 2 Rc1 4 9 Power unit Figure 11 External appearance of STP iXA2205CIP VG250 ISO250F ICF305 Inlet port flange VG250 ISO250F ICF305 㱢A 350 335 305 B 312 322 352 C 18 16 28 D 235 245 275 E 540 550 580 F 551 561 591 G 281 291 321 H 283 293 323 ISO250F C 15 with torque reduction mechanism ...

Страница 30: ...STP iXA2205 Series Turbomolecular Pump Nov 10 20 Issue 1 h TECHNICAL DATA PAG E 20 2 2 7 External appearance of the power unit Figure 12 External appearance of power unit iPS 1200 4 M4 depth 6 ...

Страница 31: ...G KP LWT VV CEJ I KX GP UV CP F YJG P RN CE KPI W RT KI JV 7 6 1 0 A Label Affixing positions for the STP pump B Label affixing positions for the power unit 1 STP pump installation warning label 2 Hot surface warning label 3 Tip over caution label 4 Heavy product caution label 5 High voltage device caution label 6 Water caution label 7 Rotational direction instruction label 8 Name plate 9 Company ...

Страница 32: ...STP iXA2205 Series Turbomolecular Pump Nov 10 22 Issue 1 h TECHNICAL DATA PAG E 22 2 This page intentionally blank ...

Страница 33: ...Safety Data Sheet MSDS you obtain from the gas supplier and keep MSDS and a safety advice of gas supplier WARNING Take measures according to MSDS to prevent an accident when using toxic reactive or combustible gases Dilute the gas to be used with the inert gas controlled if necessary And take measures according to MSDS to prevent an accident caused by exhaust gas CAUTION Chlorine or fluorine syste...

Страница 34: ...A place free of exposure to radiation x No discharge of high voltage more than 500 V If more than 500 V is discharged contact Edwards x Others An area free of exposure to direct sunlight high humidity dust salty air dripping water explosive or flammable gas corrosive gas excessive vibration and sources of electric noise STP pump installation equipment conditions Install the STP pump securely so th...

Страница 35: ... for ventilation is not required with STP iXA2205CIP䋩 CAUTION The minimum bending radius of the STP connection cable is 100 mm DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump In addition leave enough space to install other cables without bending them excessively Front side Back side A Pump installation area Front side front panel Back side connector pane...

Страница 36: ...cure the customer prepared bench and the vacuum equipment on the floor or peripheral equipment and other equipment in accordance with the customer application NEVER move them while the STP pump is in operation Confirm the dimensions by the external appearance of the STP pump when designing the bench The bolt may not be able to be inserted from the lower side of the inlet port according to the shap...

Страница 37: ...2 TECHNICAL DATA for the mass of the STP pump Use a crane or other appropriate means sufficient enough to withstand the load when lifting the STP pump of 18 kg or more Lift the STP pump with an eyebolt or a similar tool that uses the fitting hole attached to the inlet port flange When lifting the pump use 2 or more ropes see Figure 15 A crane and eyebolts due to lifting operations should withstand...

Страница 38: ...x parts such as the outlet port or connectors by ropes Doing so may the pump to fall or deform and damage the parts A crane due to lifting operations should withstand the load of five times or more the weight of the STP pump and rope should be seven time or more When lifting the pump use 2 or more ropes 1 Casing 3 Base recommended position 2 Casing 4 Control unit Figure 16 Example of lifting the S...

Страница 39: ...e power unit type STP iXA3305C V B Integrated power unit type STP iXA3305CP V CIP Figure 17 Jack up the STP pump When jacking up the bottom of the control unit STP iXA2205C V use a jack on the slash part in Figure 18 Jacking up the bottom plate may deform the plate and cause the breakage of internal parts A device due to jacking up the STP pump should withstand the load of five times or more the w...

Страница 40: ...r when instrolling the STP pump A DC cable STP iXA2205CP V CIP B Flexible hose for cooling water STP iXA2205CIP Figure 19 Prohibited matter Attach the four dedicated legs to place the STP pump in upright position on the floor The STP pump might become unstable and tip over without the legs see Figure 20 Figure 20 STP pump with dedicated legs Dedicated legs for standing ...

Страница 41: ...can be loft with the eyebolts attached to the dedicated legs 㸦see Figure 21㸧 A crane and eyebolts due to lifting operations should withstand the load of five times or more the weight of the STP pump and rope should be seven time or more Use an eyebolt which confirms to ISO03266 When lifting the pump use 2 or more ropes Figure 21 STP pump with eyebolts Eyebolt Dedicated legs ...

Страница 42: ...roduces a purge gas In order to protect the inside of the STP pump when pumping reactive or corrosive gases The STP pump is delivered with a blank flange attached to this port 4 Cooling water port water cooling unit Connected to the STP pump cooling water pipe 5 Control unit Contains the electronics that control the pump Refer to Section 3 3 2 Name and function of the control unit for details 6 Po...

Страница 43: ... front panel of the control unit 1 DC POWER connector 7 POWER LED 2 REMOTE connector 8 FAILURE LED 3 COM1 connector 9 ROTATION LED 4 COM2 connector 10 Data LED 5 STP LINK connector 11 Off Line LED 6 OPTION connector 12 Error LED Figure 23 Control unit Front panel Note Refer to Table 4 for front panel functions 1 4 3 5 6 10 12 11 2 8 7 9 ...

Страница 44: ...LED Green LED Illuminates when 96 VDC is input to the connector X1 Power ON state Refer to Section 4 8 LED 8 FAILURE LED Red Orange LED A failure of the STP pump is indicated by the flashing pattern of the red LED The flashing pattern indicates the failure type Refer to Section 7 Safety Functions A warning of the STP pump is indicated by flashing of the orange LED The flashing pattern indicates th...

Страница 45: ...to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Item Description Function 1 DC OUTPUT connector X12 For the DC cable to connect the STP pump Outputs 96V DC Includes serial communication pins for the STP pump 2 AC POWER connector X11 AC input inlet 240 Va c maximum For the AC power cable Input voltage range is between 200...

Страница 46: ...wer unit front panel Item Description Function 1 POWER LED Green LED Lights while the power is ON 2 STP LINK connector X14 For the communication cable of the STP Link optional accessory or the display unit iDT 001 optional accessory These optional accessories can operate the STP pump confirm the operation state or change various settings Table 6 Power unit front panel function 1 2 ...

Страница 47: ...t rotation of the STP pump which may result in an accident an electric shock or damage to equipment Moreover an accident caused by water leaks or gas leak may occur CAUTION Use a lifter or the like when installing the STP pump to the vacuum equipment Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall A supportive device such as lifter to installin...

Страница 48: ... must be prepared by the customer Figure 27 Installation of the STP pump to the vacuum equipment STP iXA2205CP V CIP Vacuum equipment 1 Inlet port flange Outlet port flange Vacuum valve 1 To power supply AC power cable Remote operation cable To vacuum equipment control circuit Inlet port Backing pump dry pump and other 1 ...

Страница 49: ...n materials falling into the STP pump through the splinter shield may result in product damage Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the STP pump to the vacuum equipment Take the following measures for cleaning the seals Clean off with a pure gas Wipe with proper solvent such as alcohol The splinter shield cannot perfectly prevent foreign materi...

Страница 50: ... 28 STP pump installation positions When installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump Figure 29 Positions of the outlet port on the horizo...

Страница 51: ...semiconductor equipment Consider the following when installing to the semiconductor equipment x Confirm that electric resistance value between the STP pump and vacuum equipment is set to 0 1 ȍ or less after securing the STP pump to the vacuum equipment The generated torque during a pump failure is called Destructive torque Design and secure the mounting for the STP pump so that it can withstand th...

Страница 52: ...cial washer Figure 30 Not necessary Not necessary Not necessary Not necessary Not necessary Not necessary Pump model STP iXA2205CP CPV CIP Flange type ISO250F VG250 ICF305 Toque reduction mechanism Equipped optional Not Equipped standard Not Equipped standard Not Equipped standard Destructive Torque kNm 36 2 56 3 72 8 72 8 Base 4 positions securing No Yes No Yes No Yes No Yes Shape Standard R D S ...

Страница 53: ...e pump with the recommended bolts as described in Figure 31 according to the installation method used Note that special washers will be required if the pump includes the inlet torque reduction mechanism The washer shape is shown in Figure 30 CAUTION Install the flange securing bolts in the proper position with the special square washer shown in Figure 30 Failure to do so may cause abnormal operati...

Страница 54: ...tion ISO250F A 15 only with torque reduction mechanism Figure 30 Shape of reduced diameter shank bolts i When the base is not secured ii When the base is secured i When the base is not secured ii When the base is secured A STP iXA2205C V B STP iXA2205CP V CIP 1 Recommended fitting bolt for flange 2 Secure the base legs Figure 31 Methods of securing the STP pump 1 2 1 2 ...

Страница 55: ... levelled and smoothed area expressed by D in Figure 32 is free of crack depression and other damages Also when you want to use commercially available screws be sure to thoroughly grind them so as not to leave spiral seams on their bottom Bolt size Type of flange T D R M8 ISO_F flange 2 5 mm or more 5 9 mm or more 0 8 mm or more ICF flange 1 mm or more M10 ISO_F flange 3 mm or more 7 5 mm or more ...

Страница 56: ...shows the position of the four screw holes for securing the base STP iXA2205C V When securing the STP iXA2205CP V use the dedicated legs for standing or make legs in the configuration shown in Figure 34 Figure 34 shows the position of the screw holes for the legs Ǿ A Screw holes for securing the base A Recommended leg for securing the base B Position of the screw holes for securing the base B Posi...

Страница 57: ... leave enough space to install the cables without bending them excessively when installing the STP pump Secure the power unit using the screw holes 4 M4 depth 6 on the bottom Refer to Section 3 1 2 Installation area and leave enough space Figure 35 Fixed screw hole potion for the power unit Fixed screw hole position 4 M4 depth 6 Fixed position ...

Страница 58: ...nect the earth to the FG pin Failure to do so may result in product damage Connect the power supply line to the No 1 and 2 pins and connect the earth to the FG pin Refer to Figure 36 Table 10 and Table 11 for the information on preparing the DC cable at your company Figure 36 DC cable Name Model number Remarks Female insert CN1 09120083101 HARTING Female contact 09330006202 HARTING Hood 0912008042...

Страница 59: ...s Outline 1 96 V For 96 VDC power supply 2 0 VA For the ground for DC power supply 3 4 5 6 7 8 㸫 DO NOT connect these pins 9 FG Frame ground Table 11 Pin assignment for connector X1 Note No 2 pin 0 VA and No 9 pin FG of the connector X1 are connected internally to the pump body and other metallic components ...

Страница 60: ...nit side Figure 37 External appearance of DC cable STP iXA2205C V Control unit side Power unit side Figure 38 External appearance of DC cable STP iXA2205CP V CIP Note The DC cable is not included with STP iXA2205C V In addition length of the DC cable differs depending on the specifications Contact Service office for details to purchase ...

Страница 61: ...the power cable to the X11 AC POWER on the power unit connector panel as shown in Table 12 Connect the power cable to the main power of the vacuum equipment via a circuit breaker Connect the primary power to the UL recognized terminal block of the vacuum equipment Secure the terminals with M4 bolts as the other side of the terminals and cover the terminal block with an appropriate cover refer to F...

Страница 62: ...p type terminal M4 3 Yellow Green 7 Cover 1 4 Clearance min 1 5 mm 8 Terminal block 2 1 Use material flammability UL 94V 0 2 Use the UL recognized terminal block satisfying with the following conditions a Clearance between each terminal 1 5 mm or more b Material flammability UL 94V 0 c The installation category 㸈 Figure 40 Connecting method of the power cable 3 2 1 4 5 6 7 8 ...

Страница 63: ...label Connect the power cable securely to prevent incorrect wiring CAUTION Connect each cable securely with caution avoiding any obstacles DO NOT place heavy objects on the cables or bend them excessively If any problem occurs in cables connectors or terminals the STP pump may not function normally DO NOT apply voltage to each connector pin and DO NOT cause any short circuiting between pins Instal...

Страница 64: ... not function normally DO NOT apply voltage to each connector pin and DO NOT cause any short circuiting between pins Install cables so that personnel are not exposed to risk of tripping or falling 1 Connecting the DC cable Connect the socket side of the DC cable to the X1 DC POWER on the control unit and connect the plug pin side on the power unit to the X12 DC OUTPUT on the power unit 2 Connectin...

Страница 65: ...ace 2 Use steel or aluminum tubes with a low gas loss to connect the vacuum equipment to the STP pump 3 Take measures for minimizing leakage It is also necessary to degrease the tubes as regularly as possible to keep the gas loss as low as possible 4 There is a recommended backing pump of pumping speed Refer to Section 2 1 STP pump specifications However the pressure at the inlet and outlet ports ...

Страница 66: ...N2 gas or other gas into the STP pump in order to protect the inside of the STP pump Introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to introduce the purge gas see Section 4 1 2 Note When not introducing the purge gas close the purge port with the blank flange attached on delive...

Страница 67: ... IN side OUT side in Figure 42 Install a secondly containment for liquids or a water leak detector in the place ex cooling water ports where cooling water may leak Figure 42 shows the position of the cooling water ports The STP pump in Figure 42 is a typical pump model Refer to Section 2 TECHNICAL DATA for the configuration of each STP pump Install the valve to isolate purge gas N2 or cooling wate...

Страница 68: ...ng heater optional accessory is display voltage r10 CAUTION DO NOT apply excessive force to the cable for the baking heater CAUTION Wind the baking heater around the surface of the STP pump tightly If the baking heater is not wound tightly the loose parts will overheat Install the baking heater optional accessory near the inlet port flange in the perimeter of the envelope see Figure 43 Procure pro...

Страница 69: ...nitoring the temperature with temperature sensor in the base of the turbomolecular pump and performing the TMS valve and TMS heater ON OFF control in order to maintain a constant temperature of the STP pump Note The TMS unit is not available depending on the STP pump model Refer to Section 2 TECHNICAL DATA and confirm whether the TMS unit can be used for the STP pump 3 13 1 Configuration of the ST...

Страница 70: ...ecular Pump Nov 10 60 Issue 1 h INSTALLATION 3 1 STP pump 5 DC cable 2 TMS heater Built in 6 Power unit 3 Control unit 7 TMS heater cable 4 TMS valve 8 Power cable Figure 45 Configuration of the TMS STP iXA2205CPV 5 3 8 6 7 1 4 2 ...

Страница 71: ...3 13 4 Installation of the TMS unit CAUTION DO NOT install the TMS unit in places with high temperature humidity noise vibration or other unstable environment CAUTION DO NOT apply force to the TMS unit and cables during installation and DO NOT bend the cables excessively 3 13 5 Connecting the TMS heater cable Insert the TMS heater cable into the connector X13 HEATER connector of the power unit see...

Страница 72: ... cooling water circulating whole device will stop Note Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve at your site The diameter of the valve is Rc1 4 3 13 7 TMS unit specification Item Condition Temperature control method Control ON OFF of the TMS heater and cooling water Setting temperature C Standard type 70 Failure output Failure outputs from the ST...

Страница 73: ...ower unit iPS 1200 When the power is shut off the STP pump performs the same as a power failure After backup operation of a power failure the rotor lands on the touch down bearing Consider the following when establishing the EMO circuit CAUTION Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates example shut the valve When atmosp...

Страница 74: ...STP iXA2205 Series Turbomolecular Pump Nov 10 64 Issue 1 h INSTALLATION 3 This page intentionally blank ...

Страница 75: ...keep MSDS and a safety advice of gas supplier WARNING When pumping gases they may remain in the STP pump Introduce a purge gas and then exhaust all gases Residual gases can cause an accident if when the pump is removed Take measures according to MSDS to prevent an accident when using toxic reactive or combustible gases CAUTION Chlorine or fluorine system gases can be used in corrosion resistant pu...

Страница 76: ... to be addressed x Connect the connecting hoses correctly to prevent from water leak Refer to Section 2 TECHNICAL DATA for the TMS unit condition x Use clean water as much as possible Cooling water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clogged with foreign materials clogs may possibly be removed by feeding cooling water reversibly x When...

Страница 77: ...attain a less pressure in a shorter time and reduce the exhaust time bake the vacuum equipment and STP pump When baking the STP pump always cool it to prevent overheating Start baking after cooling is started Set the temperature of the baking heater to 120 C or less an optional baking heater is set to 110 C or less DO NOT introduce gases during baking or this will prevent overheating To exhaust th...

Страница 78: ...ly with the start of the STP pump Open the vacuum valve located at the outlet port flange side after starting the backing pump Note DO NOT open the vacuum valve without operating the backing pump Depending upon the type of the backing pump doing so may cause a reverse flow of oil which could contaminate the inside of the STP pump Note Avoid frequent start stop operations as this may cause the STP ...

Страница 79: ...e for the operation The STP Link optional accessory or the display unit iDT 001 optional accessory can operate the STP pump via the serial port COM3 X5 STP Link connector serial port COM4 X14 STP Link connector of the power unit When setting the input operation port to the parallel port refer to Section 4 9 Parallel port input output signal When setting to a serial port refer to Section 5 Serial C...

Страница 80: ...wever when inputting this signal simultaneously with switching ON the power unit short the circuit between 3 21 for 10 seconds or more Open the circuit between 1 21 2 Short the circuit between 1 3 In this case 21 is not used Open the circuit between 1 3 Table 14 Starting stopping the STP pump using contact input X2 REMOTE 0 3 sec or more Stop Rotation Stop CLOSE OPEN 1 21 3 21 X2 REMOTE connector ...

Страница 81: ... the circuit between 3 1 for 10 seconds or more Connect the 1 pin to 0 V of 12 to 24 VDC Shutoff the circuit between 21 1 2 Supply 12 to 24 VDC to the circuit between 3 1 In this case 21 is not used Shutoff the circuit between 3 1 Table 15 Starting stopping the STP pump using voltage input X2 REMOTE voltage input 0 3 sec or more Stop Rotation Stop㩷 12 to 24VDC 0V 21 1 3 1 X2 REMOTE connector 0V 12...

Страница 82: ...the abnormality error after the ROTATION LED extinguishes and perform the operation shown in Table 16 The FAILURE LED extinguishes and the safety function is released RESET operation Then restart the STP pump For the safety functions and troubleshooting see Section 7 Safety Functions Method Reset operation 1 Short the circuit between 1 22 for 0 3 seconds or more When using voltage input supply 12 ...

Страница 83: ... or under normal operation Steady see Figure 51 See left FAILURE orange red x Warning state Flashing orange The flashing pattern of the LED indicates the type of warning See Section 7 WARNING Function x Failure state Flashing or steady red The flashing pattern of the LED indicates the type of failure See Section 7 WARNING Function Table 17 LED Indications for each state 㪦㪥㩷㪦㪝㪝㩷 2 000 to 10 000 rp...

Страница 84: ...trol equipment at your company Note It is recommended to use a remote cable with shield type and connect both terminals to the ground Figure 52 X2 REMOTE connector 4 9 1 Input signal pins Choose contact input signal or voltage input signal When using contact input refer to Table 18 Table 19 and Figure 53 When using voltage input refer to Table 20 Table 21 and Figure 54 The input signal pins functi...

Страница 85: ...e circuits between 1 3 to stop the STP pump Pins for inputting the RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stopped When the cause of the abnormality error is removed short the circuits between 1 22 for 0 3 seconds or more to reset the failure signal The FAILURE LED extinguishes Pins for inputting the rotation INHIBIT ...

Страница 86: ...rial port is disabled When the pins between 1 4 are opened a parallel port or any of three serial ports from COM1 to COM4 can be selected in the input operation port see Section 5 Pins for inputting the rotation INHIBIT enable signal The input pins are valid even when input operation port is set to serial port When the pins between 1 2 are short circuited the rotation INHIBIT signal input is enabl...

Страница 87: ... In case of Start 2 Figure 53 X2 REMOTE input signal pins contact input Note COM pins 1 37 pin are isolated from the frame ground Note The input current of remote input signal is approx 5 mA Make sure the minimum applicable load of the relay contact when the remote operation with the relay A B ...

Страница 88: ...s for inputting the STOP signal 1㸧 When 1 above is used to start the STP pump shutoff voltage to the circuits between 21 1 to stop the STP pump 2㸧 When 2 above is used to start the STP pump shutoff voltage the circuits between 3 1 to stop the STP pump Pins for inputting the RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stop...

Страница 89: ...ct signal When 12 to 24 VDC is supplied to the pins between 4 1 the input operation port will be set to the parallel port automatically and the input operation via the serial port is disabled When voltage is not supplied to the pins between 4 1 a parallel port or any of three serial ports from COM1 to COM4 can be selected in the input operation port see Section 5 Pins for inputting the rotation IN...

Страница 90: ...STP iXA2205 Series Turbomolecular Pump Nov 10 80 Issue 1 h 4 OPERATION A In case of Start 1 B In case of Start 2 Figure 54 X2 REMOTE input signal pins voltage input A B ...

Страница 91: ...ss of the Remote Operation Mode setting When the PORT SELECT IN signal is opened any input operation ports are selectable in the Remote Operation Mode see Table 22 The default setting of the Remote Operation Mode is I O Remote parallel port It can be set via serial communication the STP Link optional accessory Input operation port X2 REMOTE PORT SELECT IN 4 1 Remote Operation Mode setting is I O R...

Страница 92: ...e rotation INHIBIT input signal is short circuited B INHIBIT IN Open㩷 Close START operation ŏ The pump does not accelerate when the START operation is performed A ŏ The pump accelerates when the rotation INHIBIT input signal is short circuited B The rotation INHIBIT input signal is opened A during acceleration or normal operation INHIBIT IN Open㩷 Close START operation MANUAL REMOTE operation mode ...

Страница 93: ...4 9 4 Output signal pins Table 24 and Figure 55 The pins function when the input operation port is either in parallel port setting or serial port setting Three abbreviations are used in Table 24 N O OUT Normal Open Output Pin N C OUT Normal Close Output Pin COM Common Pin ...

Страница 94: ...ity error is detected the pins between 14 33 are closed and the pins between 15 33 are opened Pins for outputting the WARNING signal These pins are closed when the STP pump is WARNING state Refer to Section 7 2 Safety Functions for the warning Pins for outputting the parallel port select state signal When the input operation port is set to the parallel port I O REMOTE the pins are closed Pins for ...

Страница 95: ...STP iXA2205 Series Turbomolecular Pump Nov 10 85 Issue 1 h 4 OPERATION Figure 55 X2 REMOTE output signal pins ...

Страница 96: ... contacts for relays CR1 to CR8 in Figure 55 Resistance Load COS Ø 1 Rated Load 125 V AC 0 3 A 30 V DC 0 5 A Rated Current 0 5 A Maximum Contact Point Current 0 5 A Maximum Open Close Capacity AC 37 5 VA DC 15 W Minimum Applicable Load 10 mV DC 10 ȝA Table 25 Rated contacts for relays CR1 to CR8 ...

Страница 97: ...o automatically start the TMS unit Power off the STP pump to automatically stop the TMS unit When STP pump is in the power ON state the TMS unit operates regardless of the status of the STP pump When the STP pump is the cause of the malfunction the TMS unit is stopped 4 10 3 Setting the TMS unit function When the temperature of the STP pump base is lower than the setting value the TMS heater is tu...

Страница 98: ...STP iXA2205 Series Turbomolecular Pump Nov 10 88 Issue 1 h 4 OPERATION This page intentionally blank ...

Страница 99: ...splay unit iDT 001 optional accessory see Figure 56 The STP pump is equipped with 3 serial ports COM1 COM2 and STP Link as a standard A serial port located the STP pump is called a serial interface module hereafter referred to as SIM The equipment which can communicate with the STP pump via RS232 RS485 is called a PC Figure 56 Serial port STP pump PC User application COM2 RS485 X4 COM2 connector S...

Страница 100: ... serial port COM2 is available for the serial communication via RS485 When using a user application connect it to this port Connect the connector X4 D Sub9 pin socket type to the PC according to Table 26 DO NOT connect other pins which are reserved as optional use However when using the Profibus optional accessory serial communication function is not available because of the different connector pi...

Страница 101: ...2 and RS485 share the X3 COM1 port When connecting RS232 the length of the communication cable should be 15 m or less When connecting RS485 refer to Section 5 2 2 3 Serial Port COM3 X5 STP Link connector The STP Link optional accessory or the display unit iDT 001 optional accessory can be connected to the serial port COM3 4 Serial Port COM4 X14 STP Link connector of the power unit The STP Link opt...

Страница 102: ...f which transmit receive switch time is 5 msec or less Use twisted pair wire in communication cable The extended communication cables should be 1 2 km or less Connect the terminator to the communication devises at both ends of the transmission line The terminator 120 ȍ 0 25 W is required for connection the STP iXA2205 series dose not have terminator setting function PC 7 D 8 D 120㱅 120㱅 SIM connec...

Страница 103: ... shown in Table 27 To set communication parameters use the STP Link optional accessory or the display unit iDT 001 optional accessory Communication parameter Factory setting PC setting example Baud rate 9 600 bps 1 200 to 56 000 bps Bit length 8 bit 7 8bit Stop bit 1 bit 1 2bit Parity None None Even Odd Driver type COM1 RS232 RS485 single RS232 RS485 single RS485 multi COM2 RS485 single RS485 sing...

Страница 104: ...port input output signal for the details of the X2 REMOTE connector 2 Set the parameter of the Input operation port to the serial port which operates STP pump following Section 5 4 16 The parameter value of the factory setting is I O REMOTE parallel port The Input Operation Port can also be changed via the STP Link optional accessory Input operation port Remark Parallel port I O Remote X2 REMOTE c...

Страница 105: ...optional accessory see 5 4 17 Design the user application so that the PC can communicate with the STP pump at fixed regular intervals within the setting time except when the function is disabled the value is 0 Default Setting Range Remark Serial communication time out setting 1 minute 0 to 500 minutes 1 minute step The function is disabled when the value is set to 0 Table 29 Serial communication t...

Страница 106: ...ion command transmitted from the PC and sends a response following the communication command Figure 59 1 Each communication command from the PC transmits a text message ASCII text assigned to each function Figure 59 2 Communication commands include control commands STP pump operation commands etc and query commands read out of STP pump operation mode etc 1 Communication command 2 Response Figure 5...

Страница 107: ...knowledgment response Application layer 21 Non acknowledgment response Table 30 Transmission control characters 5 3 2 Standard transmission frame The transmission frame has a single block or multiple transmission blocks The transmission block consists of a start control character data block No 3 digits a message up to 255 characters an end control character and a checksum LRC The following table s...

Страница 108: ...character HEX code 20 and succeeding characters are ASCII characters corresponding to the respective function code and parameter Sp CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input Sp and CHR to the top transmissi...

Страница 109: ...the control command the 2nd block PC SIM Stx 0 0 2 C254 Cn Etx LRC SIM PC Ack or Nak Always assign less than 510 characters n 510 to the parameter so that the message is less than 512 characters Then the preceding SIM PC character is Ack the instructed control command is executed and the SIM returns the following response PC SIM Ack or Nak SIM PC Stx 0 0 1 or Etx LRC The PC transmits Ack or Nak th...

Страница 110: ...s transmitted at one block and returned at two blocks Designate a query command on the PC Less than 256 chr PC SIM Stx 0 0 1 CHR C1 Cn Etx LRC SIM PC Ack or Nak Always assign less than 254 characters n 254 to the parameter so that the message is less than 256 characters Next the preceding SIM PC character is Ack the instructed query command is executed and the SIM returns the following response 1s...

Страница 111: ... from the PC when the SIM transmits Nak parity check error When the SIM receives Nak from the PC the transmission frame is transmitted again This operation is repeated up to 5 times z The SIM transmits Ack or Nak to the PC after the completion of communication command reception When the PC cannot receive Ack or NaK after 2 second retransmit the transmission frame from the PC When these communicati...

Страница 112: ...nsmission frame when a message is below 255 characters n 255 1 2 3 4 5 6 7 8 8 n 8 n 1 8 n 2 ASCII F1 F2 Stx 0 0 1 C1 Cn Etx LRC is used as a network frame ID character Stx and Etx are used as a start and an end character of the transmission frame respectively Transmission frame when a message exceeds 255 characters n 255 m 255 k the number of transmission blocks First 1 2 3 4 5 6 7 8 8 n 8 n 1 8 ...

Страница 113: ...cks The SIM returns the acknowledgment response character when the control command is processed normally If not the SIM returns the non acknowledgment response character and 3 characters of the non acknowledgment code are added to Transmission frame when data is transmitted to one block a message is less than 256 characters Designate the control command on the PC Less than 256 chr PC SIM F1 F2 Stx...

Страница 114: ... SIM and is arranged in the order specified below The top is HEX code 3F and ASCII characters corresponding to the respective function code and parameter follow CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input and...

Страница 115: ...returns the following response 2nd block PC SIM Ack or Nak F1 F2 SIM PC F1 F2 Stx 0 0 2 C254 Cn Etx LRC The PC transmits Ack or Nak then transmits the next command if necessary 5 3 11 Broadcasting command in the RS485 multi point connection The START or STOP of STP pump operation command can be concurrently instructed to all the multi connected SIMs Always assign 0 HEX code 30 30 to network frame ...

Страница 116: ...SetPoint Reads the setting values of the speed set point and the TMS temperature e ReadMotorTemp Reads the measured motor temperature f ReadStatus Reads the various settings Remote mode TMS function and emergency vent valve g ReadEvents Reads the error record Sp h SetSpeedSetPoint Changes the speed set point h ReadSpeedSetPoint Reads the speed set point m ReadModFonctWithWarning Reads the pump ope...

Страница 117: ...d Unit Hz 16 bits hexadecimal coded ASCII Example Measured rotational speed 01C2hex 450 Hz 27 000 rpm Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 1 C 2 HEX 30 31 43 32 1 System reservation 5 4 3 Command Function Sends the pump operation commands START STOP and RESET These commands are valid only when being sent to the serial port which is set as the input operation port Refer to Section Sect...

Страница 118: ...ART 1 STOP 2 RESET 4 Table 33 Pump operation commands Example Pump operation command RESET operation 4 04hex Parameter 1 ASCII 0 4 HEX 30 34 5 4 4 ReadFailMess Function Reads the errors being detected This data is the same data as that of ReadModFonct parameter 2 to 81 or ReadModFonctWithWarning parameter 3 to 82 Transmission frame PC SIM Stx 0 0 1 F Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 ...

Страница 119: ...ecent error has the largest parameter number When the number of errors being detected is under the maximum number the value of parameter that is larger than the number of errors being detected is set to 0 Example The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 79 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 ASCII 0 2 0 D 0 F 0...

Страница 120: ...1 Disturbance X_H 13 System reservation 46 Disturbance Y_H 14 System reservation 47 Disturbance X_B 15 System reservation 48 Disturbance Y_B 16 System reservation 49 Disturbance Z 17 System reservation 50 MOTOR Overheat 18 System reservation 51 System reservation 19 System reservation 52 CNT Overheat 2 20 System reservation 53 System reservation 21 System reservation 54 System reservation 22 Syste...

Страница 121: ...ion 71 System reservation 84 Aberrant Brake 72 System reservation 85 Aberrant Accel 73 System reservation 86 System reservation 74 System reservation 87 System reservation 75 Overspeed 4 88 Inordint Current 76 System reservation 89 FAN Trouble 77 CNT Overheat 3 90 Serial Com Fail 78 Table 35 Error message values continued 1 CAUTION or WARNING message It is not a state of failure Refer to Section 7...

Страница 122: ...ASCII Refer to Table 36 2 The number of error 8 bits hexadecimal coded ASCII Up to 80 errors 1 Error 1 8 bits hexadecimal coded ASCII 3 to 82 1 Error 80 1 8 bits hexadecimal coded ASCII 2 1 The maximum number of errors may differ depending upon the software version of the STP pump It is recommended that an application be designed as variable length data 2 Value corresponding to the error message i...

Страница 123: ...f error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 81 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 12 13 68 69 70 71 72 73 74 75 ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 30 30 30 Omitted 30 30 30 30...

Страница 124: ...oftware version 4 bits ASCII character Ver 1 2 0120 21 to 24 AMB software version 4 bits ASCII character Ver 3 4 0340 Example Control unit software version 36335F4120312E302020202020202020hex 63_A 1 0 Motor driver software version 0120hex 1 2 DSP software version 0340hex 3 4 Parameter 1 2 3 4 5 6 7 8 9 10 6 3 _ A 1 0 ASCII 3 6 3 3 5 F 4 1 2 0 3 1 2 E 3 0 2 0 2 0 HEX 33 36 33 33 35 46 34 31 32 30 3...

Страница 125: ...s hexadecimal coded ASCII 22 Control unit hour counter Unit minute 32 bits hexadecimal coded ASCII 23 Start counter 32 bits hexadecimal coded ASCII Example Control unit serial number 12345 Pump serial number 6789A Pump hour counter 0000003Chex 60 minutes 1 hour Control unit hour counter 0000028Chex 652 minutes 10 hours and 52 minutes Start counter 00000064hex 100 times Parameter 1 2 3 4 5 6 7 8 9 ...

Страница 126: ... PC Stx 0 0 1 Sp d Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks 1 Speed Set Point Unit Hz 16 bits hexadecimal coded ASCII 2 TMS temperature setting Unit ºC 16 bits hexadecimal coded ASCII Example Speed Set Point 01F4hex 500 Hz 30 000 rpm TMS temperature setting 0046hex 70 ºC Parameter 1 2 ASCII 0 1 F 4 0 0 4 6 HEX 30 31 46 34 30 30 34 36 5 4 9 ReadMotorTemp Function Reads the measur...

Страница 127: ...settings Remote mode TMS function Emergency vent valve Transmission frame PC SIM Stx 0 0 1 f Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp f Parameter 1 to 4 Etx LRC Parameter Item Data format Remarks 1 Remote mode setting 8 bits hexadecimal coded ASCII Refer to Table 37 2 TMS function setting 8 bits hexadecimal coded ASCII 00hex ENABLE Excluding 00hex DISABLE 3 System reservation 8 bits hexad...

Страница 128: ...de Example Remote mode setting 01hex I O Remote TMS function setting 00hex ENABLE Emergency vent valve setting FFhex DISABLE Parameter 1 2 3 4 ASCII 0 1 0 0 1 1 F F HEX 30 31 30 30 46 46 1 System reservation 5 4 11 ReadEvents Function Reads the Error Record It has the most recent 10 errors that have been detected Transmission frame PC SIM Stx 0 0 1 g Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 ...

Страница 129: ...n 3 errors have been detected in the past The number of Error Record 03hex 3 errors Error Record 1 0Fhex 15 Disturbance Xb Error Record 2 0Dhex 13 Disturbance Xh Error Record 3 12hex 18 T Cable Disconnected Error Record 4 to 10 00hex No error recorded Parameter 1 2 3 4 5 6 7 8 9 10 11 ASCII 0 3 0 F 0 D 1 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 33 30 46 30 44 31 32 30 30 30 30 30 30 30 30 30 30 30 30 ...

Страница 130: ...mit it is automatically set to the lower limit Example Speed Set Point 0190hex 400 Hz 24 000 rpm Parameter 1 ASCII 0 1 9 0 HEX 30 31 39 30 5 4 13 ReadSpeedSetPoint Function Reads the Speed Set Point value This value is the same as ReadSetPoint parameter 1 Speed Set Point Transmission frame PC SIM Stx 0 0 1 h Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp h Parameter 1 Etx LRC Parameter Item Dat...

Страница 131: ...RNING being detected 16 bits hexadecimal coded ASCII See Table 38 3 The number of errors detected 8 bits hexadecimal coded ASCII Up to 79 errors 1 Error 1 8 bits hexadecimal coded ASCII 4 to 82 1 Error 79 1 8 bits hexadecimal coded ASCII 2 1 The maximum number of errors may differ depending upon the software version of the STP pump It is recommended that an application be designed as variable leng...

Страница 132: ...mage Limit 0004 3 WARNING Imbalance X_H 0008 4 WARNING Imbalance X_B 0010 5 WARNING Imbalance Z 0020 6 WARNING Pump Run Time Over 0040 7 WARNING Pump Overload 0080 8 System reservation 0100 9 System reservation 0200 10 System reservation 0400 11 System reservation 0800 12 System reservation 1000 13 System reservation 2000 14 System reservation 4000 15 System reservation 8000 Table 38 Warning value...

Страница 133: ...e Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 32 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 ASCII 0 1 0 0 0 C 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 30 30 43 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 Parameter 11 12 13 14 15 70 71 72 73 74 ASCII 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 30 30 30 30 30 30 30 30 30 Omitted 30 30 30 30 30 30 30 30 30 30 Parameter 75 76 ...

Страница 134: ...Ack PC SIM 1 Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 9 Etx LRC 1 The HEX code of ASCII character is 5B Parameter Item Data format Remark 1 System reservation 120 bits hexadecimal coded ASCII 2 TMS temperature Unit ºC 16 bits hexadecimal coded ASCII 3 Motor temperature Unit ºC 16 bits hexadecimal coded ASCII 4 System reservation 8 bits hexadecimal coded ASCII 5 Motor current Unit 0 1 A 8 bits hexade...

Страница 135: ...Measured rotational speed 01C2hex 450 Hz 27 000 rpm Control unit temperature 0032hex 50 C Parameter 1 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 4 6 HEX 30 30 34 36 Parameter 3 4 5 6 7 ASCII 0 0 1 4 1 1 1 9 1 1 1 1 1 1 0 1 C 2 HEX 30 30 31 34 31 39 30 31 43 32 Parameter 8 9 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 3 2 HEX 30 30 33 32 1 System reservation...

Страница 136: ...mal coded ASCII 3 System reservation 48 bits hexadecimal coded ASCII 4 Second Damage Limit Option Enable Disable setting 8 bits hexadecimal coded ASCII 5 First Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII 6 Pump Runtime Over Warning Enable Disable setting 8 bits hexadecimal coded ASCII 7 Pump Runtime Over Warning Hours setting 100 hours 32 bits hexadecimal coded ASCII...

Страница 137: ...0hex ENABLE FFhex DISABLE 5 First Damage Limit Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 6 Pump Runtime Over Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 7 Pump Runtime Over Warning Hours setting 0 to 1 000 100 hours 00000000hex to 000003E8hex 8 Imbalance Warning Enable Disable setting 00hex ENABLE FFhex DISABLE 9 Pump Overload Warning Enable Disable setting 00hex ENAB...

Страница 138: ...ex ENABLE 9 Pump Overload Warning FFhex DISABLE 10 Pump Overload Warning Motor current 03E8hex 1 000 0 1 11 Pump Overload Warning Rotational speed 0000hex 0 0 1 12 Serial communication time out 003Chex 60 sec Parameter 1 2 3 4 5 ASCII 0 1 F F 1 1 1 1 1 1 1 1 1 1 1 1 0 0 0 0 HEX 30 31 46 46 30 30 30 30 Parameter 6 7 8 ASCII F F 0 0 0 0 0 3 E 8 0 0 HEX 46 46 30 30 30 30 30 33 45 38 30 30 Parameter 9...

Страница 139: ... Disable setting 8 bits hexadecimal coded ASCII Default 00hex ENABLE 5 First Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII Default 00hex ENABLE 6 Pump Runtime Over Warning Enable Disable setting 8 bits hexadecimal coded ASCII Default FFhex DISABLE 7 Pump Runtime Over Warning Hours setting 100 hours 32 bits hexadecimal coded ASCII Default 00000000hex 8 Imbalance Warning...

Страница 140: ...hex ENABLE 6 Pump Runtime Over Warning FFhex DISABLE 7 Pump Runtime Over Warning hours 000003E8hex 1 000 100 hours 8 Imbalance Warning 00hex ENABLE 9 Pump Overload Warning FFhex DISABLE 10 Pump Overload Warning Motor current 03E8hex 1 000 0 1 11 Pump Overload Warning Rotational speed 0000hex 0 0 1 12 Serial communication time out 003Chex 60 sec Parameter 1 2 3 4 5 ASCII 0 1 F F 1 1 1 1 1 1 1 1 1 1...

Страница 141: ...frame 1 PC㸢SIM Stx 0 0 1 Etx LRC SIM㸢PC Ack PC㸢SIM 1 Ack SIM㸢PC Stx 0 0 1 Sp Parameter 1 to 4 Etx LRC 1 The HEX code of ASCII character is 7B Parameter Item Data format Remarks 1 Pump model 160 bits hexadecimal coded ASCII 2 System reservation 32 bits hexadecimal coded ASCII 3 Damage point 16 bits hexadecimal coded ASCII 4 System reservation 64 bits hexadecimal coded ASCII ...

Страница 142: ...rameter 1 S T P i X A 2 2 0 ASCII 5 3 5 4 5 0 2 D 6 9 5 8 4 1 3 2 3 2 3 0 HEX 35 33 35 34 35 30 32 44 36 39 35 38 34 31 33 32 33 32 33 30 Parameter 1 5 ASCII 3 5 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 HEX 33 35 32 30 32 32 32 30 32 30 32 30 32 30 32 30 32 30 32 30 Parameter 2 3 4 ASCII 1 1 1 1 1 1 1 1 0 0 3 2 1 1 1 1 1 1 1 1 HEX 30 30 33 32 Parameter 4 ASCII 1 1 1 1 1 1 1 1 HEX 1 System reservation ...

Страница 143: ...D Parameter Item Data format Remarks 1 The number of Error Record 8 bits hexadecimal coded ASCII 2 The maximum number of Error Record 8 bits hexadecimal coded ASCII Up to 20 for STP iXA2205 3 to 22 Error Record 1 to Error Record 20 80 bits hexadecimal coded ASCII See Error Record Format 1 1 The recent error has the smallest parameter number Error record format Time information of error history has...

Страница 144: ...Pump running time 5 000 minutes control unit running time 6 000 minutes Parameter a b c d ASCII 0 D 0 0 0 0 0 0 1 3 8 8 0 0 0 0 1 7 7 0 HEX 30 44 30 30 30 30 30 30 31 33 38 38 30 30 30 30 31 37 37 30 2 In case of time flag 1 Parameter Item Data format Remarks a Error Code 8 bits hexadecimal coded ASCII 1 b Time flag 8 bits hexadecimal coded ASCII c Error detection time Format㸸yymmddhhnn yy The las...

Страница 145: ...31234hex Sep 13 2007 at 12 34 Error Record 2 Error Code 0Dhex 13 Disturbance Xh Time flag 01hex Detection time is built in clock time Error detection time 0704300659hex Apr 30 2007 at 06 59 Error Record 3 Error Code 12hex 18 MOTOR Overheat Time flag 01hex Detection time is built in clock time Error detection time 0612011508hex Dec 1 2006 at 15 08 Error Record 4 to 20 No error recorded Parameter 1 ...

Страница 146: ...6d ASCII F F 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 7a 7b 21d ASCII F F 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 Omitted 30 30 Parameter 22a 22b 22c 22d ASCII F F 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 HEX 46 46 30 30 30 30 30 30 30 30 30 30 30 30 1 System reservation ...

Страница 147: ...e 40 shows the principal functions See the Instruction Manual of the STP Link for the detailed specification and operating method Item Functions Operating function Start stop and failure reset operation of STP pump Confirmation function Operational state of STP pump Software version Serial number STP pump model Operation hours Number of starts Bearing damage integrated value Error history Option s...

Страница 148: ... the STP pump confirms the pump status or sets various settings The display unit iDT 001 is equipped with an LCD and flat panel switches See the Instruction Manual of the Display unit iDT 001 for the detailed specification and operating methods 562 KPM 4 5612 56 46 014 74 219 4 72 190 06 4 5 6 4 5 6 Figure 60 Display unit iDT 001 ...

Страница 149: ... using the regenerative energy of the rotating rotor backup operation during a power failure The lowest rotational speed to which the magnetic bearing can operate at a power failure is called a backup rotational speed 1 When the rotational speed is approx 5 000 rpm or more at a power failure The STP pump detects any power failure of 2 seconds or more and decelerates At this time the POWER LED exti...

Страница 150: ...tion is reset automatically At this time the POWER LED illuminates and the FAILURE LED extinguishes Also POWER OUT pins 9 28 is closed and a failure signal is reset between FAILURE OUT pins 14 33 and 15 33 of the X2 REMOTE connector 2 When the START signal is input after a power recovery the STP pump reaccelerates even while it is in BRAKE state When the START signal is input after a power recover...

Страница 151: ...URE LED red flashes and a failure signal is output from the X2 REMOTE connector Note When the rotor contacts the touch down bearing contact noise and rotational noise of the touch down bearing are generated from the STP pump 7 1 5 Motor driver overload DRV Overload When the STP pump does not attain the rated speed within approx 30 minutes after starting or when the ACCELERATION state remains uncha...

Страница 152: ...put from the X2 REMOTE connector The heater is switched OFF and the cooling water unit is operated The STP pump decelerates and stops Continue to operate the cooling water unit until the temperature of the pump base is reduced at the setting value after the pump stops If the temperature of the STP pump base unit is lower than the setting value by 10 ºC 18 ºF or more due to the occurrence of an abn...

Страница 153: ...ctor The serial communication the STP Link optional accessory or the display unit iDT 001 optional accessory can confirm the error message and change the settings Refer to Section 5 Serial Communication Protocol the STP Link or the display unit iDT 001 Instruction Manual of the optional accessories for details No Warning FAILURE LED indication Priority 1 First Damage Limit Second Damage Limit Touc...

Страница 154: ...imit Second Damage Limit 3 flashes in orange Corresponding to warning type OFF OFF ON ON Close Open WARNING N O OUT between 6 24 WARNING N C OUT 6 25 Open Close Figure 61 WARNING output Note The WARNING detection cannot be reset by the RESET operation See Section 7 4 WARNING function setting for the releasing the WARNING detection The STP pump can operate even when the WARNING is detected Overhaul...

Страница 155: ...ccumulation of the damage point attains the setting value by further Disturbance and Power Failure Second Damage Limit detects the warning and a failure at the same time Overhaul the STP pump because the STP pump cannot perform the rotational operation when Second Damage Limit is displayed When operating the STP pump is needed after Second Damage Limit is displayed disable the Second Damage Limit ...

Страница 156: ...unction to disable after it is detected The setting can be changed via serial communication the STP Link optional accessory or the display unit iDT 001 optional accessory 7 3 5 Imbalance The STP pump continuously monitors its rotor balance The Imbalance is detected when imbalance of the synchronized rotor with the rotational speed exceeds the setting value When the deposit accumulates in the STP p...

Страница 157: ... Default setting User setting User setting change threshold Second Damage Limit Failure detection Enable Enable Disable Second Damage Limit Warning detection Enable Disable Disable First Damage Limit Enable Enable Disable Pump Run Time Over Disable Enable Enable Pump Overload Disable Enable Enable Imbalance Enable Enable Disable Table 43 Default setting of WARNING function WARNING function Factory...

Страница 158: ...nnecting cables from the STP pump power unit and or the cables to perform troubleshooting and take the necessary action confirm that the STP pump has stopped power off the primary power switch the MAIN POWER to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Failure to do so may result in the inadvertent rotation of the STP...

Страница 159: ... Failure Overspeed and other Steady red High 2 MOTOR Overheat CNT Overheat 3 flashes in red 3 DRV Overload 2 flashes in red 4 Disturbance 1 flash in red Low Table 45 Priority of failure signal 1 cycle Disturbance 䋨1 flash in red䋩 OFF 㸣Failure detection FAILURE LED indication X2 REMOTE output ON DRV Overload 䋨2 flashes in red䋩 MOTOR Overheat CNT Overheat 䋨3 flashes in red䋩 Corresponding to failure ...

Страница 160: ...with the recommended capacity or more Probable causes Excessive vibration applied externally to the STP pump 1 External vibration impact 2 Atmospheric air flows into the STP pump 3 Foreign materials fall into the STP pump 4 Sudden pressure change at start of roughing Abnormal magnetic bearing 1 Control circuit error 2 Disconnection of the internal wiring 1 High pressure at the inlet port 2 High pr...

Страница 161: ...ker again to recover Probable causes 1 Overheating during baking 2 Insufficient cooling 3 Leakage of the vacuum piping system 4 Repetitive start stop operations 5 Failure of the air cooling fan 1 High ambient temperature 2 Insufficient cooling of the control unit 3 Failure of the air cooling fan Atmospheric air flows the STP pump Occurrence condition Overheating inside the STP pump Overheating ins...

Страница 162: ... rotation does not stop after 30 min into brake state Stop Decelerate and stop Communication failure with motor control board Motor driver over current Motor driver over voltage Decelerate and stop Touch down The magnetic bearing output stops and the rotor is descended on the touch down bearing Pump operation Decelerate and stop Accelerate up to 2000 rpm or less Communication failure in the contro...

Страница 163: ...of the power unit isolate input power supply 3 minutes or more 2 Contact Service office 3 Contact Service office Probable causes Disconnection of the motor temperature sensor Failure of the control unit 1 Power failure 2 Incorrect connection of the power cable 3 Failure of the power cable 4 Failure of the power supply vlotage 1 Insufficient cooling of the power unit 2 Failure of the air cooling fa...

Страница 164: ...tion setting 2 Disconnection or break of the communication cable 3 Failure of the control unit Failure of the control unit 1 Cooling failure of TMS unit 2 Failure of TMS unit Occurrence condition Power supply circuit failure in control unit Failure of RAM check in MPU Damage point excees setting value Communication failure of the input operation port during acceleration and normal operation Abnorm...

Страница 165: ... unit 1 Disconnection of the TMS sensor 2 Disconnection of the external TMS connection cable 3 Failure of the external TMS connection cable 4 Incorrect setting of the TMS function Occurrence condition TMS temperature control error when the TMS unit detection temperature becomes lower than the setting value by 10 C 18 ºF or more Error is not detected for a certain time after the STP pump starts TMS...

Страница 166: ...ion INHIBIT signal input pins X2 REMOTE 1 5 are opened When not using this function short the circuits between 1 5 or open the circuits between 1 2 of the X2 REMOTE connector 3 Rotation INHIBIT signal does not function correctly Rotation INHIBIT enable signal input pins are opened Short the circuits between 1 2 of the X2 REMOTE connector 4 Insufficient ultimate pressure Failure of the backing pump...

Страница 167: ...ons on the STP pump and or the power unit confirm that the STP pump has stopped power off the primary power switch the MAIN POWER to OFF and isolate Lockout Tagout the electrical energy source water and gas and other energy sources on the vacuum equipment Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident an electric shock or damage to equipment...

Страница 168: ...pe of the vacuum equipment installed in the STP pump An increase in the amount of deposit may lead to a malfunction of the STP pump Therefore perform regular maintenance once every three to six months as a target Inspect the inside of the outlet port for adhesion of deposit while watching the outlet port If deposit has accumulated to some extent an overhaul cleaning is required Contact Service off...

Страница 169: ...e to accumulated wear of the protective plating material Other semiconductor process 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years No gases used Only vacuum pumping Other use 2 years Dependent on application contact Edwards 1 Etching includes semiconductor etching and LCD etching Note The rotor ...

Страница 170: ...ble for any troubles Always contact Service office before returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump and electrical parts particularly when corrosive reactive or flammable gases have been used x Seal the ventilation port of the control unit and power unit with vinyl tape or so forth x Vacuum and hermetically seal th...

Страница 171: ...urbomolecular Pump Nov 10 161 Issue 1 h MAINTENANCE AND INSPECTION 8 Back side A Control unit STP iXA2205C V Front side Back side B Control unit and power unit STP iXA2205CP V Figure 63 Method for sealing ventilation port ...

Страница 172: ...STP iXA2205 Series Turbomolecular Pump Nov 10 162 Issue 1 h MAINTENANCE AND INSPECTION 8 This page intentionally blank ...

Страница 173: ...ssed air from one side of the cooling water port so that no water remains in the STP pump 6 Store the power unit iPS 1200 in a horizontal position 7 DO NOT store the STP pump in the following areas x Areas of high humidity if it must be stored in a place of high humidity insulate it from the outside and use a dehumidifying agent x Areas prone to temperature extremes High temperatures of no more th...

Страница 174: ...If the STP pump has been used with reactive or corrosive gasses always clean thoroughly before disposing of it to avoid any injury Confirm the characteristics of gas to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier Dispose of the STP pump as industrial waste in accordance with all local and national safety and environmental standards Note Edwards will no...

Страница 175: ... world wide network of Edwards Service office Each Service office offers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service office can also provide Edwards engineers to support on site maintenance service or repair ...

Страница 176: ...le Connection cable between the STP pump and the control unit Dedicated cable for the integrated power unit type In the case of the separate power unit type the standard cable length is 5m 10 m and 20 m versions are available Contact Edwards for further information TMS unit 1 Control the STP pump temperature TMS heater and TMS valve are included STP Link 1 Windows application for operating or moni...

Страница 177: ...r more information contact the nearest Service Office Manufacturer Edwards Japan Limited 1078 1 Yoshihashi Yachiyo shi Chiba 276 8523 JAPAN Telephone Domestic 047 458 8822 International 81 47 458 8822 Facsimile Domestic 047 458 8833 International 81 47 458 8833 ...

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