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STP-iXA2205 Series Turbomolecular Pump
Nov. 10
123
Issue 1-h
5
SERIAL
COMMUNICATION
PROTOCOL
Example:
Pump operation mode
: 01
hex
= 1 = Levitation
WARNING being detected : 000C
hex
= 0004
hex
OR 0080
hex
=
"WARNING: First Damage Limit" and
"WARNING: Imbalance X_H"
The number of error
: 02
hex
= 2 errors
Error 1
: 0D
hex
= 13 = Disturbance Xh
Error 2
: 0F
hex
= 15 = Disturbance Xb
Error 3 to 32
: 00
hex
= No error detected
Parameter
1
2
3
4
5
6
7
8
9
10
ASCII
0 1 0
0 0 C 0
2
0 D 0 F 0
0
0
0
0
0 0 0 0 0
HEX
30 31 30 30 30 43 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30
Parameter
11
12
13
14
15
70
71
72
73
74
ASCII
0 0 0
0 0 0 0
0
0
0
0
0
0
0
0
0 0 0 0 0
HEX
30 30 30 30 30 30 30 30 30 30
[Omitted]
30 30 30 30 30 30 30 30 30 30
Parameter
75
76
77
78
79
80
81
82
ASCII
0 0 0
0 0 0 0
0
0
0
0
0
0
0
0
0
HEX
30 30 30 30 30 30 30 30 30 30 30 30 30 30 30 30
Содержание STP Series
Страница 22: ...STP iXA2205 Series Turbomolecular Pump Nov 10 12 Issue 1 h INTRODUCTION 1 This page intentionally blank ...
Страница 74: ...STP iXA2205 Series Turbomolecular Pump Nov 10 64 Issue 1 h INSTALLATION 3 This page intentionally blank ...
Страница 95: ...STP iXA2205 Series Turbomolecular Pump Nov 10 85 Issue 1 h 4 OPERATION Figure 55 X2 REMOTE output signal pins ...
Страница 98: ...STP iXA2205 Series Turbomolecular Pump Nov 10 88 Issue 1 h 4 OPERATION This page intentionally blank ...
Страница 172: ...STP iXA2205 Series Turbomolecular Pump Nov 10 162 Issue 1 h MAINTENANCE AND INSPECTION 8 This page intentionally blank ...