Chapter - 3
MNL000442.doc
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09/19/2016
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4
with a toxic gas detection system (customer supplied), and vented to a scrubbed
exhaust system The pressure decay technique requires the annular space to be
pressurized with inert gas (typically nitrogen) above the process gas delivery
pressure (typically 100 psi/ 6.9 barg) and monitored for decay with a pressure
switch. Pressure decay indicates either a process gas leak or jacket leak. It is
Versum Materials, Inc. recommendation, and standard practice, to configure this
alarm as a distribution system shutdown.
Note: The method of monitoring the outer secondary containment
for leaks may be dictated by local codes, such as the Toxic Gas
Ordinance
.
For coax tubing on silane lines, the
pressure decay method with an inert gas
(not air) must be used.
