Versum Materials GASGUARD AP10 Installation, Operation & Maintenance Manual Download Page 120

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MNL000443.doc

Revision 00

09/19/2016

Confidential and Proprietary Data

Page

4.4.2 Available External I/O Communications

Digital Outputs

Response

Gas unavailable

Notify process tool that gas is
unavailable

Digital Inputs

Response

Process tool down

Prevent GASGUARD System from
flowing process gas

Process gas leak

Shutdown GASGUARD System

Remote Shutdown

Shutdown GASGUARD System

Vent system unavailable

Prevents automatic purge modes from starting

Emergency Stop

Hardwired shutdown of GASGUARD
System; local reset required

Master Solenoid Permissive

Hardwired permissive for master
solenoid; allows remote inhibit of
master solenoid

Supervised Inputs

Response

Remote Shutdown

Shutdown GASGUARD System

Summary of Contents for GASGUARD AP10

Page 1: ... the revision and date shown All rights reserved Confidential and Proprietary Data Versum Materials Confidential Installation Operation Maintenance Manual GASGUARD AP10 Distribution Systems Manual Part Number 123224 Edition Rev 1 ...

Page 2: ... or in part without prior written consent of Versum Materials Inc The information and data should be available only to those with a need to know Versum Materials Inc makes no representation that the information and data is appropriate for the recipient and each recipient needs to independently evaluate the appropriateness of the information and data for its use This Installation and Operation Manu...

Page 3: ... and periodic calibration In no event shall Versum Materials be liable for any incidental indirect or consequential damages in connection with the purchase or use of any Versum Materials product This warranty shall not apply to and Versum Materials shall not be responsible for any loss arising in connection with the purchase or use of any Versum Materials product which has been repaired by anyone ...

Page 4: ... 1 Safety Warnings Rev 0 MNL000440 doc Initial Release Chapter 2 Dimensions and Mounting Rev 0 MNL000441 doc Initial Release Chapter 3 Tubing Connections Rev 0 MNL000442 doc Initial Release Chapter 4 Electrical Connections Rev 0 MNL000443 doc Initial Release Chapter 5 Helium Leak Testing Rev 0 MNL000444 doc Initial Release Chapter 6 Distribution System Functional Checklist Rev 0 MNL000445 doc Init...

Page 5: ...rved Confidential and Proprietary Data Page C 5 Versum Materials Confidential Chapter 10 Maintenance Rev 2 MNL000449 doc Updated pneumatic fitting replacement schedule Updated table formats revisions Chapter 11 System Specific Information Rev 1 MNL000453 doc Updated AP10 spares Appendix A Rev 0 MNL000450 doc Initial Release Appendix B Rev 0 MNL000451 doc Initial Release Appendix C Rev 0 MNL000452 ...

Page 6: ...so designed and built in accordance with the Uniform Fire Code UFC and the National Fire Protection Association NFPA The source equipment must be installed and operated in accordance with the UFC NFPA and all other applicable industrial federal state and local codes The source system must have excess flow shutdown emergency shutdown and over pressure protection and the source cylinders must contai...

Page 7: ...ations and customer leak test procedures Consult your local Versum Materials Inc technical representative if you need assistance in preparation of standard work instruction Section 1 Safety Warnings This section provides the safety information needed to safely operate the system Material Safety Data sheets for the gases and the instrument nitrogen supply The safety section is to be carefully read ...

Page 8: ...rview of the system Section 8 Operating Procedures This section contains the procedures to prepare the system for operation and to operate it Section 9 Troubleshooting This section provides guidelines for solving operating system alarm problems It is a general guide reference to manufacturers literature will be required in some cases Section 10 Maintenance This section provides a guide to routine ...

Page 9: ...9 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page C 5 Appendix B This Appendix contains the Versum Materials Inc Material Safety Data Sheet MSDS for N2 gas Appendix C This Appendix contains the Pressure Equipment Directive PED Assessment certificate for Gasguard Equipment ...

Page 10: ...al and Proprietary Data Page C 6 The table below provides a quick reference as to the applicability of the manual s sections Manual Section Supervisory Maintenance Operations 1 Safety Warnings 2 Dimensions and Mounting 3 Tubing Connections 4 Electrical Connections 5 Helium Leak Test 6 Distribution System Functional Checklist 7 System Description 8 Operating Procedures 9 Troubleshooting 10 Maintena...

Page 11: ...age C 7 The information and data contained herein are proprietary to Versum Materials Inc and are not to be copied reproduced duplicated or disclosed to others in whole or in part without prior written consent of Versum Materials Inc This restriction shall not apply to any safety information contained in the manual The safety information is intended for your use and we encourage you to copy it so ...

Page 12: ...ate to the user any hazards involved with the equipment The following paragraphs will define the hazard warnings used and describe the icons found in various sections of the manual and on the equipment The hazard warning labels used in the manual will correlate with those used on the equipment 1 1 1 Level or Intensity of Hazard Indicates an immediate hazard which if not avoided will result in deat...

Page 13: ... hazardous situation which if not avoided may result in a minor or moderate injury It may also be use to alert against unsafe practices 1 1 2 Hazard Types Symbols This symbol is a safety alert symbol This symbol represents asphyxiant toxic or corrosive gases Gases used with the Gasguard can cause personal injury or death This symbol can represent one or more of the following conditions ...

Page 14: ... flammable gas and air when exposed to an ignition source Pyrophoric gases which will ignite spontaneously without the presence of an ignition source when exposed to air Energy release which may result from pneumatic or hydraulic pressure rapidly escaping from a portion of the equipment This symbol represents flammable gases Gases used with the Gasguard can cause flammable atmospheres This symbol ...

Page 15: ...date shown All rights reserved Confidential and Proprietary Data Page 4 This symbol represents electrical shock hazard This symbol warns of potential strain or injury when lifting cylinders This symbol warns of a pinch hazard This hazard exists on cabinet doors equipped with automatic closers ...

Page 16: ...l rights reserved Confidential and Proprietary Data Page 5 This symbol warns of the possibility of the source system tipping over if it is not installed properly Personal injury could result This symbol indicates the need for head protection This symbol cautions against the improper anchoring of cabinets ...

Page 17: ...he system All operating and maintenance personnel must receive training and instruction by Versum Materials Inc All cylinder storage areas must be continually monitored with an air quality monitor to prevent the danger of a hazardous atmosphere Before using the system review your company s requirements for use of toxic corrosive flammable pyrophoric oxidizers and inert gas cylinders and electrical...

Page 18: ...3 Inert Gas Hazards High concentrations of nitrogen helium or other inert gases can cause an oxygen deficient atmosphere in a confined area which can cause DEATH All personnel must read and understand the material safety data sheet s MSDS for the specific gas es being used Oxygen concentrations of 19 5 or less can greatly increase the hazard of asphyxiation to personnel Before working in an area w...

Page 19: ...es will cause immediate unconsciousness Symptoms of asphyxia include Rapid breathing Nausea Vomiting Inability to move Convulsivemovements Collapse Abnormal pulse Rapid fatigue Faulty judgment Insensitivity to pain Abnormal emotions Remove any personnel in an oxygen deficient atmosphere to fresh air Get medical attention immediately Positive pressure breathing apparatus must be worn by any rescuer...

Page 20: ... area but within view of the other person This method ensures that the other person can respond in the event of an emergency 1 4 Pressurized Fluids Gases Pressurized gas and water sprinkler lines can injure personnel and damage equipment Never tighten or loosen a fitting when it is under pressure The house nitrogen supply lines can contain pressures of 100 psig 6 9 barg The water sprinkler lines c...

Page 21: ... VAC 50 60 Hz Do not attempt to work on the system without first turning the power off and tagging out and locking out the electrical supply disconnect switch per plant lock out procedures Follow the Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 1 6 Falling Equipment Hazard This system is a top heavy device If it is not pr...

Page 22: ... could tip over injuring crushing or possibly killing personnel in the area 1 7 Gas Cylinder Handling Hazard Improper handling and storage of compressed and liquefied gas cylinders could cause injury or death Restrain gas cylinders during storage and use Keep protective cap on cylinder when not dispensing gas Lifting gas cylinders could cause strain or injury See Safetygrams found in the Safety se...

Page 23: ...r technician level of training and qualifications The minimum personal protective equipment required for operating and maintaining the GASGUARD system is dependent on the hazard category of the gas es being used When a gas meets more than one hazard category the PPE for the most hazardous category must be used Refer to the hazard warnings in Section 1 10 for the hazards of the gas es being used In...

Page 24: ...here The gas sensor s need to be set up to alarm at the lowest level of hazard of exposure Upon activation of an alarm follow the established shutdown procedures for your system Scrubber with a pollution abatement system sized for maximum potential upset flow of hazardous gas Adequate ventilation as described in section 3 7 If you are unsure what personal protective equipment list to follow for th...

Page 25: ...e breathing apparatus Long sleeved Nomex suit Safety glasses with side shields Leather gloves Safety shoes NOTE Most highly toxics diborane germane phosphine are also flammable Nomex suit is not required for non flammable toxics ex nitrogen dioxide boron trifluoride All gases in Section 1 12 using the warning sign with POISON GAS on the left and FLAMMABLE GAS on the right REQUIRE the Nomex suit Pe...

Page 26: ...ety shoes NOTE Either air quality monitoring or self contained breathing apparatus is required for corrosive gases Versum Materials Inc recommends the use of both It is not required to use both however at least one MUST be used at all times Personal Protective Equipment for Pyrophorics Pyrophoric gas leak detection ex MDA Hard hat fire hat with brim recommended Long sleeved Nomex suit Face shield ...

Page 27: ...and Proprietary Data Page 16 Personal Protective Equipment for Flammables Hard hat fire hat with brim recommended Long sleeved Nomex suit Face shield Safety glasses with side shields Leather gloves Safety shoes Personal Protective Equipment for Inerts Oxygen depletion monitor Safety glasses with side shields Leather gloves Safety shoes ...

Page 28: ...k on the system before reading and understanding the following warnings The hazard warnings include Toxic Gases Hazards Corrosive Gases Hazards Flammable and Pyrophoric Gases Hazards Oxidizer Hazards Inert Gas Hazards Pressurized Gases Cylinder Handling Hazards Electrical Hazard Not all of the gas related hazards may apply to your system For example you may not be using any gases in the oxidizer c...

Page 29: ...s reserved Confidential and Proprietary Data Page 18 The Pressurized Gases Cylinder Handling Hazards and Electrical Hazard warnings apply to all GASGUARD systems The following is general information on typical gas hazards It is not a substitute for training and use of Material Safety Data Sheets by all operators ...

Page 30: ...any of these gases provide no physical warning signs i e coughing throat irritation burning sensations shortness of breath to alert personnel of exposure to toxic levels Personal protective equipment required for use with toxic gases is detailed in Section 1 9 of this manual A list of most of the toxic gases used in the GASGUARD system follows Ammonia Hydrogen fluoride Arsine Hydrogen sulfide Boro...

Page 31: ...ntial and Proprietary Data Page 20 Chlorine Phosphine Chlorine trifluoride Phosphine mixtures Diborane Phosphorouspentafluoride Diborane mixtures Silane Dichlorosilane Silicon tetrachloride Disilane Silicon tetrafluoride Fluorine Sulfur tetrafluoride Germane Trichlorosilane Hydrogen bromide Tungsten hexafluoride Hydrogen chloride ...

Page 32: ...ntrations of corrosive gases can cause severe irritation of the eyes and respiratory system At higher concentrations they can cause severe personal injury or death Section 1 9 of this manual lists the personal protective equipment required for use with corrosive gases A list of most of the corrosive gases used in the GASGUARD system follows Ammonia Hydrogen chloride Boron trichloride Hydrogen fluo...

Page 33: ...ition i e silane can accumulate up to a concentration of 2 molar percent number of moles of silane per fixed volume of air before spontaneous ignition occurs Pyrophoric gases will ignite in the presence of oxygen Flammable mixtures can burn or explode Fire and explosion hazards can be controlled by preventing the formation of combustible fuel oxidant mixtures and by eliminating sources of ignition...

Page 34: ...hich list the exhaust requirements per enclosure size for all gases NOTE To avoid any possible hazardous reactions i e fire explosion extremely corrosive or toxic mixtures never vent incompatible gases out the same duct Continually monitor the atmosphere Continually monitoring the atmosphere with a gas leak detector will alert the operator to a flammable or explosive atmosphere in the area NOTE Th...

Page 35: ... into them when the equipment is shut down Avoid venting of flammable gases through vents that do not contain an inert atmosphere Personal protective equipment required for use with pyrophoric and flammable gases is listed in Section 1 9 Note that the personal protective equipment PPE for pyrophorics differs from the flammables Be sure to use the proper PPE A list of most of the pyrophoric gases u...

Page 36: ... and system cleanliness Failure to comply with materials of construction and system cleanliness could result in injury or death Follow safe practices when using oxygen or oxidizers chlorine and fluorine Oxygen concentrations in excess of 23 significantly increase the hazard exposure to personnel and equipment Those materials which burn in air will burn more violently and explosively in oxygen oxid...

Page 37: ...ygen cleanliness at all times All equipment and piping in contact with oxygen or oxidizers must be cleaned to specifications outlined in CGA Pamphlet G 4 1 Contact your gas supplier or the Compressed Gas Association to order CGA Pamphlets Failure to clean components and piping increases the danger of ignition and fire Note that the cleaning solvent must be thoroughly removed before the equipment c...

Page 38: ...en system for personal breathing purposes A list of most of the oxidizers used in the GASGUARD system follows Chlorine Nitrogen trifluoride Chlorine trifluoride Nitrous oxide Fluorine Oxygen 1 10 5 Inert Gas Hazards High concentrations of nitrogen helium or other inert gases will cause an oxygen deficient atmosphere in a confined area which can cause DEATH All personnel must read and understand th...

Page 39: ...n the safety literature in Section 1 14 of this manual Any time an oxygen deficient atmosphere is suspected the proper personal protective equipment must be used See the information on personal protective equipment in Section 1 9 for details Personnel in an oxygen deficient atmosphere will not realize they are being asphyxiated Breathing of pure inert gases will cause immediate unconsciousness Sym...

Page 40: ...t when working with inert gases in confined spaces Self contained breathing apparatus is required cartridge or filter type gas masks cannot be used See the information on personal protective equipment in this section for details When entering a confined area or area which may contain high inert gas concentrations a Buddy System must be used One person should remain outside the suspect area but wit...

Page 41: ...rbon 22 Perfluoropropane Halocarbon 23 Sulfur Hexafluoride Halocarbon 113 Xenon Any gas in addition to those listed above used in the GASGUARD system could potentially displace the oxygen in the air and cause asphyxiation 1 10 6 Pressurized Gases Pressurized gas lines could injure personnel and damage equipment Never tighten or loosen a fitting when it is under pressure ...

Page 42: ...nted before breaking any connection Tag out and lock out the line before doing any work Follow Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 found in Section 1 11 1 10 7 Cylinder Handling Hazards High pressure gas cylinders could be extremely hazardous when not handled properly Proper training maintenance leak testing and ...

Page 43: ...tible gases could cause fires explosions or extremely corrosive or toxic mixtures which can cause personal injury or death If another type of gas is required for use in the gas source system contact Versum Materials Inc immediately A valve outlet sealing cap must be supplied on all toxic corrosive and pyrophoric gases Consult your gas supplier if there is no sealing cap on any of the above types o...

Page 44: ... the power off and tagging out and locking out the electrical supply disconnect switch per plant lock out procedures Follow the Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 found in Section 1 11 of this manual 1 10 9 Purge Gas Backstream Hazard Avoid low pressure condition in purge gas cylinder to prevent a backstream haz...

Page 45: ...pants who are trained to perform the work Occupational Safety and Health Admin Labor Para 1910 147 Although OSHA does not have jurisdiction outside the United States of America it is Versum Materials Inc recommendation that Lockout or Tagout procedures be followed except where local laws are more stringent General Lockout is the preferred method of isolating machines or equipment from energy sourc...

Page 46: ...ility Appropriate employees shall be instructed in the safety significance of the lockout or tagout procedure Name s Job title s of employees authorized to lockout or tagout Each new or transferred affected employee and other employees whose work operations are or may be in the area shall be instructed in the purpose and use of the lockout or tagout procedure Name s Job title s of affected employe...

Page 47: ... or water pressure etc must be dissipated or restrained by methods such as repositioning blocking bleeding down etc Type s of stored energy methods to dissipate or restrain 4 Lockout and or tagout the energy isolating devices with assigned individual lock s or tag s Method s selected i e locks tags additional safety measures etc 5 After ensuring that no personnel are exposed and as a check on havi...

Page 48: ... one individual is required to lockout or tagout equipment each shall place his her own personal lockout device on the energy isolating devices s When an energy isolating device cannot accept multiple locks or tags a multiple lockout or tagout device HASP may be used If lockout is used a single lock may be used to lockout the machine or equipment with the key being placed in a lockout box or cabin...

Page 49: ...rate any switch valve or other energy isolating device where it is locked or tagged Entry No Description 1 Name of Company 2 Type s and Magnitude s of energy and hazards 3 Name s Job title s of employees authorized to lockout or tagout 4 Name s Job title s of affected employees and how to notify 5 Type s and Location of energy isolating means 6 Type s of stored energy 7 Method s selected i e locks...

Page 50: ...00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 39 1 12 Safety Signs and Labels The following sign is located on the exterior door of the Gasguard cabinet ...

Page 52: ...ler This label is required if the GASGUARD source system is located in a Class I Division II rated area applicable only in United States systems are not Explosive Atmosphere Directive approved for use in the European community The following label appears inside cabinets containing cylinders It is located on the inside door approximately at eye level It is also located on the cylinder strap on both...

Page 53: ... 1 MNL000440 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 42 The following label appears inside doors of cabinets ...

Page 54: ...it could fall and injure crush or kill personnel working in the area The following eleven labels are specific to the gases being used They are located on the door of the GASGUARD cabinet They are identical to the labels on the process gas cylinder in the GASGUARD cabinet to provide verification that the correct process gas is being installed and used NOTE The signs shown below are United States DO...

Page 55: ...e shown All rights reserved Confidential and Proprietary Data Page 44 The following label would be used with the gases listed below it Boron trifluoride Phosphorous pentafluoride Chlorine Sulfur dioxide Carbon tetrachloride Sulfur tetrafluoride Nitrogen dioxide Tungsten hexafluoride Nitric oxide ...

Page 56: ...rights reserved Confidential and Proprietary Data Page 45 The following label would be used with the gases listed below it Boron trichloride Hydrogen fluoride Hydrogen bromide Silicon tetrafluoride Hydrogen chloride The following label would be used with the gases listed below it Fluorine Fluorine mixtures ...

Page 57: ... and date shown All rights reserved Confidential and Proprietary Data Page 46 The following label would be used with the gases listed below it Arsine mixtures Germane Carbon monoxide Hydrogen selenide Diborane mixtures Hydrogen sulfide Dichlorosilane Phosphine mixtures Diethyl telluride ...

Page 58: ...d Confidential and Proprietary Data Page 47 The following label would be used with the gases listed below it Acetylene Hydrogen mixtures Butane Isobutane Disilane Isobutylene Deuterium Methane Ethane Methyl chloride Ethand mixtures Methyl silane Ethylene Propane Halocarbon 32 Silane Halocarbon 41 Silane mixtures Hydrogen ...

Page 59: ... as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 48 The following label would be used with the gases listed below it Silicon tetrachloride The following label would be used with the gases listed below it Chlorine trifluoride ...

Page 60: ...e used with the gases listed below it Ammonia Halocarbon 125 Argon Halocarbon 128 Carbon dioxide Halocarbon C141B Halocarbon 11 Halocarbon C318 Halocarbon 12 Helium Halocarbon 13 Krypton Halocarbon 13B1 Neon Halocarbon 14 Nitrogen Halocarbon 21 Nitrous oxide Halocarbon 22 Perfluoropropane Halocarbon 23 Sulfur hexafluoride Halocarbon 113 Teteafluoroethane Halocarbon 115 Xenon Halocarbon 116 ...

Page 61: ...sum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 50 The following label would be used with the gases listed below it Oxygen Nitrogen trifluoride Oxygen mixtures Nitrogen trifluoride mixtures ...

Page 62: ...e source system Cabinet doors have self closing 1 4 thick wire reinforced safety glass windows Fault and Shutdown alarms notify the operator through the alarm horn light and alarm label on the controller of a problem with the system In addition the Shutdown alarms close all pneumatic valves and abort the controller program Excess flow sensors are installed when required to shut off the flow of gas...

Page 63: ...nstalled for pyrophoric gas systems A temperature switch is required in lieu of a UVIR detector for pyrophoric gas systems A temperature switch is required for flammable gas systems Pressure relief valves may be incorporated into the design to prevent overpressurization of the process line and downstream equipment and to protect the inert purge system Manual operation access is denied during the p...

Page 64: ...Compressed Gas Cylinders VERSUM MATERIALS INC Safetygram 11 Emergency Action in Handling Leaking Compressed Gas Cylinders VERSUM MATERIALS INC Safetygram 14 Don t Turn a Cylinder into a Rocket VERSUM MATERIALS INC Safetygram 15 Cylinder Safety Devices VERSUM MATERIALS INC Safetygram 23 Cylinder Valves Material Data Sheets for all gases used in system 1 15 Safety Literature for Handling and Use of ...

Page 65: ...ed in this section are intended for familiarization purposes For system specific details refer to the installation drawings supplied An installation drawing INS will be provided upon request 2 1 Outline Dimensions For overall dimensions see the following Outline Dimension figures Section 2 1 1 contains the 24 Distribution Systems 4 stick figures Section 2 1 2 contains the 30 Distribution Systems 6...

Page 66: ...ate shown All rights reserved Confidential and Proprietary Data Page 2 2 1 1 Outline Dimension Figures for 24 Distribution Systems 4 stick 2 1 1 1 24 Valve Manifold Box Rack 2 1 1 2 24 Valve Manifold Box Wall Mount 2 1 1 3 24 Valve Manifold Panel Rack 2 1 1 4 24 Valve Manifold Panel Wall Mount ...

Page 67: ...dential and Proprietary Data Page 3 Note Allow an additional 1 2 inch clearance for bolt heads on the back of the VMB Note Allow an additional 1 4 inch clearance for bolt heads on both sides of VMB 1 2 inch total Approximate Weight 275 Pounds 124 74 Kilograms Figure 2 1 1 1 Outline Dimensions 24 Valve Manifold Box Rack 4 stick ...

Page 68: ...ntial and Proprietary Data Page 4 Note Allow an additional 1 4 inch clearance for bolt heads on both sides of VMB 1 2 inch total Note Allow an additional 1 2 inch clearance for bolt heads on the back of the VMB Approximate Weight 200 pounds 90 72 kilograms Figure 2 1 1 2 Outline Dimensions 24 Valve Manifold Box Wall Mount 4 stick ...

Page 69: ...ter 2 MNL000441 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 Approximate Weight 275 pounds 124 74 kilograms ...

Page 70: ...441 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 6 Figure 2 1 1 3 Outline Dimensions 24 Valve Manifold Panel Rack 4 stick ...

Page 71: ...2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 Approximate Weight 200 pounds 90 72 kilograms Figure 2 1 1 4 Outline Dimensions 24 Valve Manifold Panel Wall Mount 4 stick ...

Page 72: ...own All rights reserved Confidential and Proprietary Data Page 8 2 1 2 Outline Dimension Figures for 30 Distribution Systems 6 stick or 8 stick 2 1 2 1 30 Valve Manifold Box Rack 2 1 2 2 30 Valve Manifold Box Wall Mount 2 1 2 3 30 Valve Manifold Panel Rack 2 1 2 4 30 Valve Manifold Panel Wall Mount ...

Page 73: ...16 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 Approximate Weight 300 Pounds 136 08 Kilograms Figure 2 1 2 1 Outline Dimensions 30 Valve Manifold Box Rack 6 stick or 8 stick ...

Page 74: ...Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 Approximate Weight 250 pounds 113 40 kilograms Figure 2 1 2 2 Outline Dimensions 30 Valve Manifold Box Wall Mount 6 stick or 8 stick ...

Page 75: ...16 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Approximate Weight 300 pounds 136 08 kilograms Figure 2 1 2 3 Outline Dimensions 30 Valve Manifold Box Rack 6 stick or 8 stick ...

Page 76: ...Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 12 Approximate Weight 250 pounds 113 40 kilograms Figure 2 1 2 4 Outline Dimensions 30 Valve Manifold Box Wall Mount 6 stick or 8 stick ...

Page 77: ...as calculated utilizing seismic accelerations specified by SEMI S2 93A The facility floor mounting location should be clean and must be level The GASGUARD Distribution System Wall Mounts are mounted to vertical walls or supporting structure using four 4 11 32 8 7 mm diameter holes two 2 ea in the horizontal Unistrut channels mounted to the back of the VMB system assemblies or six 6 13 32 10 3 mm d...

Page 78: ...Proprietary Data Page 14 2 2 1 Rack Anchoring for 24 Distribution Systems 4 stick For 24 rack anchoring see the following Mounting Hole Location Figure for proper floor location of four 4 9 16 14 3 mm diameter holes in the frame base 2 2 1 1 Mounting Hole Locations 24 Valve Manifold Box Rack 4 stick or 24 Valve Manifold Panel Rack 4 stick ...

Page 79: ... 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 15 Figure 2 2 1 1 Mounting Hole Locations 24 Valve Manifold Box Rack 4 stick or 24 Valve Manifold Panel Rack 4 stick ...

Page 80: ... Page 16 2 2 2 Rack Anchoring for 30 Distribution Systems 6 stick or 8 stick For 30 rack anchoring see the following Mounting Hole Location Figure for proper floor location of four 4 9 16 14 3 mm diameter holes in the frame base 2 2 2 1 Mounting Hole Locations 30 Valve Manifold Box Rack 6 stick or 8 stick or 30 Valve Manifold Panel Rack 6 stick or 8 stick ...

Page 81: ...___________ MNL000441 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 17 Figure 2 2 2 1 Mounting Hole Locations 30 Valve Manifold Box Rack 6 stick or 8 stick or 30 Valve Manifold Panel Rack 6 stick or 8 stick ...

Page 82: ...tubing connections are made at the top rear of the distribution system Connections that terminate with a VCR fitting are either capped or plugged at the factory and are ready for connection to the facility piping Connections that terminate with open tube ends are bagged for shipping purposes Process and purge lines are double bagged and taped for shipment Vent and venturi supply lines are single b...

Page 83: ...9 mm wall thickness Optional coax 1 2 12 7 mm diameter 0 049 1 2 mm wall thickness Optional process outlet 3 8 9 5 mm diameter 0 035 0 9 mm wall thickness Optional coax 5 8 15 8 mm diameter 0 049 1 2 mm wall thickness Venturi inlet 1 4 6 4 mm diameter 0 035 0 9 mm wall thickness Purge inlet 1 4 6 4 mm diameter 0 035 0 9 mm wall thickness Vent outlet 3 8 9 5 mm diameter 0 035 0 9 mm wall thickness ...

Page 84: ...provided only when specifically requested by the customer Please contact your Versum Materials Inc representative for assistance 3 2 Process Line Connection The process line connection can be furnished in one of two configurations Standard Bulkhead or Coaxial Bulkhead The standard bulkhead permits a single process out line to penetrate the enclosure while providing an acceptable seal for enclosure...

Page 85: ...coaxial bulkhead provides a termination point for an outer secondary containment tube The outer secondary containment tube or jacket is connected directly to the coaxial bulkhead The outer secondary containment continues through the coaxial bulkhead and terminates as a branch on the coaxial bulkhead inside the enclosure This branch on the outer secondary containment may remain open be dead ended o...

Page 86: ...ically nitrogen above the process gas delivery pressure typically 100 psi 6 9 barg and monitored for decay with a pressure switch Pressure decay indicates either a process gas leak or jacket leak It is Versum Materials Inc recommendation and standard practice to configure this alarm as a distribution system shutdown Note The method of monitoring the outer secondary containment for leaks may be dic...

Page 89: ...purging sequences run approximately 30 45 minutes Process gas can be introduced to the vent system at any time in the event of certain multiple component failures therefore the vent line and pollution abatement system should be capable of handling a full process gas cylinder release in the event of catastrophic failure When multiple gases are to be vented ensure compatibility before plumbing vents...

Page 90: ...hapter 3 MNL000442 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 8 Figure 3 4 Typical Trickle Purge Assembly ...

Page 91: ...cation is directed in an unsafe manner i e towards flammable construction materials personnel walkways etc or presents another potentially unsafe situation the outlet must be rerouted to a safe location during installation Gas detectors and or UV IR detectors should be used in the surrounding area to monitor for a potential leak For Enclosed systems Cabinets VMBs etc containing silane The Bonnet V...

Page 92: ...uum venturi Contact your Versum Materials Inc representative for design details The venturi line requires 75 95 psig 5 2 6 6 barg of nitrogen to adequately produce the vacuum needed during purge cycles The supply is usually taken from a bulk liquid source but it can also originate from a cylinder manifold system The vacuum generator will demand a flow of 50 60 LPM 106 127 CFH of nitrogen during pu...

Page 93: ...s Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 protection must be provided Do not exceed the distribution system component maximum allowable working pressure MAWP in the event of purge source regulator failure ...

Page 94: ...tic supply may be shared in the controller between the pneumatic solenoids and the enclosure inerting pressurizing service Z purge Clean dry air may promote the corrosion of electrical connectors for interconnecting power cables The presence of oxygen enhances the corrosion effect and may result in deterioration of controller performance This nitrogen supply needs to be regulated to 85 95 psig 5 9...

Page 95: ...ope this supply is also used for Type Z purge of the electrical enclosure The Type Z purge is required to maintain a positive pressure at or above 0 1 H2O 24 9 Pa as dictated by the National Fire Protection Agency NFPA and the European directives ATEX In applications where Type Z purge is required the controller will be equipped with a pressure switch to monitor the pressure The Type Z purge will ...

Page 96: ...ch as a safety relief valve must be provided for the internal solenoids 3 6 1 Z purge Procedure The Z purge pressure is controlled by a needle valve at rear of controller After opening the controller in a suspected hazardous area it is necessary to use the following procedure to re establish the Z purge before operating the controller 1 Close the controller front and tighten both latches completel...

Page 97: ...er 3 MNL000442 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 15 Figure 3 5 Rear View of GASGUARD AP10 Controller ...

Page 98: ...ntial operator exposure to hazardous gas 200 feet per minute average with 150 feet per minute minimum at any point 61 meters per minute average with 46 meters per minute minimum 3 In order to meet NFPA U S A only and Versum Materials Inc minimum recommended safety requirements for enclosed Silane gas service volumetric air flow through the cabinet must be at least 250 times the maximum potential l...

Page 99: ...haust system power and shut down interlocks comply with all applicable local state and federal codes i e UFC and NFPA code in U S Requirements The tables below list the exhaust requirement for the GASGUARD VMB enclosure to meet IFC and NFPA code requirements The tables below list the exhaust requirement for the Gasguard enclosures to meet the above code requirements Silane Exhaust rates apply to G...

Page 100: ...access hatch opening at all points 3 No Baffles were used on window or in interior 4 Exhaust rates apply to Gasguard Source System supplied VMBs only VMBs supplied by a bulk source must have a 0 040 inch or smaller orifice installed in the inlet connection in order to use these rates Table 1B Minimum Exhaust Requirements for Gasguard High Flow Enclosures Containing Silane to meet NFPA Requirements...

Page 101: ...to use these rates Table 1C Minimum Exhaust Requirements for Gasguard High Flow Enclosures Containing Disilane Dilution of maximum potential leak to LFL and meet former UFC Access Port Closed Access Port Open Enclosure Size 1 Exhaust flow cfm Static pressure in H20 Exhaust flow cfm Average Duct Velocity 1 CYLINDER Si2H6 325 0 31 350 1783 2 CYLINDER Si2H6 475 0 54 490 2496 Notes 1 All vent stack du...

Page 102: ...n is used 3 These exhaust flow values are applicable to the 30 inch and 24 inch standard flow Gasguard VMB enclosures 4 All standard Gasguard enclosures are sized for a 6 inch outer diameter OD duct connection to the vent stack 5 Access Hatch Closed values have been measured or calculated at the exhaust stack duct 6 The actual values presented in Access Port Open are from experiments done on a two...

Page 103: ...the exhaust pressure monitor Refer to the system s Specification Sheet to determine if this option is used 3 These exhaust flow values are applicable to the 30 inch and 24 inch standard flow Gasguard VMB enclosures 4 All standard Gasguard enclosures are sized for a 6 inch outer diameter OD duct connection to the vent stack 5 Access Hatch Closed values have been measured or calculated at the exhaus...

Page 104: ...ity pressure Velocity pressure Moving air creates a force or pressure component that can be measured by means of a pitot tube and differential pressure measuring device such as a pressure switch or pressure transmitter These devices can be used to verify exhaust flow and provide a visual digital or analog signal they only provide an approximation of the exhaust flow rate They cannot provide an acc...

Page 105: ...Chapter 3 MNL000442 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 23 Figure 3 6 Exhaust Hook Up Location ...

Page 106: ...om the purge gas inlet line and includes a manual shut off valve Weld Gas Inlet MV32 or MV30 It is located on the inside right of the enclosure where temporary tubing can be inserted and connected to the VCR fitting When the temporary gases are no longer required the valves should be closed and the VCR connection capped Do not connect high pressure gas directly to the weld gas port A pressure redu...

Page 107: ...for insertion of the vacuum hose from the leak detector into the enclosure for hookup to the VCR port When leak testing is complete the Leak Test Isolation Valve MV31 must be closed and the VCR port capped The Vent Isolation Valve MV22 or MV32 should be opened and left open during normal operation of the distribution system This port is for vacuum service only Do not connect pressurized gas to thi...

Page 108: ...rved Confidential and Proprietary Data Page 26 A hydride leak detection system is highly recommended for silane and other pyrophoric gases Although these gases will normally ignite and burn immediately when they leak to atmosphere under certain conditions they can pocket and detonate with devastating force A hydride monitor can detect leaking silane and shutdown the system eliminating or reducing ...

Page 109: ... National Electric Code NEC if installed in the United States Reference to the use of this equipment in Hazardous Locations only applies to installations located within the United States of America These systems are not Explosive Atmosphere Directive approved for use in the European Community by virtue of not being reviewed for compliance Range of Environmental Conditions 0 to 60 C Interior Operat...

Page 110: ...s responsible for connections to earth ground A ground lug is supplied on the controller as well as the plenum of the distribution system for customer hookup to the facilities grounding network Figure 4 1 shows a suggested grounding method for a typical system This drawing may not be applicable to your specific system NOTE 1 USE 4 AWG 25 mm WIRE FOR NON EMI RFI SYSTEMS USE ALPHA 1239 1 3 8 35 mm F...

Page 111: ...8 flat braid or equivalent for EMI RFI protected and CE marked systems The total length of grounding cable must not exceed 10 feet 3 meters After grounding the overall resistance must be measured The resistance for the equipment ground to the grounding electrode must not exceed one ohm 1Ω Check the effectiveness of grounding by attaching a wire to the nearest grounding electrode and connect an ohm...

Page 112: ...e This device should be rated as a minimum at 240 volts 3 amps 50 60 Hz and 10 000 rms symmetrical ampere interrupting capacity The device should be accessible to the operators marked as the disconnecting device for the distribution system and must have the on off position clearly marked for the operator The power input must be wired to the terminals shown below For additional detail on the power ...

Page 113: ...pply Terminal Connector Removable The power requirements are as follows 100 240 VAC 150 VA maximum Overvoltage protection Recommended Sizing 25 minimum over required load add all cabinet loads and divide by 0 75 NOTE Power wiring must be sized to deliver the required voltage at the rated current Voltages should be checked at each cabinet after installation to ensure proper levels ...

Page 114: ... Liquid tight flexible conduit can be installed between the GASGUARD AP10 connectors and the conduit seals to facilitate these connections A maximum length of 18 457 mm is allowed between the last pour fitting and the cabinet connector All conduits shall be sealed in accordance to Sections 501 5 502 5 or 504 70 of the National Electric Code See Figures 4 2 and 4 5 for details In classified hazardo...

Page 115: ...8 28 6 mm diameter hole for 3 4 conduit is supplied for connecting the 120 240 VAC power supply to the system The conduit hole is located on the top of the controller enclosure Two additional holes are supplied for customer I O See Figure 4 2 below Customer I O Conduit Customer I O Conduit120 240 VAC Conduit Figure 4 2 View of Top of GASGUARD AP10 Controller ...

Page 116: ...MNL000443 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 7 Figure 4 5 Conduit and Conduit Seals ...

Page 117: ...ntial and Proprietary Data Page 8 4 4 External I O Communication Connections between the GASGUARD AP10 controller and external I O devices are made at the terminal blocks located inside the controller on the back wall left side See Figure 4 6 for details on the location of the connections Digital Outputs Digital Inputs ...

Page 118: ...ended external I O communications and detail digital output and digital input connections Specific I O field wiring connections for this system are found on the drawings in the document envelope supplied with each system Additional I O circuit boards may have been purchased as an option with this specific system If so equipped termination for the additional points will be shown in the drawings loc...

Page 119: ...or normal operation alarm type and fault conditions A normally open switch is to be used as an input device This switch must have a 750 ohm resistor in parallel with the contacts When the switch contacts are open the circuit will provide a signal which represents a normal operating condition When the switch contacts are closed the circuit will provide a signal which indicates an alarm condition An...

Page 120: ...tal Inputs Response Process tool down Prevent GASGUARD System from flowing process gas Process gas leak Shutdown GASGUARD System Remote Shutdown Shutdown GASGUARD System Vent system unavailable Prevents automatic purge modes from starting Emergency Stop Hardwired shutdown of GASGUARD System local reset required Master Solenoid Permissive Hardwired permissive for master solenoid allows remote inhib...

Page 121: ...UARD System is equipped with a vent unavailable feature which prevents process gas from being vented from the panel if the scrubber system is not operating Use of this feature requires the installation of a hardwire between the controller and the scrubber Failure to utilize this feature may result in the discharge of process gas to a non functioning vent system ...

Page 122: ... and date shown All rights reserved Confidential and Proprietary Data Page 13 Digital Outputs Dry Main Processor Relay Pin Outs 24 VDC 1 Amp maximum Relay Output NO TB 307 COMMON TB 307 NC TB 307 1 4 3 6 2 8 7 10 3 12 11 14 4 16 15 18 5 20 19 22 6 24 23 26 7 28 27 30 8 32 31 34 ...

Page 123: ...l and Proprietary Data Page 14 Digital Outputs Optional Expansion NOTE Some systems may be equipped with an optional relay output circuit board in which case additional relays would be available 24 VDC 1 Amp max Relay Output NO TB 308 COMMON TB 308 NC TB 308 9 4 3 6 10 8 7 10 11 12 11 14 12 16 15 18 13 20 19 22 14 24 23 26 ...

Page 124: ...erved Confidential and Proprietary Data Page 15 Relay Output NO TB 308 COMMON TB 308 NC TB 308 15 28 27 30 16 32 31 34 Digital Inputs Customer Digital Inputs Pin Outs Digital Input Signal TB 309 24 VDC TB 309 33 2 5 34 4 5 35 6 7 36 8 7 37 10 9 38 12 11 39 14 13 40 16 15 41 18 17 42 20 17 43 22 19 44 24 19 ...

Page 125: ... connected GASGUARD Cabinets and VMBs Figure 4 7 shows the required daisy chain network wiring configuration between the GASGUARD AP10 controllers and the network host computer It is the customer s responsibility to install and ensure the integrity of all interconnect wiring between the GASGUARD AP10 controllers and the network host computer It is recommended that a suitable un interruptible power...

Page 126: ...ain processor board The main processor board is located on the bottom tier of the card cage The network connections are located at the back right side of the main processor board when viewed from the front of the controller and can be accessed by swinging out the card cage See Figure 4 8 for the location of the network connections on the main processor board Connection Figure 4 8 Bottom View of th...

Page 127: ... A 32 pin ribbon cable connects this box to the network host computer See Figure 4 9 for details of the pin connections on the Breakout Box Figure 4 9 PC Network Break Out Box 4 5 4 PC Network Field Wiring Figure 4 10 shows the PC network field wiring between GASGUARD cabinets VMBs and the host PC Cable specifications follow Recommended cable Belden specification 9842 Acceptable alternates Belden ...

Page 128: ...rd RJ 45 Connector Wiring Color Codes Network Host Lap Top RS 422 Converter 9 Pin Sub D GASGUARDAP10 1 White Orange Stripe R 2 1 T 2 Orange R 7 2 T 3 White Green Stripe T 8 3 R 4 Blue 5 White Blue Stripe 6 Green T 3 6 R 7 White Brown 8 Brown Shown Pins side 8 1 RS 232 to RS422 Converter To Order Saelig Company 1193 Moseley Rd Victor NY 14564 Figure 4 10 Network Field Wiring Between Cabinets VMBs a...

Page 129: ...4 5 5 MMMS Network Wiring Configuration Figure 4 11 shows the MMMS GASGUARD Network Wiring Configuration Ethernet Hub 10BASE T Ethernet Typical Customer Scope MMMS Station MMMS APx Interface Box Typical VERSUM MATERIALS INC Scope Typical Customer Scope Cable to Cabinet LR300 connections Figure 4 11 MMMS Network Interface 4 5 6 MMMS Network Interface Box ...

Page 130: ...SE T Ethernet connection and an AUI type Ethernet connection on its rear apron This Ethernet connection is used for connecting the communications processor to the MMMS Station The provided AUI port can be used in installations where the Ethernet connection available is other than 10BASE T and accepts a variety of standard Ethernet converter modules The MMMS Network Interface Box was designed to al...

Page 131: ...tional space to allow for the field installation of an additional communications processor and an addition bank of RS 485 converter boards to expand the number of available ports from 16 to 32 4 5 7 MMMS Network Field Wiring Figure 4 12 shows the MMMS network field wiring between GASGUARD cabinets VMBs and the GASGUARD Interface Box Cable specifications follow Recommended cable RJ 45 Category 5 10...

Page 132: ...tems and all applicable codes A suitable helium leak detector is required to attain the level of sensitivity required by the above standard There are several methods of helium leak testing The two most often used are Inboard The component being tested is evacuated to a negative pressure and sprayed externally with helium Outboard The component is pressurized with helium and sniffed externally with...

Page 133: ...e sale and scope review of the project Contact your Versum Materials Inc representative to discuss this To operate these valves the pneumatic supply hookup Section 3 6 of this manual and the electrical power connection Section 4 2 of this manual installation must be completed How to Perform Helium Leak Checking in Manual Mode Operating in Manual Mode can cause the following hazards which can resul...

Page 134: ...contamination of the gas panel NOTE A pneumatic supply connected to the controller with 85 95 psig 5 9 6 6 barg of nitrogen must be available to actuate the valves NOTE Shutdown alarms indicated by the red SHUTDOWN LED being lit will not allow you to access and open valves in manual mode therefore making a leak test invalid If a shutdown alarm is present contact an Versum Materials Inc representat...

Page 135: ...bination of the drop down menu and the left and right arrow keys 3 Press the Manual Mode pushbutton 3 1 Another window will pop up entitled Manual Mode 3 2 A legend located on the graphics panel indicates AP10 Controller Green valve closed Red valve open 4 Follow the procedures below to open and close valves Valves that can be controlled manually are shown highlighted with a yellow square box arou...

Page 136: ...se a valve 4 1 Select the valve by touching the screen Extreme care must be taken when operating valves manually Only those valves required for adequate leak testing should be opened 5 When leak testing is complete press Cancel to return to the Main Menu NOTE Any valves left in open position will be closed automatically 6 From the Main Menu screen press Logout to return to normal display ...

Page 137: ...____________________ MNL000444 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 9 Distribution System must not be left unattended in Manual Mode as access to the system in Manual Mode is open to anyone ...

Page 138: ...nal check must be made prior to start up The functional check is an additional service provided for a cost The cost of this service may have been pre arranged during the sale and scope review of the project Contact your Versum Materials Inc Representative to discuss this The Versum Materials Inc Technical Representative and or Megasys Technician will ensure that all the mechanical and electrical c...

Page 139: ... System and controller and checked for less than 1 ohm resistance see Section 4 1 4 Electrical power 120 240 VAC 50 60 Hz connected see Section 4 2 5 Remote I O wiring installed and checked see Section 4 4 6 GASGUARD Network wiring installed if applicable and configured on the host see Section 4 5 7 Process lines installed and helium leak tested see Section 3 2 8 Vent line installed and helium lea...

Page 140: ...ply connected to controller and 85 95 psig max 5 9 6 6 barg of nitrogen available see Section 3 6 12 Distribution system internal piping helium leak tested see Section 5 13 Purge cylinder available if required 14 Hazardous gas monitor installed and operating InspectionSign Offs Electrical Mechanical Quality Safety VERSUM MATERIALS INC Field Start Up Checklist Complete ...

Page 141: ...Distribution System labeled correctly per Specification Sheet No nylon collars stripped Distribution System information received circle Specification Sheet Flow Schematic Customer I O Drawing Inspection and Test Sheet leak test and certification Quality Inspection and Test Sheet functional test Installation and Operation Manual All open connections sealed General appearance satisfactory Verify lea...

Page 142: ...sum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 Purge cylinder installed Gas detection system operational Secondary containment installed SECTION COMPLETED SIGNATURE DATE Notes ...

Page 143: ...it boards eproms and ribbon cable connections caution remove power before removing eproms or circuit boards E stop guard in place Remove pneumatic bulkheads from the back of the controller Do all valves operate Manual mode operation No audible solenoid leaks Re install pneumatic bulkheads from the back of the controller Firmware versions Core Display I O Network Core boot loader Display Boot Loade...

Page 144: ...ights reserved Confidential and Proprietary Data Page 7 Verify port and loop indicated on the controller Network addressed Distribution system name Port number Loop number Distribution system communicating with network Controller door adjustment Z purge set 0 1 H2O SECTION COMPLETED SIGNATURE DATE ...

Page 145: ...page 3 of 8 CALIBRATION Verify analog scaling psig with program documentation Transducers must be powered up a minimum of 15 minutes Zero and span should be checked a minimum of 4 times to insure repeatability Check and record the pressure before and after calibration in psig Analog Label Zero Zero Span Span Completed Before after before After 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 SECTION COMPLET...

Page 146: ... Supervised Input 2 FAULT 8 Supervised Input 2 ALARM 9 Left Terminal Box Switch 1 10 Left Terminal Box Switch 2 11 Left Terminal Box Switch 3 12 Left Terminal Box Switch 4 13 Left Terminal Box Switch 5 14 Left Terminal Box Switch 6 15 Left Terminal Box Switch 7 16 Left Terminal Box Switch 8 17 Left Terminal Box Switch 9 18 Left Terminal Box Switch 10 19 Left Terminal Box Switch 11 20 Left Terminal...

Page 147: ...Customer Digital Input 5 38 Customer Digital Input 6 39 Customer Digital Input 7 40 Customer Digital Input 8 41 Customer Digital Input 9 42 Customer Digital Input 10 43 Customer Digital Input 11 44 Customer Digital Input 12 SECTION COMPLETED SIGNATURE DATE NOTES FUNCTIONAL TEST RELAY OUTPUTS Check off line item when completed Sign and date when section is completed Standard Board Outputs Main Proc...

Page 148: ...9 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 11 Relay 10 Relay 11 Relay 12 Relay 13 Relay 14 Relay 15 Relay 16 SECTION COMPLETED SIGNATURE DATE NOTES ...

Page 149: ...e item when completed Sign and date when section is completed Branch 1 4 A D Branch 5 8 E H User Alarm set points listed and verified List changes in this column Alarm Label Setpoint SECTION COMPLETED SIGNATURE DATE FUNCTIONAL TEST PROGRAM MODES Check off line item when completed Sign and date when section is completed Distribution System Programs Branch 1 4 A D Branch 5 8 E H Process gas flow Sti...

Page 150: ... date when section is completed Branch 1 4 A D Branch 5 8 E H Verify purge parameters per software documentation Verify alarm conditions per software documentation Verify VERSUM MATERIALS INC set points per Distribution system cleaned inside and out Suggested Customer Signoff Optional Date Signature Section Required Not required Circle one Exhaust signed off Electrical Signed off Safety signed off...

Page 151: ... 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 14 VERSUM MATERIALS INC APx DISTRIBUTION SYSTEM FIELD START UP CHECKLIST page 8 of 8 Comments I have received and understood training on the operation of this Distribution System on the date given below Name ...

Page 152: ...equirements of the National Fire Protection Agency NFPA Uniform Fire Code UFC Toxic Gas Ordinance TGO and Semiconductor and Equipment and Materials International SEMI 7 1 Valve Manifold Enclosure The function of the GASGUARD Valve Manifold enclosure is to ensure a safe environment for personnel during operation and maintenance or in the unlikely event of a leak of hazardous gas For certain areas a...

Page 153: ...ructed of 12 gage steel with fully welded seams and protected with corrosion resistant polyurethane paint or polyester powder coat finish Two enclosure sizes are available to hold up to four or eight manifold Branches An exhaust stack is provided for connection to the customer s exhaust system The enclosure has a 12 gage steel door with a window constructed of 1 4 thick wire reinforced safety glas...

Page 154: ...MNL000446 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 Figure 7 1 Typical GASGUARD Distribution System ...

Page 155: ... in a hazardous situation using fail safe pneumatic control valves Pneumatic control valves can be used to shut off process gas flow to control purge gas flow into the process panel to vent process gas and purge gas from the panel and to feed inert gas to the vacuum venturi system Excess flow sensors are used on individual Branches to initiate a Branch shutdown if a downstream excess flow conditio...

Page 156: ...shown All rights reserved Confidential and Proprietary Data Page 5 7 3 Panel Schematic and Component Descriptions 7 3 1 Panel Components Figure 7 2 is a flow schematic for a typical four branch Distribution System The function of each component on the schematic is described in the table ...

Page 157: ...mponents Most valves have the option of being either pneumatically or manually controlled In certain cases the pressure transducers may be replaced with another type of pressure monitor i e switch gage transmitter Valve numbering is repeated for Branch 5 and 6 of a six branch Distribution System or Branch 5 through 8 of an eight branch Distribution System V1 Process In Emergency Shutoff Valve Opti...

Page 158: ... V6 Low Pressure Vent Valve branch 1 4 A D This pneumatic control valve isolates process gas flow stream of each branch from waste gas vent system V7 Venturi Supply Valve This pneumatic control valve controls Nitrogen Supply for vacuum venturi operation V8 Opposing Purge In Gas Valve branch 1 4 A D This optional pneumatic control valve isolates purge gas to each process gas branch downstream of pr...

Page 159: ...e branch 1 4 A D This manual valve isolates process gas flow for each individual branch from the waste gas vent system Provides dual isolation with V6 MV9 Process Isolation Valve branch 1 4 A D These manual valves isolates each individual process gas branch line from their respective house delivery line MV21 Purge In Isolation Valve Manual valve isolates purge gas supply from the Distribution Syst...

Page 160: ... valve MV21 PCV1 Pressure Control Valve branch 1 4 A D This regulator controls the pressure of each individual process gas flow stream PT1 Pressure Transducer for Process Gas Supply This device measures the process gas source pressure at the inlet to the Distribution System panel PT2 Pressure Transducer for Process Gas Delivery branch 1 4 A D This transducer measures the delivery gas pressure for ...

Page 161: ...component leak valve or regulator failure etc and sends a switch signal to the controller to shutdown the system Filter Optional This device removes particles from the gas stream Check Valve CV This safety device is used to prevent backflow of gas into another section of the system Vacuum Venturi This device is used to pull a vacuum on the process panel during purge cycles It uses a flow of nitrog...

Page 162: ...lity of shutting down the system if an unsafe condition arises The controller screen allows the operator to easily understand the operation and to quickly identify operating problems Closed valves are indicated in green open valves are indicated in red The path of gas flow is indicated by a dashed line The status of each Branch is displayed in the middle of the top of the screen Any shutdown alarm...

Page 163: ...00446 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 12 Figure 7 3 GASGUARD AP10 Distribution System Controller ...

Page 164: ...ystem gas panel shutdown and fault alarm boxes a Branch status box and the selection window The screen that is displayed when the system is powered up is shown below Figure 7 4 GASGUARD AP10 Distribution System Power Up Screen The selection window is located either to the left or right side of the screen after successfully entering the password It presents prompts and menu selections The Main Menu...

Page 165: ...terials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 14 Figure 7 5 GASGUARD AP10 Lines 1 through 4 of 8 Branch Distribution System Main Menu Figure 7 6 GASGUARD AP10 Lines 5 through 8 of 8 Branch ...

Page 166: ...rm occurred will be displayed with each alarm The BRANCH STATUS box is located in the top center of the screen and displays the current status of each Branch Refer to Figure 7 7 Figure 7 7 Alarm and Branch Status Boxes Source System Information The source system information window can be reached by touching the blue title button at the bottom of the screen This window displays the firmware network...

Page 167: ...ted to the right of the LCD display The table below describes these LEDs and their functions LED Function SHUTDOWN ALARM This LED flashes red on power up and for an un acknowledged shutdown alarm Once acknowledged the LED stops flashing but remains red until it is reset FAULT ALARM This LED flashes yellow on power up and for a fault alarm Once acknowledged the LED stops flashing but remains yellow...

Page 168: ...e valves until the button is pulled out to its normal position Refer to Figure 8 1 for details on the Emergency Stop pushbutton Screen Saver For all display types the screen saver will blank the screen and a randomly moving mode indicator box will appear on the screen The screen saver function will become active when the programmed amount of time has elapsed since the last operator touch screen ac...

Page 169: ...00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 18 USB Devices The AP10 Controller is furnished with two USB ports USB Ports Figure 7 8 USB Ports ...

Page 170: ...l actions performed using the touch screen can also be achieved using a mouse This may become necessary in the event of a touch screen failure For the mouse icon to appear move the mouse at a 45 degree angle to the upper left hand corner and right click This will enable the cursor Notes On Highlighting Text In the Controller Configuration menu it is possible modify setpoint password and other nume...

Page 171: ...7 5 Basic GASGUARD AP10 Controller Operation 7 5 1 Security Code Protection A password security system is built into the AP10 controller operation to prevent operation by untrained and unauthorized personnel The controller will not respond to keypad operation unless an operator correctly enters his assigned 5 8 character password when requested Four levels of password security provide added protec...

Page 172: ...ure The Menu Time Out Feature causes the controller to drop out of the Main Menu automatically if a menu option is not selected within the configured time period This safeguard prevents unauthorized operation if an operator leaves a cabinet before selecting a menu option 7 5 2 2 User Entry Time Out Feature Operator Prompts may appear on the LCD display during some operating sequences After complet...

Page 173: ... selected Branch or stops flow if the Branch is currently flowing gas The start sequence enables all Branch specific process alarms and checks for adequate process gas pressure If problems are found an alarm is displayed Details of these alarms are located in Section 11 System Specific Information of this manual If no problems are found flow is started and continues until a process stop is selecte...

Page 174: ...ne Purge This purge sequence consists of flowing purge gas continuously through the Line and downstream process line The gas is vented through a vent valve at the tool or through the tool itself This purge process is used to reduce the concentration of hazardous gas to safe levels to allow maintenance to be performed on the process line The customer must establish a purge time to reach a safe leve...

Page 175: ...cific Information provided with the equipment to determine which process line purging sequence is installed for this system 7 6 Configuration Menu The configuration menu contains a collection of files that are used to define the operation of the AP10 controller The files establish operating sequences for valves during various operating modes define digital alarm responses and establish setpoints f...

Page 176: ...s weld shield gas and certification gas during system installation and start up procedures It also provides a means of flowing purge gas while maintenance or repairs are being performed Access to Manual Mode operation is restricted to 2nd or higher level supervisory personnel See Section 8 6 for detailed instructions for Manual Mode operation Only experienced operators should operate the Distribut...

Page 177: ... System Controller 8 3 New System Startup Procedure 8 4 Line Purge and Process Line Purging Procedures 8 5 Process Gas Flow Procedure 8 6 Manual Mode Operation 8 7 Password Security 8 8 System Configuration Be sure you have read and understood the safety information located in Section 1 of this manual before operating the system You should also be familiar with the location and function of all com...

Page 178: ...y experienced trained operators thoroughly familiar with this manual the equipment and operating procedures the hazards and the safety procedures are permitted to operate this system 8 1 Emergency Shutdown Procedure In the event of an emergency press the EMERGENCY STOP pushbutton on the controller panel See Figure 8 1 below This will close all valves any process or purge program is aborted the ala...

Page 179: ...447 doc Revision 0 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 3 Emergency Stop Figure 8 1 Emergency Stop Pushbutton Location ...

Page 180: ... controller The 120 VAC 240 VAC power is still active within the controller Do not perform maintenance on the controller without disconnecting or switching off power externally and following the required Lockout or Tagout procedures If it is necessary to re enter the area while a hazardous atmosphere is suspected the proper Personal Protective Equipment PPE must be worn See Section 1 8 of this man...

Page 181: ...he screen that is displayed upon power up There are two power up selections One will allow the controller to run a previously running process gas sequence or the other is to alarm upon power up For the one that presents the power up alarm press the Shutdown Alarm Status window once to acknowledge any alarms Then press the Shutdown Alarm Status window again to reset any alarms Touch anywhere on the...

Page 182: ...a Page 6 A window like the one on the right will open on the screen Enter the password using the numbers on the keypad Example Enter the password 11234 where the level of access precedes the password Press OK If an improper password is entered the screen will look like the one to the right Invalid Password will appear at the bottom of the window ...

Page 183: ...ata Page 7 If using a dual controller the screen will default to display the left side Use the and keys to select the left or right panel Use the drop down menu to select a process line Note Selections that appear dimmed are not selectable at this point of the controller sequence All sequences require the operator to follow an executable order ...

Page 184: ...ith NFPA 496 and ATEX regulations regarding electrical equipment enclosures Failure to do so could result in the ignition of any flammable gas which may be present 1 Verify that the system is ready for startup by completing the startup checklist in the installation manual Check that the GASGUARD Distribution System and all plant piping have been leak checked with a helium mass spectrometer in acco...

Page 185: ... of the Explosive Atmospheres Directive ATEX applicable in the European Community Type Z purge does not meet Class I Division I NEC requirements 7 No alarms should be present If alarms are present do not continue Follow the troubleshooting procedures found in Section 9 If needed contact your Versum Materials Inc factory representative for assistance 6a When requested by the customer partially popu...

Page 186: ...should be properly labeled and disconnected from the valve 8 Check that all automatic valves indicate closed position green They should appear as illustrated to the right 9 Begin by closing the regulators knob rotated fully counter clockwise Adjust each regulator clockwise 6 turns This will ensure an adequate purge pressure downstream of the regulators when purging is initiated in step 14 ...

Page 187: ...rops below 200 psig 11 Ensure MV4 1 purge gas inlet valve is open 12 Touch anywhere on the graphics portion of the screen and enter the password 13 Using the dropdown menu on the Main Menu screen highlight the Line you want to operate 14 From the Main Menu select START ROUGH LINE 15 Went prompted by the Confirm Sequence Start Window hit CONFIRM Note If manual valves must be opened or closed or the...

Page 188: ...d manual mode operations 16 At the end of the purge cycle the Line status box at the top of the screen will indicate ROUGH LINE COMPLETE 17 Verify the process gas source is on line and set at the desired delivery pressure PT1 process gas inlet maximum 90 PSIG 18 Ensure MV1 process gas inlet manual valve is open 19 Touch anywhere on the graphics portion of the screen and enter the password 20 Selec...

Page 190: ... Line 23 Adjust the Line regulator through the access window to the desired delivery pressure 24 Process gas is now flowing to the process equipment With process gas flowing through Line 1 the valves on the graphic display will appear as illustrated to the right 25 Note the color coding key on the graphic Color screen Red valve open Green valve closed Isolate downstream process equipment from the ...

Page 191: ...m the selected Line prior to maintenance or other operations on the Line that require removal of hazardous gas to safe levels NOTE A process line purging procedure rough line evac or flow purge must be performed on the Line before the Line purge can be initiated This reduces the concentration and pressure 0 psig of hazardous gas in the Line downstream of the manual Line outlet valve MV9 1 9 2 9 3 ...

Page 192: ...select START ROUGH LINE 4 Went prompted by the Confirm Sequence Start Window hit CONFIRM 5 ROUGH LINE will appear in the appropriate Line status box at the top of the screen 6 Follow prompted manual steps on the screen 7 The controller will make several checks for adequate purge pressure and vacuum and proper closure of the manual process isolation valve for the Line Any fault will stop the proces...

Page 193: ... are open red and the dashed line indicates the gas flow path 10 During pressurization valves 6 1 and 7 will close green and the purge valve for Line 1 valve 4 1 will open red The screen to the right displays this portion of the purge sequence for Line 1 11 To stop the purge sequence before completion press the STOP ROUGH LINE button on the Main Menu If the Line purge sequence is interrupted the f...

Page 194: ...non hazardous levels required for maintenance operations A manual purge of the Line 1 and process line through the tool must be completed prior to any maintenance operations 1 Verify that the appropriate valves at the process tool have been closed to isolate the process line from the process tool gas panel 2 Touch anywhere on the graphics portion of the screen and enter the password 3 Using the dr...

Page 195: ...initiate a sequence of evacuation and pressurization steps until the configured number of cycles are completed 10 To stop the purge sequence before completion press the STOP ROUGH LINE button on the Main Menu If the Line purge sequence is interrupted the full procedure will be repeated when restarted 11 When completed the major portion of the hazardous process gas in the process line has been remo...

Page 196: ...aintenance to be performed on the process Line 1 and downstream components It is the customer s responsibility to establish a purge time to reach safe levels based on line length purge flow rate and type of process gas The vented gas should be monitored for residual gas concentration before maintenance is performed Flow purging can also be performed using Manual Mode 1 Verify that the appropriate ...

Page 197: ...creen 7 The flow through purge will continue until the operator initiates STOP FLOW PURGE 8 Touch anywhere on the graphics portion of the screen and enter the password to obtain the Main Menu 9 Select appropriate process line using the dropdown menu 10 Select STOP FLOW PURGE 11 When the Flow Purge has been completed for the customer s required time duration the concentration of hazardous gas has b...

Page 198: ...uipment is prepared to receive process gas 1 Touch anywhere on the graphics portion of the screen and enter the password 2 Using the dropdown menu on the Main Menu screen highlight the process line you want to operate 3 From the Main Menu select START PROCESS 4 Follow any prompted manual steps on the screen 5 The appropriate valve will open valve 2 1 for Line 1 dashed line will show the path of ga...

Page 199: ...rietary Data Page 23 8 5 2 Stop Process Gas Flow 1 Touch anywhere on the graphics portion of the screen and enter the password 2 Using the dropdown menu on the Main Menu screen highlight the process line you want to operate 3 From the Main Menu select STOP PROC GAS 4 The appropriate process inlet valve will close valve 2 1 for Line 1 ...

Page 200: ...em installation and pre start up procedures It also provides a means of flowing purge gas while maintenance or repairs are being performed Manual mode should not be used for process gas flow as critical shutdown alarms may be disabled NOTE Access to Manual Mode is not permitted when a digital Shutdown alarm condition is present 8 6 1 How to Operate in Manual Mode Operating in Manual Mode can cause...

Page 201: ...nual Mode operation requires a second level or greater security code 1 Touch anywhere on the graphics portion of the screen and enter the password 2 Using the dropdown menu on the Main Menu screen highlight the process line you want to operate 3 From the Main Menu select MANUAL MODE 4 The MANUAL MODE window will display 5 Operate valves referring to Section 8 6 2 below 6 To exit MANUAL MODE press ...

Page 202: ...troller while this feature is active Distribution System must not be left unattended in Manual Mode as access to the system in Manual Mode is open to anyone 8 6 2 ow to Open and Close Valves To open a valve 1 Select the valve by touching the screen The valves that can be operated from the screen will be highlighted with a yellow box 2 The valve confirmation window will appear asking you to confirm...

Page 203: ...ations The operator must understand the consequence of opening a valve before performing this step All Line manual purge and vent valves must be returned to closed positions after completion of Manual Mode operations To SECURE Manual Mode 1 The Secure option will allow an operator to exit the Manual Mode menu while remaining in manual mode with valves open The Secure option will not be selectable ...

Page 204: ...t not be left unattended in Manual Mode as access to the system in Manual Mode is open to anyone 8 6 3 General Principles of Manual Operation Open valves in sequence starting at the first valve downstream of the pressure source and continuing to the next valve in sequence For vacuum operation open the valve closest to the vacuum source and continue to open the next valve in sequence Close valves i...

Page 205: ...personnel The first security level allows normal sequence selection start and stop process flow and purge procedures Access to Manual Mode and the Configuration Menu is not permitted The second security level allows access to Manual Mode and the Configuration Menu It permits the user to change certain operating parameters to view other menu selections and restricts access to others files The third...

Page 206: ...roller files may be modified using a second or third level security code These modifications are referred to as the source system configuration The source system configuration may be accessed from the CONFIGURATION MENU option on the Main Menu From the CONFIGURATION MENU you may display some configurable parameters and change user configurable parameters The CONFIGURATION MENU will appear as illus...

Page 207: ...may be changed only by Versum Materials Inc technical personnel Table 8 2 Source System Permissions Section Configuration Menu Options Sub Menu Options Level 2 Level 3 8 8 1 Net Product W W 8 8 2 User Analog Setpoints R W 8 8 3 Subcycle Parameters R W 8 8 4 Leak Test Parameters R W 8 8 5 System Test W W 8 8 5 1 Test Digital In W W 8 8 5 2 Test Digital Out W W 8 8 5 3 Test Analog In W W 8 8 5 4 Tes...

Page 208: ...on and date shown All rights reserved Confidential and Proprietary Data Page 32 Section Configuration Menu Options Sub Menu Options Level 2 Level 3 8 8 17 Alarm Sequences R 8 8 18 Relay Defaults R 8 8 19 Helium Leak Check W 8 8 20 1st Security List W 8 8 21 2nd Security List W ...

Page 209: ... 2 Network Setup R Enable Disable Network Control R RS 485 Channel Number R Ethernet Channel Number R Network Comm Type R 8 8 25 3 IP Settings R 8 8 25 4 Peer to Peer IP Settings R 8 8 25 5 Set Product Code R 8 8 26 Config Transfer W 8 8 26 1 Controller to USB Transfer W 8 8 26 2 USB to Controller Transfer W 8 8 27 Memory Management 8 8 27 1 USB to Controller Firmware 8 8 27 2 Controller to USB Me...

Page 210: ... User Setpoints This option allows the operator to choose an analog input device from a drop down menu or exit the window When the operator chooses an analog input device the corresponding setpoints will be displayed The operator has the ability to select and change any of the setpoints The User Analog Setpoints window displays the customer user defined analog alarm data The window will display th...

Page 211: ... to accept the Apply changes Press the OK pushbutton to exit the w 8 8 4 Leak Test Parameters This option displays the current values for the leak parameters You may increase these values but may not decrease them below their pre programmed minimum To change a value select the parameter of your choice by touching the screen Then select either the Delta or the Duration by again touching the screen ...

Page 212: ...tput is operating properly This file operates in a similar manner to manual operation as described in Section 8 8 It is the customer s responsibility to adhere to all operational warnings in Section 8 8 when performing the Digital Out Test Use the scroll bar to view all the digital output values Extreme care must be taken when forcing a digital output either on or off as there is no confirmation i...

Page 213: ... the window or change one or more internal flag states to SET or CLEAR To change an internal flag state the operator will highlight the desired internal flag to change and select SET or CLEAR at the bottom of the window Then press the APPLY pushbutton Upon exiting the Test Internal Flags window any changes made to internal flag states will be ignored and the internal flag states will return to the...

Page 214: ...mation mode for one or more valves or exit the window without changes The valve confirmation mode will be set to CONFIRM or NO CONFIRM 8 8 7 Valve Counts The Valve Counts window will display each valve in the system and the count for each valve The valve count will represent the number of times a pneumatic valve has cycled opened and closed This window will allow the operator to change the valve c...

Page 215: ...chooses a sequence a window will appear with the sequence label as the title The window will display the end stop and fail options lists defined in the Configuration File for the chosen sequence The end stop and fail options lists will contain the sequence label of each main menu sequence that is permitted to be selected from the main menu after an end stop or fail of the chosen sequence Changes t...

Page 216: ...caling values using the keypad The Analog Scaling window will display the analog number analog label device type milliamps or volts minimum analog value and maximum analog value for each analog point This window will allow the operator to exit the window or enter a new analog range minimum and or analog range maximum for one or more analog points To change the analog scaling values select the inpu...

Page 217: ...llow the operator to enter a new setpoint value for one or more chosen alarms or exit the window without changes The fixed Setpoints window will only be accessible with an fixed level password 8 8 14 Alarm Conditions The Alarm Conditions window will display the alarm input type alarm number alarm label and alarm condition for each system alarm This window will allow the operator to change the alar...

Page 218: ... alarm response associated with them The window will allow the operator to exit the window or select one or more alarms to view the alarm response sequence Changes to alarm response sequences will not be allowed 8 8 18 Delay Defaults The Relay Defaults window will display the relay number relay label and relay default state for each relay in the system The window will allow the operator to exit th...

Page 219: ...entire password by dragging your finger across the password field at the bottom of the window and 3 use the keypad to enter the new password Only numeric characters are permitted in 2nd level passwords and the first character will always be the number two 8 8 22 3rd Security List The 3rd Security List window will display the password number and password for each third level password The third leve...

Page 220: ...unction the window will display the current operator s degree of access at the 3rd level of security The degrees of access will be No Access Read Only or Write The operator will be allowed to view the access list or exit the window Only users with the VM password will be allowed to change the 3rd security access 8 8 25 System Setup The System Setup window will display the option to change either l...

Page 221: ...llow the operator to change the screen saver time delay The box will accept the values 0 or 31 99 A time delay of zero will disable the screen saver Key Press Feedback Key Press Feedback enables or disables the beep noise associated with pressing a touch screen key or button Simulation Permits the user to enable or disable simulation capabilities 8 8 25 2 Network Setup The Network Setup option wil...

Page 222: ...e channel number will be written to the NV data file Ethernet Channel Number The Ethernet change channel option will allow the operator to change the left and right channel numbers The numbers may be changed within the range of 0 to 63 Changes to the channel number will be written to the NV data file Network Comm Type The network comm type can be set to either RS 485 or Ethernet 8 8 25 3 IP Settin...

Page 223: ...ptions listed below The operator will be allowed to choose an option or exit the window 8 8 26 1 Controller to USB The controller to USB transfer option will begin the file transfer of the Configuration File from the controller to the target device connected to the controller USB port 8 8 26 2 USB to Controller Transfer The USB to controller transfer option will begin the file transfer of the conf...

Page 224: ...file transfer of the firmware executable files Configuration File and NV Data File from the memory of the Controller to the attached USB Device 8 8 27 3 Delete Nonvolatile Data File And Reboot The Delete Nonvolatile Data File option will delete the nonvolatile NV data file from the memory The controller will reboot after completing deleting the NV data file from memory 8 8 27 4 Other Options Retur...

Page 225: ...eds to be vented Close the manual inlet valve s to the distribution system in the tubing between the process outlet of the source and the distribution system gas panel or branch inlet valve and then vent all pressure in the system Purge out all process gas lines and seal them Tag out and lock out the manual process inlet valve to the distribution system see Section 1 10 or branch inlet valve to pr...

Page 226: ...forming troubleshooting See Section 1 8 of this manual for the proper PPE This section explains how you can identify malfunctions present in the system The format of this section is the presentation of a problem possible cause and possible solutions Before performing troubleshooting review the Safety Section Section 1 and read the warnings If at any time during troubleshooting you are unsure what ...

Page 227: ...dential and Proprietary Data Page 3 9 1 System Shut Down No Lights on Controller Possible Source of Problem Test Solution Electrical power failure Check the power being supplied to the system Verify Internal circuit breaker is in the ON position Restore specified power to electrical control panel Place in ON position ...

Page 228: ...k setting on pressure regulator Open supply valve Set pressure regulator to correct delivery pressure 80 90 psig 5 5 6 2 barg Low purge gas cylinder pressure Check cylinder pressure Change cylinder Instrument nitrogen supply not adequate to open purge gas pneumatic valves Purge gas pressure transducer s malfunctioning Check instrument nitrogen pressure Check input to controller Check connections a...

Page 229: ...w purge gas pressure Purge gas manual isolation valve s closed or partially closed Are any purge vent valves open Instrument nitrogen supply not adequate to open purge gas pneumatic valves See Section 9 2 above Check position of purge gas manual isolation valve s Check position of all purge vent valves Check instrument nitrogen pressure Open fully Close any purge vent valves if open Adjust to 85 9...

Page 230: ...supply not adequate to open process pneumatic valves Process gas pressure transducer s malfunctioning Check position of manual process gas inlet valve Check process gas inlet pressure Check instrument nitrogen pressure Check input to controller Check connections and signal from pressure transducers Open manual process gas inlet valve pressure should indicate source deliverypressure Increase proces...

Page 231: ...ution No or low process gas pressure Process gas manual isolation valve s closed or partially closed See Section 9 4 above Check position of process gas isolation valve s Open fully Are any vent valves open Check position of all vent valves Close any vent valves if open Are process gas pneumatic valves receiving sufficient pressure to open Check if instrument supply is adequate Adjust to 85 95 psi...

Page 232: ... 1 and read the warnings If at any time during troubleshooting you are unsure what to do next DO NOT CONTINUE Contact Versum Materials Inc NOTE Contact Versum Materials Inc if the alarm displayed on the screen does not appear in this section NOTE Contact Versum Materials Inc for the procedure for calibrating pressure transducers 9 6 1 Excess Flow Probable Cause Corrective Action High process gas f...

Page 233: ...All rights reserved Confidential and Proprietary Data Page 7 up in the excess flow switch 9 6 2 Low Pneumatic Supply Pressure Probable Cause CorrectiveAction Pneumatic supply to the controller is less than 65 psig 4 5 barg Adjust pneumatic pressure to the controller to 85 95 psig 5 9 6 6 barg ...

Page 234: ...k setpoints in configuration file and pressure transducer calibration records PT2 Branch 1 through 4 Delivery Pressure Alarms The following are possible branch delivery transducer alarms 9 6 3 Low Branch Delivery Pressure or Very Low Branch Delivery Pressure Probable Cause CorrectiveAction Branch delivery pressure is set below the low or very low delivery pressure setpoints Process gas supply pres...

Page 235: ... 6 4 High Branch Delivery Pressure or Very High Branch Delivery Pressure Probable Cause CorrectiveAction Branch delivery pressure regulator is set too high Decrease the process pressure regulator Observe regulator for proper operation If regulator will not maintain the setpoint it may be creeping Contact your Versum Materials Inc Technical Representative ...

Page 236: ... process gas inlet valve in distribution system or manual process isolation valve at source cabinet is closed Process gas pressure from the source cabinet is below the low or very low setpoints Open manual valve Check delivery pressure from source pressure regulator and adjust to correct deliverypressure 9 6 6 High Process Inlet Pressure or Very High Process Inlet Pressure Probable Cause Correctiv...

Page 237: ...Purge Inlet Pressure Probable Cause CorrectiveAction Purge gas inlet pressure is below the low or very low setpoints Increase purge gas inlet pressure to the distribution system 9 6 8 High Purge Inlet Pressure or Very High Purge Inlet Pressure Probable Cause CorrectiveAction Purge gas inlet pressure is above the high or very high setpoints Decrease purge gas inlet pressure to the distribution syst...

Page 238: ...evision and date shown All rights reserved Confidential and Proprietary Data Page 12 9 6 9 High Vent or Very High Vent Pressure Probable Cause CorrectiveAction Vent line pressure is above the high or very high setpoints Check pollution abatement equipment for obstruction ...

Page 239: ... reserved Confidential and Proprietary Data Page 13 9 6 10 Low Vacuum Generated Probable Cause CorrectiveAction Vacuum Venturi supply pressure or flow is insufficient Vent isolation valve MV22 is closed Verify a Venturi supply of 75 95 psig 5 2 6 6 barg at 50 60 slpm 106 127 cfh is obtainable Open fully ...

Page 240: ..._______________________________________________________________________________ MNL000448 doc Revision 00 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 14 ...

Page 241: ...r shall have the option of requiring the return of the defective material to establish the claim This warranty is expressly conditioned upon installation of the Equipment in accordance with the Equipment drawings and instructions of the Seller and upon Buyer availing itself of the services of Seller s installation and startup advisors to ensure the correct installation and successful operation of ...

Page 242: ...ume responsibility and pay for such defects which are attributable to it and for damages which may occur to the Equipment after delivery to it Seller shall not be responsible for any defects due to or caused by normal wear and tear corrosion erosion or disregard of Seller s operating and maintenance instructions or improper use of equipment 10 2 Routine Maintenance The following maintenance needs ...

Page 243: ...ed Tag out and lockout process valves at the tool gas panel to prevent backflow of another hazardous gas to the distribution system Once the maintenance is complete helium leak test the system using a mass spectrometer Follow the start up procedure in Section 8 3 Personal injury or death may result if proper personal protective equipment PPE is not worn when performing troubleshooting See Section ...

Page 244: ...jury or death Do not use pressurized water to clean inside or outside of cabinets as serious damage could occur to the electronic components All components and parts have been selected by Versum Materials Inc to be compatible with the gas or gases to which they may be exposed This is particularly critical for the softgoods i e o rings valves seats and seals etc It is critical that replacement comp...

Page 245: ...osion or gas leakage Verify that pneumatic tubing is securely connected to valve actuators Every maintenance activity or Every 3 months whichever comes first Cabinets and Frames Sweep enclosures and racks Clean all external surfaces with a clean damp cloth Clean the interior cabinet enclosures and rack frames Caution Use a damp cloth only on the outside of the controller Do not clean controller in...

Page 246: ...ockage silane dusting leakage etc Verify vent is routed to safe location Caution Do not attempt to clean blockage until verifying that there is no gas present Yearl y Excess Flow Switch Test Excess Flow Switch Every 2 years Vacuum Venturi Verify vacuum readings Every maintenance activity Exhaust Ventilation Inlet Filter Check for clogging Monthly Replace or clean as required As necessary Analog Ex...

Page 247: ...ane Check each dome button Look for mis keying and multiple stroking Check for proper sealing of adhesive around edge of graphic Yearly EMI RFI Gasket Look for aging cracks and peeling of the gaskets Also check the surface onto which the gaskets seal Look for oxidation corrosion and foreign material that would prevent proper sealing Yearly Door Hinges Check resistive hinges and adjust accordingly ...

Page 248: ...uld be replaced to ensure the safe and proper functioning of the system Mechanical Components Expected Life Component Expected Life Recommended Minimum Changeout Frequency Pressure Transducers 10 years Process Regulator Diborane 2 years Corrosives 5 years All others 10 years Purge Regulator 10 years Excess Flow Switch 10 years Valves 10 years Pressure Transducers 10 years Valves 10 years Vacuum Ve...

Page 249: ...9 Versum Materials Confidential Electrical Components Expected Life Component Expected Life Recommended Minimum Changeout Frequency Power Supply 5 years Surge Protector Changeout as necessary Expected Life is 10 years with no power surge LCD Backlight Changeout as necessary Expected Life is 5 10 years EMI RFI Gasket Indoor 10 years Outdoor 10 years System Controller 10 years ...

Page 250: ...larm safety interlocks Setpoints for the safety interlocks are located in Section 11 System Specific Information of this manual Item Task Frequency EFS2 Excess flow Verify that process flow rate above the setpoint shuts the system down Every six months PT2 Branch delivery pressure Verify that process delivery pressure above the setpoint shuts the system down Every six months PT1 Process inlet pres...

Page 251: ...the revision and date shown All rights reserved Confidential and Proprietary Data Page 10 11 Versum Materials Confidential 10 4 Emergency Shutdown The following maintenance should be performed to verify functioning of the Emergency Stop Button Item Task Frequency E Stop Activate E stop switch verify system down verify all solenoids closed by assuring air operated valves close within two 2 seconds ...

Page 252: ... shown All rights reserved Confidential and Proprietary Data Page 1 Versum Materials Confidential Section 11 System Specific Information This section is provided as a placeholder for information specific to the system Some information is supplied with the equipment separate from the manual or may be supplied upon request 11 1 System Specifications The specifications are shipped with each system ...

Page 253: ...5 Relay 1 0 Arcom 122238 I O Board w standoffs 8 Relay 8 DI Arcom part AIM104 RELAY8 IN8 6 Display 1 0 Arcom 122239 Touch Screen Controller Arcom part TSC1 7 Display 1 0 VERSUM MATERIALS INC 2302403 LED Display Replacement kit for CCFL 8 Display 1 0 NEC 123159 Inverter Board 9 Fuse 5 0 Littlefuse 41662 Fuse 500MA Sub miniature 10 Graphics 1 0 VERSUM MATERIALS INC 123219 Graphic Overlay Touch Scree...

Page 254: ...CB 22 Power Supply 1 0 VERSUM MATERIALS INC 123952 Redundant Power Supply PCB 23 I O 1 0 VERSUM MATERIALS INC 124780 System I O PCB 24 I O 1 0 VERSUM MATERIALS INC 123625 Door I O 25 I O 0 1 VERSUM MATERIALS INC 123626 Relay Output Kit 17 24 26 Analog 0 1 VERSUM MATERIALS INC 129039 Analog Input Kit 17 32 27 Heater 0 1 Caliente 133937 Heater 100W 100 240V w CTSTAT 0008 28 Miscellaneous 0 1 Allen B...

Page 255: ...ded Mechanical Spare Parts Process Inlet Spool Process Header Spool Process Stick Vent Header Spool Process Out Spool Vacuum Venturi Spool Purge Gas Spool Purge Filter if used Contact Versum Materials Inc when ordering spare parts Your equipment commodity code number will be required when placing your order The commodity code number can be found on the distribution system enclosure door distributi...

Page 256: ..._______________________________________________________________________ MNL000453 doc Revision 1 02 15 2019 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page 5 Versum Materials Confidential ...

Page 257: ..._____________________________ MNL000450 doc Revision 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP 1 Appendix A UHP Tubing This Appendix contains the SEMC QAF030 UHP Tubing and Fitting Specification ...

Page 258: ...y piping installations for the electronics industry 3 0 Responsibility 3 1 The Materials Management group of SEMC is responsible for communicating this requirement to its vendors and ensuring their full compliance 3 2 The vendor shall review and respond to this specification on a line by line basis confirming acceptance or exceptions to each requirement 3 3 The vendor shall provide any additional ...

Page 259: ... VAR or VIM VAR will be specified in the purchase order This range is an actual range and does not allow for rounding of numbers as set forth in ASTM A269 6 1 4 Tubing shall conform to the requirements of ASTM A269 for sizes one half inch diameter and larger and ASTM A632 for sizes smaller than one half inch except where specified differently within this specification 6 1 5 Bar stock shall conform...

Page 260: ... ppm Filtered to no more than 10 particles per scf larger than 0 02 microns at point of use 6 4 2 Deionized water used for cleaning shall have the following minimum point of use requirements and be verified on a monthly basis by an independent laboratory Resistivity 18 megohm centimeters 25 C minimum Total Organic Carbon Less than 50 ppb Viable Bacteria Colonies Less than or equal to ten 100 milli...

Page 261: ...be performed for each order unless otherwise stated in the purchase order The vendor shall provide a detailed procedure for each test required in Sections 6 9 1 2 6 9 1 10 for VERSUM MATERIALS INC review and acceptance 6 8 2 One hundred percent 100 of components shall be visually inspected to assure that interior surfaces exhibit no macroscopic pitting staining or discoloration as can be detected ...

Page 262: ...wing N2 gas at a flow not to exceed 10ÿSCFH IN2 6 8 9 Particle testing shall be performed on one length of cleaned and packaged tube from each size O D and nominal wall thickness Testing shall verify that particle counts be no more than 10 per cubic foot of size greater than or equal to 0 1 microns and zero particles of size 0 3 microns or larger while flowing nitrogen gas at a velocity of 133 ft ...

Page 263: ..._________________ MNL000450 doc Revision 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP 7 Certificate of compliance to the specifications within this document Reference to pre approved exceptions to this Work Instruction ...

Page 264: ...____________________________________ MNL000451 doc Revision 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP 1 Appendix B N2 MSDS This Appendix contains the Nitrogen N2 Material Safety Data Sheet ...

Page 265: ...rint Date 06 24 2016 1 PRODUCT AND COMPANY IDENTIFICATION Product name Chemical formula N2 Synonyms Nitrogen Nitrogen gas Gaseous Nitrogen GAN Product Use Description General Industrial Manufacturer Importer Distribu tor IDES Holding AG Postfach 16 05 29 D 60070 Frankfurt M ULINE 35 Telephone Emergency telephone number 24h 2 HAZARDS IDENTIFICATION GHS classification Gases under pressure Compressed...

Page 266: ...ing self contained breathing apparatus Keep victim warm and rested Call a doctor Apply artificial respiration if breathing stopped Eye contact Not applicable Skin contact Not applicable Ingestion Ingestion is not considered a potential route of exposure Inhalation Remove to fresh air If breathing has stopped or is labored give assisted respirations Supplemental oxygen may be indicated If the heart...

Page 267: ...nsport cylinders Leave valve protection caps in place until the container has been secured against either a wall or bench or placed in a container stand and is ready for use Use an adjustable strap wrench to remove over tight or rusted caps Before connecting the container check the complete gas system for suitability particularly for pressure rating and materials Before connecting the container fo...

Page 268: ...be in place Keep containers tightly closed in a cool well ventilated place Store containers in location free from fire risk and away from sources of heat and ignition Full and empty cylinders should be segregated Do not allow storage temperature to exceed 50 C 122 F Return empty containers in a timely manner Technical measures Precautions Containers should be segregated in the storage area accordi...

Page 269: ... to product classification in Section 2 Upper lower explosion flammability limit No data available Vapor pressure Not applicable Water solubility 0 02 g l Relative vapor density 0 97 air 1 Lighter or similar to air Relative density No data available Partition coefficient n octanol water Not applicable Auto ignition temperature No data available Decomposition temperature No data available Viscosity...

Page 270: ...on is not considered a potential route of exposure Symptoms Exposure to oxygen deficient atmosphere may cause the following symptoms Dizziness Salivation Nausea Vomiting Loss of mobility consciousness Acute toxicity Acute Oral Toxicity No data is available on the product itself Inhalation No data is available on the product itself Acute Dermal Toxicity No data is available on the product itself Sk...

Page 271: ...sms No data available Persistence and degradability Biodegradability No data is available on the product itself Mobility No data available Bioaccumulation No data is available on the product itself Further information No ecological damage caused by this product 13 DISPOSAL CONSIDERATIONS Waste from residues unused products Contact supplier if guidance is required Return unused product in original ...

Page 272: ...n the event of an accident or an emergency The transportation information is not intended to convey all specific regulatory data relating to this material For complete transportation information contact an Air Products customer service representative 15 REGULATORY INFORMATION Toxic Substance Control Act TSCA 12 b Component s None Country Regulatory list Notification USA TSCA Included on Inventory ...

Page 273: ...__________________________________________________________________________________ MNL000451 doc Revision 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP 10 ...

Page 274: ..._________________________________________________________________ MNL000452 doc Revision 0 09 19 2016 Versum Materials Inc as of the revision and date shown All rights reserved Confidential and Proprietary Data Page APP 1 Appendix C PED Assessment ...

Page 275: ...iption GASGUARD UHP Delivery Systems Fluid state All Fluid group All Design Pressure All Piping nominal size DN Less than DN25 Less than one inch nominal diameter Classification according to Table 7 SEP This equipment has been classified as SEP in accordance with Article 3 Section 1 3 of the Pressure Equipment Directive 97 23 EC on the basis that all components contained herein are less than DN25 ...

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