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MNL000439.doc
Revision 0
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
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4
This section provides an overview on site helium leak test requirements.
Section
6:
Distribution
System
Functional
Checklist
This section contains a checklist to assure the system was installed properly.
Section 7: System Description
This section provides an overview of the system.
Section
8:
Operating
Procedures
This section contains the procedures to prepare the system for operation and to operate it.
Section
9:
Troubleshooting
This section provides guidelines for solving operating system alarm problems. It is a
general guide; reference to manufacturers' literature will be required in some cases.
Section
10:
Maintenance
This section provides a guide to routine maintenance operations.
Section
11:
System
Specific
Information
This section provides system specific information such as system specifications,
drawings, recommended spare parts and the program logic chart.
Appendix
A
This Appendix Section contains the Versum Materials, Inc. EES document QAF030
“UHP Tubing and Fitting Specification”.