MNL000446.doc
Revision 00
09/19/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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7.2
Hazardous Gas Manifold Panel
The Gas Panel may consist of pneumatic control valves, manual valves, pressure
monitors, pressure regulators, check valves and various safety/purity components
that are capable of performing the following functions:
•
Distributes gas supplied by an upstream source to one to eight process
tool use points.
•
Regulates inlet pressure to the process tool working pressure.
•
Removes hazardous material, if present, from the valve manifold
Branches and downstream piping prior to maintenance.
•
Provides immediate shut-off in a hazardous situation using fail-safe
pneumatic control valves.
Pneumatic control valves can be used to shut off process gas flow, to control purge
gas flow into the process panel, to vent process gas and purge gas from the panel
and to feed inert gas to the vacuum venturi system. Excess flow sensors are used
on individual Branches to initiate a Branch shutdown if a downstream excess flow
condition exists. Manual valves are used as backup to prevent process gas flow
into the inert gas panel and to prevent contamination of the panel from the exhaust
system. Optional check valves can be used in place of manual valves.
All components and tubing are type 316L stainless steel. Hastelloy C-22 trim is
used in corrosive gas regulators. All components handling the process gas or
purge gas are welded into the system or connected by face seal fittings where
mechanical junctions are necessary.
