IPG IX-6168-PS, Hardware Reference Manual

Page: 63 / 136

6-7
Pneumatics Panel
Nitrogen and Air Filters
The IX-6168-PS system includes a Koby filter for the nitrogen that is used to purge the
beam delivery system and a Koby filter for the air bearing ballast tank (refer to "Air
Bearing Ballast and Air Filter Assembly" on page 6-8). The filters are mounted in the
lower right-rear section of the enclosure and are accessible through the rear door of
the workstation.
Figure 54: Nitrogen and Air Filters—located in the lower right-ear of the enclosure
Process Gas
Nitrogen Filter
Rear Door
Air Filter