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Beam Delivery System
8-2
BDS Configuration
This diagram defines a typical IX-6168-PS beam delivery system. Components and their locations can vary.
Figure 73: IX-6168-PS Beam Delivery System—Scanner Head and component placement may vary
2-8X Telescope
Enclosure
Typical Beam Tube Assembly
Turning Mirror 3
Scanner Beam Field
Digital Process Camera
Turning Mirror 2
Turning Mirror 4
Turning Mirror 1
Output from laser
Beam Stop Assembly
Scanner Head
Digital Inspection Camera
Mirror Cover Alarm
Summary of Contents for IX-6168-PS
Page 1: ...IX 6168 PS Laser Micromachining System Hardware Reference Guide...
Page 26: ...Safety 1 20...
Page 32: ...System Overview 2 6...
Page 40: ...Starting and Shutting Down 3 8...
Page 66: ...Pneumatic Components 6 10...
Page 88: ...Electronic and Computer Components 7 22...