IPG IX-6168-PS, Hardware Reference Manual, Page: 100 / 136

Part Handling System
9-4
Chuck Leveling Procedures
If the chuck needs to be removed and replaced, IPG Photonics recommends that the
service be performed by a IPG Photonics-trained technician who will follow detailed
leveling procedures. If the chuck must be levelled without a IPG Photonics-trained
technician, use the following limited procedure.
Figure 81: Chuck Leveling Procedure
To level the vacuum chuck (limited procedure):
1. Make sure the chuck screws are resting on the leveling pads underneath the
chuck.
2. Use 3mm hex wrench to adjust the height by moving it counterclockwise for
downward movement and clockwise for upwards movement.
3. Level the chuck by eye so there is a uniform gap visible underneath it. To adjust a
leveling screw, follow the steps listed above.
4. Place a material of very uniform thickness on the chuck so you can focus the
inspection camera on it—for example, DuPont™ Kapton® film, transparency
film, or a wafer of uniform thickness.
5. Move the theta stage to 0°.