9-5
Vacuum Chuck Assembly Options
Vacuum Chuck Assembly Options
The chuck size shown in the figure utilizes posts to raise the chuck up 2 inches higher
than the standard process height. Posts can be machined to achieve the desired pro-
cess height lower than 2 inches.
Figure 82: Various 4-inch Style Vacuum Chucks
Summary of Contents for IX-6168-PS
Page 1: ...IX 6168 PS Laser Micromachining System Hardware Reference Guide...
Page 26: ...Safety 1 20...
Page 32: ...System Overview 2 6...
Page 40: ...Starting and Shutting Down 3 8...
Page 66: ...Pneumatic Components 6 10...
Page 88: ...Electronic and Computer Components 7 22...