IPG IX-6168-PS, Hardware Reference Manual

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6-1
6
Pneumatic
Components
A workstation typically includes pneumatic components for distributing and
controlling vacuum, compressed air, and sometimes purge gases. Here are some
typical uses:
The pneumatic components may include electrically controlled solenoids,
mechanically operated switches and shutoffs, filters and mist separators, pressure
gauges and regulators, flow valves and meters, ballast tanks, and various tubes and
fittings.
Pneumatic Supply Typical Uses
Vacuum Holding the part on the chuck
Compressed Air Opening the beam stop
Operating other pneumatically actuated devices such as mirrors or
specialized part-handling devices
Floating the part-handling stages on an air bearing
Purging contaminants from the processing site
High-Purity Purge Gas Purging oxygen from the beam delivery system
Purging contaminants from the processing site